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    • 10. 发明授权
    • Air-guage nozzle probe structure for microlithographic image focusing
    • 用于微光刻图像聚焦的气流探头结构
    • US6029361A
    • 2000-02-29
    • US47422
    • 1998-03-25
    • Thomas H. Newman
    • Thomas H. Newman
    • G01B13/00G01B13/12G01B21/16
    • G01B13/00Y10S33/02
    • An air-probe structure of an air-gauge nozzle that defines an air-probe bore having an elongated, relatively small-area output tip (e.g., 0.3.times.1.3 millimeters) situated at the air-probe structure's output end. Such an air-gauge nozzle is useful in controlling the distance between the bore's output tip and a rowbar workpiece (employed in an optical microlithographic pole trimming step of the fabrication process for thin-film heads) in accordance with the air pressure measured by the air gauge. The air-probe structure's output end preferably also comprises a relatively large-area protective manifold (e.g., 6.times.7 millimeters) surrounding the elongated, relatively small-area output tip. This manifold, which protects the bore's output tip from damage which would otherwise result from inadvertent contact between the rowbar and the bore's elongated, small-area output tip, includes a set of interconnected channels to provide an escape route for air emerging from the bore's output tip and thereby prevent back pressure from being produced in the air-probe bore in response to the output end of said air-probe structure being situated in close proximity to the rowbar. A protective manifold Is also useful in protecting a conventional circular, small-area air-probe bore output tip of an air-probe structure from this type of damage. Also disclosed are air-gauge nozzles comprising a single block that, alternatively, has either two or three spaced-apart, functionally-independent air-probe structures extending from the output end of the single block.
    • 空气规管喷嘴的空气探针结构,其限定空气探针孔,其具有位于空气探针结构的输出端处的细长的相对小面积的输出尖端(例如,0.3×1.3毫米)。 这样的空气喷嘴可用于根据由空气测量的空气压力来控制孔的输出端和行栏工件之间的距离(在薄膜头的制造工艺的光学微光刻极化修整步骤中使用) 测量。 空气探针结构的输出端优选地还包括围绕细长的相对小面积的输出尖端的相对大面积的保护性歧管(例如,6×7毫米)。 该歧管保护孔的输出尖端不会由于排列与孔的细长的小面积输出端之间的无意接触而造成的损伤,包括一组相互连接的通道,以提供从孔的输出中排出的空气的排出路径 从而防止响应于所述空气探针结构的输出端位于靠近行栏而在空气探针孔中产生背压。 保护性歧管也可用于保护传统的圆形,小面积的空气探针孔输出尖端的空气探针结构免受此类损坏。 还公开了包括单个块的空气计量喷嘴,或者具有从单个块的输出端延伸的具有两个或三个隔开的功能上独立的空气探针结构的单个块。