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    • 1. 发明授权
    • Microactuator for a hard disk drive with an integrated gimbal function
    • 具有集成万向节功能的硬盘驱动器的微型制动器
    • US07230800B2
    • 2007-06-12
    • US10627096
    • 2003-07-24
    • Toshiki HiranoUllal Vasant NayakHenry Hung Yang
    • Toshiki HiranoUllal Vasant NayakHenry Hung Yang
    • G11B5/596G11B5/48
    • G11B5/4826
    • A micro-fabricated chip having a stationary structure and a movable structure with a gimbal structure allows pitch and roll motion of the movable structure with respect to the stationary structure. One embodiment of the gimbal structure includes a dimple surface making a rolling-type contact with the stationary structure, and a center bar and a plurality of bar members. An alternative embodiment of the gimbal structure includes a plurality of torsion bar members. Another alternative embodiment of the gimbal structure includes a plurality of flexible members. The micro-fabricated chip can be a passive chip structure or, alternatively, a microactuator having a movable structure that moves in a rotational direction or a translational direction with respect to the stationary structure.
    • 具有静止结构的微制造芯片和具有万向架结构的可移动结构允许可移动结构相对于固定结构的俯仰和滚动运动。 万向架结构的一个实施例包括形成与静止结构的滚动型接触的凹坑表面,以及中心杆和多个杆构件。 万向节结构的一个替代实施例包括多个扭杆构件。 万向架结构的另一个实施例包括多个柔性构件。 微制造芯片可以是无源芯片结构,或者具有可移动结构的微致动器,该可移动结构相对于固定结构在旋转方向或平移方向上移动。
    • 2. 发明授权
    • Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry
    • 具有电隔离可移动部分和相关联的驱动电路的静电微致动器
    • US06853517B2
    • 2005-02-08
    • US10367022
    • 2003-02-13
    • Toshiki HiranoHenry Hung Yang
    • Toshiki HiranoHenry Hung Yang
    • G11B5/596G11B5/55G11B21/08G11B21/10G11B21/21H02N1/00
    • G11B5/5552
    • A bidirectional electrostatic rotary microactuator has two sets of fixed electrodes, one set for driving the microactuator counterclockwise and the other set for driving it clockwise, and a rotatable frame that has movable electrodes attached to its outer wall and interleaved between the fixed electrodes. A layer of insulating material is located between the outer wall to which the movable electrodes are attached and the remainder of the frame so that the movable electrodes are electrically isolated. The frame is maintained at ground electrical potential and the movable electrodes at a fixed non-zero electrical potential. The microactuator is driven by applying a plus or minus voltage to one set of fixed electrodes and the opposite voltage to the other set, while maintaining the movable electrodes at a fixed non-zero voltage. The microactuator is usable as a secondary actuator in a disk drive for fine positioning the read/write head.
    • 双向静电旋转微型致动器具有两组固定电极,一组用于逆时针驱动微型致动器,另一组用于顺时针驱动微致动器;以及可旋转框架,其具有附接到其外壁并在固定电极之间交错的可移动电极。 绝缘材料层位于可移动电极附着的外壁和框架的其余部分之间,使得可移动电极电隔离。 该框架保持在接地电位,并且可移动电极处于固定的非零电位。 通过对一组固定电极施加正或负电压并将相对电压施加到另一组,同时将可动电极保持在固定的非零电压来驱动微致动器。 微型致动器可用作磁盘驱动器中的辅助致动器,用于精确定位读/写头。
    • 3. 发明授权
    • Airflow shroud for HDD tracking microactuator
    • 用于HDD跟踪微致动器的气流护罩
    • US07466513B2
    • 2008-12-16
    • US10643265
    • 2003-08-19
    • Toshiki HiranoHenry Hung Yang
    • Toshiki HiranoHenry Hung Yang
    • G11B33/14G11B5/56G11B21/24
    • G11B5/5552G11B5/40G11B5/6005G11B5/6082
    • An airflow shroud for either a moving-slider-type or a moving-head-type microactuator of a disk drive reduces off-track motion of a read/write element for either a moving-slider-type microactuator or a moving-head-type microactuator. One configuration of the airflow shroud includes a frame portion and an attachment portion. The frame portion has an opening suitable for exposing an air bearing surface of a slider for a disk drive and surrounds the slider and a moving-slider-type microactuator coupled to the slider. The attachment portion is adapted for attachment to a suspension of a disk drive. Another configuration includes a plate portion and a recessed portion. The plate portion is attachable to a slider having a moving-head-type microactuator. The recessed portion corresponds to the moving-head-type microactuator of the slider.
    • 用于磁盘驱动器的移动滑块型或移动头型微型致动器的气流罩减少用于移动滑块式微型致动器或移动头型微型致动器的读/写元件的偏离轨道运动 微型制动器。 气流罩的一个结构包括框架部分和附接部分。 框架部分具有适于暴露用于盘驱动器的滑动器的空气轴承表面的开口,并且包围滑块和联接到滑块的移动滑块式微型致动器。 附接部分适于附接到磁盘驱动器的悬架。 另一种结构包括板部和凹部。 板部分可附接到具有移动头型微致动器的滑块。 凹部对应于滑块的​​移动头式微型致动器。
    • 4. 发明授权
    • Rotary piezoelectric microactuator and disk drive head-suspension assembly
    • 旋转压电微致动器和磁盘驱动头悬挂组件
    • US07382583B2
    • 2008-06-03
    • US10928296
    • 2004-08-26
    • Toshiki HiranoHenry Hung Yang
    • Toshiki HiranoHenry Hung Yang
    • G11B5/56
    • G11B5/5552G11B5/4826G11B5/596
    • The invention is a moving-slider rotary piezoelectric microactuator as the secondary actuator for a dual-stage actuator disk drive. The microactuator has a substrate attached to the disk drive suspension and a rotatable frame that supports the slider, so the head-suspension assembly includes the suspension, the microactuator and the slider with attached read/write head. The rotatable frame is attached to a fixed post on the substrate by relatively stiff torsional springs. A piezoelectric driver having a fixed end attached to the substrate provides bidirectional linear displacement of its movable end. The microactuator has a displacement amplification mechanism that includes a connecting rod and a linkage that translates the linear displacement of the driver to amplified orthogonal linear displacement of the rod. The connecting rod is attached to the rotatable frame at a radial distance to cause rotary movement of the frame, and thereby cross-track displacement of the read/write head on the slider.
    • 本发明是作为双级致动器盘驱动器的辅助致动器的移动滑块旋转压电微型致动器。 微型致动器具有附接到磁盘驱动器悬架的基板和支撑滑块的可旋转框架,因此磁头悬挂组件包括具有附接的读/写头的悬架,微致动器和滑块。 可旋转框架通过相对刚性的扭转弹簧附接到基板上的固定柱。 具有附接到基板的固定端的压电驱动器提供其可移动端的双向线性位移。 微型致动器具有位移放大机构,其包括连杆和将驱动器的线性位移转换成杆的放大的正交线性位移的连杆。 连杆以径向距离连接到可旋转框架以引起框架的旋转运动,从而使读/写头在滑块上的位移。
    • 5. 发明授权
    • Disk drive with rotary piezoelectric microactuator
    • 带旋转压电微致动器的磁盘驱动器
    • US07345851B2
    • 2008-03-18
    • US10927926
    • 2004-08-26
    • Toshiki HiranoHenry Hung Yang
    • Toshiki HiranoHenry Hung Yang
    • G11B5/56
    • G11B5/5552G11B5/4826G11B5/4873G11B5/596G11B7/123
    • A disk drive with a dual-stage actuator has a moving-slider rotary piezoelectric microactuator as the secondary actuator. The microactuator has a substrate attached to the disk drive suspension. A rotatable frame that supports the slider is attached to a fixed post on the substrate by relatively stiff torsional springs. A piezoelectric driver having a fixed end attached to the substrate provides bidirectional linear displacement of its movable end. The microactuator includes a displacement amplification mechanism. In one embodiment an arm or connecting rod is located between the driver's movable end and the frame. A linkage between the movable end of the driver and a first end of the connecting rod translates the linear displacement of the driver to amplified orthogonal linear displacement of the rod. The second end of the rod is attached to the rotatable frame at a radial distance to cause rotary movement of the frame, and thereby cross-track displacement of the read/write head on the slider.
    • 具有双级致动器的盘驱动器具有移动滑块旋转压电微致动器作为辅助致动器。 微型致动器具有附接到磁盘驱动器悬架的基板。 支撑滑块的可旋转框架通过相对刚性的扭转弹簧附接到基板上的固定柱。 具有附接到基板的固定端的压电驱动器提供其可移动端的双向线性位移。 微致动器包括位移放大机构。 在一个实施例中,臂或连杆位于驾驶员的可移动端和框架之间。 驱动器的可移动端与连杆的第一端之间的联动将驱动器的线性位移转换成杆的放大的正交线性位移。 杆的第二端以径向距离附接到可旋转框架以引起框架的旋转运动,从而使读/写头在滑块上的位移。
    • 7. 发明授权
    • Microactuator, head gimbal assembly, and magnetic disk drive
    • 微型制动器,磁头万向架组件和磁盘驱动器
    • US08213127B2
    • 2012-07-03
    • US12284252
    • 2008-09-19
    • Haruhide TakahashiToshiki Hirano
    • Haruhide TakahashiToshiki Hirano
    • G11B5/56
    • G11B5/4826G11B5/4873G11B5/5552
    • Embodiments of the present invention help to suppress reduction of the operation quantity of a microactuator. According to one embodiment, a microactuator comprises a silicon substrate and a piezoelectric element. The silicon substrate has some rigidity and provides elastic counter force to the piezoelectric element. In the piezoelectric element, a secondary piezoelectric layer is laminated on a primary piezoelectric layer opposite from the silicon substrate. The contraction force of the secondary piezoelectric layer acts on the primary piezoelectric layer so that it bends toward the secondary piezoelectric layer opposite from the silicon substrate. When the primary piezoelectric layer expands, the contraction force of the secondary piezoelectric layer acts on the primary piezoelectric layer so that it warps against the primary piezoelectric layer.
    • 本发明的实施例有助于抑制微致动器的操作量的减少。 根据一个实施例,微致动器包括硅衬底和压电元件。 硅衬底具有一定的刚性并且向压电元件提供弹性反作用力。 在压电元件中,在与硅衬底相反的初级压电层上层压次级压电层。 次级压电层的收缩力作用在初级压电层上,使其向与第二压电层相对的硅衬底弯曲。 当主压电层膨胀时,次级压电层的收缩力作用在初级压电层上,使其与主压电层翘曲。
    • 9. 发明授权
    • Microactuator, head gimbal assembly, and disk drive device
    • 微型致动器,头万向架组件和磁盘驱动器
    • US08068313B2
    • 2011-11-29
    • US12271820
    • 2008-11-14
    • Nobumasa NishiyamaRyo YoshidaHaruhide TakahashiShinobu HagiyaToshiki Hirano
    • Nobumasa NishiyamaRyo YoshidaHaruhide TakahashiShinobu HagiyaToshiki Hirano
    • G11B5/48
    • G11B5/4826G11B5/4873G11B5/5552
    • Embodiments of the present invention relate to approaches to effectively let noise on a head slider bonded to a silicon substrate of a microactuator, escape to the ground. A head gimbal assembly (HGA) according to an embodiment of the present invention comprises a microactuator bonded to a gimbal tongue. The microactuator comprises a piezoelectric element and a movable part for moving in response to expansion or contraction of the piezoelectric element. The motion of the movable part causes a head slider to slightly move. The microactuator further comprises a conductive path including an impurity-containing silicon layer formed on the silicon substrate. The conductive path transmits electric charge of the head slider to a suspension. The conductivity of the impurity-containing silicon layer is lower than the one of the silicon substrate so that the noise charge of the head slider may escape to the suspension.
    • 本发明的实施例涉及有效地使结合到微致动器的硅衬底的磁头滑块上的噪声逃逸到地面的方法。 根据本发明的实施例的头万向节组件(HGA)包括结合到万向节舌的微致动器。 微致动器包括压电元件和用于响应于压电元件的膨胀或收缩而移动的可移动部件。 可移动部分的运动导致磁头滑块稍微移动。 微致动器还包括导电路径,该导电路径包括在硅衬底上形成的含杂质的硅层。 导电路径将磁头滑块的电荷传递到悬架。 含杂质的硅层的导电率低于硅衬底的电导率,使得磁头滑块的噪声电荷可能逸出到悬架。