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    • 2. 发明授权
    • Light source device and projection type display capable of enclosing fragment herein in case of burst of discharge lamp during lighting
    • 在照明期间在放电灯突发的情况下能够包围片段的光源装置和投影型显示器
    • US06709112B2
    • 2004-03-23
    • US10268762
    • 2002-10-11
    • Teruo MiyamotoHideharu TanakaMitsuhiro KawaguchiTatsuro HiroseToshimitsu IwaiTomohiro Bessho
    • Teruo MiyamotoHideharu TanakaMitsuhiro KawaguchiTatsuro HiroseToshimitsu IwaiTomohiro Bessho
    • G03B2118
    • G03B21/16
    • It is an object to obtain a light source device and a projection type display device in which a fragment can be completely enclosed therein even if a discharge lamp bursts during lighting. During normal lighting of a discharge lamp (1), an internal space of a light source device (10) and an external space are spatially connected to each other through a vent hole (43) formed on a cutoff valve mechanism (45) and a vent hole (100) formed on a concave reflecting mirror (4). Cooling air is introduced and discharged between the internal space and the external space so that the discharge lamp (1) is cooled down. When the discharge lamp (1) bursts during lighting for some reason, a very strong impulsive pressure wave is generated in a moment of the burst. The pressure wave presses a movable valve (41) provided in the cutoff valve mechanism (45) through the vent hole (100). By the pressing carried out with the pressure wave, the movable valve (41) is pushed up in a direction of an arrow (K1), thereby closing the vent hole (43).
    • 本发明的目的是获得一种光源装置和投影型显示装置,其中即使放电灯在照明期间突然发生,片段也可以被完全封闭。 在放电灯(1)的正常点亮期间,光源装置(10)和外部空间的内部空间通过形成在截止阀机构(45)上的通气孔(43)和 形成在凹面反射镜(4)上的排气孔(100)。 冷却空气在内部空间和外部空间之间被引入和排出,使得放电灯(1)被冷却。 当放电灯(1)由于某些原因在照明期间爆裂时,在突发的瞬间产生非常强的脉冲压力波。 压力波通过通气孔(100)按压设置在截止阀机构(45)中的可动阀(41)。 通过用压力波进行的压力,可动阀(41)沿箭头(K1)的方向被推上,从而关闭通气孔(43)。
    • 3. 发明授权
    • Projection exposure apparatus
    • 投影曝光装置
    • US5311249A
    • 1994-05-10
    • US14855
    • 1993-02-08
    • Kazuya KamonTeruo Miyamoto
    • Kazuya KamonTeruo Miyamoto
    • G03F7/20G03B27/72G03B27/42
    • G03F7/701
    • A projection exposure apparatus includes a light source, a condenser lens for illuminating an illumination light emanating from the light source onto a mask on which a circuit pattern has been formed, a projection lens for condensing the illumination light which has passed through the mask onto a surface of a wafer, and an aperture member disposed between the light source and the condenser lens and having both a transmission area for shaping the light emanating from the light source and a light blocking area formed at a central portion of the transmission area. An outer diameter of the transmission area of the aperture member is set such that a ratio .sigma. of an outer diameter of an effective light source to a diameter of a pupil of the projection lens is 0.6.+-.0.3, while a light blocking rate of the light blocking area is set to 60.+-.35%.
    • 投影曝光装置包括光源,用于将从光源发出的照明光照射到其上形成有电路图案的掩模上的聚光透镜,用于将已经通过掩模的照明光聚焦到投影透镜上的投影透镜 晶片表面和设置在光源和聚光透镜之间的孔部件,并且具有用于使从光源发出的光成形的透射区域和形成在透射区域的中心部分处的遮光区域。 孔径构件的透射区域的外径被设定为使得有效光源的外径与投影透镜的光瞳直径的比率σ为0.6 +/- 0.3,而遮光率 遮光面积设定为60 +/- 35%。
    • 5. 发明授权
    • Projection exposure apparatus
    • 投影曝光装置
    • US5264898A
    • 1993-11-23
    • US936646
    • 1992-08-28
    • Kazuya KamonTeruo MiyamotoYasuhito Myoi
    • Kazuya KamonTeruo MiyamotoYasuhito Myoi
    • G03F7/20G03B27/42G03B27/54
    • G03F7/70091G03F7/701
    • A projection exposure apparatus for use in LSI production comprises a light source, a light condensing optical system through which light from the light source is condensed and applied to a mask carrying a circuit pattern, a projection lens system which projects the light transmitted through the mask onto the surface of a wafer, and an aperture member which is interposed between the light source and the light condensing optical system. The aperture member has a light transmission region for transmitting the light from the light source and a light-interrupting member disposed to extend across the light transmission region. The shape or configuration of the light-interrupting member is determined in accordance with the geometry of the circuit pattern formed on the mask.
    • 用于LSI生产的投影曝光装置包括一个光源,一个聚光系统,通过该聚光光学系统来自光源的光会聚并施加到一个承载电路图形的掩模上;一个投影透镜系统, 在晶片的表面上,以及插入在光源和聚光光学系统之间的开口部件。 光圈构件具有用于透射来自光源的光的透光区域和设置成延伸穿过光透射区域的遮光构件。 遮光构件的形状或构造根据形成在掩模上的电路图案的几何形状来确定。
    • 7. 发明授权
    • Method for evaluating deterioration of insulating paper
    • 绝缘纸的劣化评价方法
    • US06276222B1
    • 2001-08-21
    • US09230507
    • 1999-01-26
    • Teruo MiyamotoYoshihiro MakinoIsao ItakuraHitoshi Anetai
    • Teruo MiyamotoYoshihiro MakinoIsao ItakuraHitoshi Anetai
    • G01N3334
    • H01F27/321G01N17/00G01N33/004G01N33/2841G01N33/346Y02A50/243
    • According to the present invention, insulating paper immersed in an oil is heated and deteriorated at a temperature up to 110° C. which is in an operating temperature region for an oil-filled electric apparatus, and the value of the degree of the polymerization which decreases with the deterioration of the insulating paper and amount of carbon dioxide and carbon monoxide which is generated by the heat decomposition of the insulating paper and which is dissolved in the insulating oil are used to observe the generation rate thereof. The present invention is a method of evaluating deterioration characteristics of insulating paper from the change of the degree of polymerization with passage of time and from the temperature dependence of the gas generation rate. The deterioration of the insulating paper has different aspects in the regions higher and lower than 110° C., and the deterioration characteristics of the insulating paper on the low temperature side can be accurately evaluated. The deterioration of the insulating paper has different aspects in the regions higher and lower than 110° C., and the deterioration characteristics of the insulating paper on the low temperature side can be accurately evaluated.
    • 根据本发明,浸渍在油中的绝缘纸在用于充油电气设备的工作温度区域中的温度高达110℃的温度下被加热和劣化,并且聚合度 绝缘纸的劣化减少,绝热纸的热分解产生的溶解在绝缘油中的二氧化碳和一氧化碳的量被使用来观察其发生率。 本发明是一种评估绝缘纸的劣化特性的方法,其特征在于随着时间的流逝和聚合时间的变化以及气体产生速率的温度依赖性。 绝缘纸的劣化在高于和低于110℃的区域中具有不同的方面,并且可以精确地评估绝缘纸在低温侧的劣化特性。绝缘纸的劣化在 高于和低于110℃的区域,并且可以精确地评价低温侧的绝缘纸的劣化特性。
    • 10. 发明授权
    • Apparatus for measuring angular velocity variation rate of rotary axle
    • 用于测量旋转轴的角速度变化率的装置
    • US06601011B1
    • 2003-07-29
    • US09513220
    • 2000-02-25
    • Teruo MiyamotoYorikatsu Suzuki
    • Teruo MiyamotoYorikatsu Suzuki
    • G06F1500
    • G01P3/48G01P3/489G01P15/165G01P21/00
    • In an apparatus for measuring an angular velocity variation rate of a rotary axle, an approximately circular disc shaped plate is attached approximately concentrically around the rotary axle, in addition to a first pair of velocity pulse generators, each velocity pulse generator of the first pair being dispose around pulse circumference of the plate on a first virtual line passing through a center of the rotatory axle with one of the velocity pulse generators positioned in an 180° revolution difference with respect to each other, each velocity pulse generator of a second pair being disposed around the circumference of the plate on a second virtual line passing through the center of the rotary axle and being inclined through an angle of 180°/m to the first virtual line set when a variation in the angular velocity variation rate indicate signal occurs m-th number of times per revolution of the rotatory axle.
    • 在用于测量旋转轴的角速度变化率的装置中,除了第一对速度脉冲发生器之外,近似圆形的盘形板大约围绕旋转轴同心地安装,第一对的每个速度脉冲发生器是 在通过旋转轴的中心的第一虚拟线上围绕板的脉冲周围布置,其中一个速度脉冲发生器相对于彼此以180°的旋转差定位,第二对的每个速度脉冲发生器被布置 在通过旋转轴的中心的第二虚拟线上围绕板的圆周,并且当角速度变化率的变化指示信号发生时,以180°/ m的角度倾斜到第一虚拟线组, 旋转轴每转的次数。