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1. 发明授权

US08749058B2 Semiconductor device and manufacturing method thereof 有权
标题翻译：半导体装置及其制造方法
公开(公告)号：US08749058B2
公开(公告)日：2014-06-10
申请号：US13324925
申请日：2011-12-13
申请人： Tatsuya Usami , Hideaki Tsuchiya , Yukio Miura , Tomoyuki Nakamura , Koichi Ohto , Chikako Ohto , Shinji Yokogawa
发明人： Tatsuya Usami , Hideaki Tsuchiya , Yukio Miura , Tomoyuki Nakamura , Koichi Ohto , Chikako Ohto , Shinji Yokogawa
IPC分类号： H01L29/72
CPC分类号： H01L23/53295 , H01L21/0217 , H01L21/02211 , H01L21/02274 , H01L21/0234 , H01L21/3105 , H01L21/76826 , H01L21/76834 , H01L23/5226 , H01L23/53238 , H01L23/5329 , H01L2924/0002 , H01L2924/00
摘要： The semiconductor device includes an interlayer insulating film, a wiring provided in the interlayer insulating film, and a SiN film provided over the interlayer insulating film and over the wiring. The peak positions of Si—N bonds of the SiN film, which are measured by FTIR, are within the range of 845 cm−1 to 860 cm−1. This makes it possible to inhibit current leakage in a silicon nitride film, which is a barrier insulating film for preventing the diffusion of wiring metal.
摘要翻译：半导体器件包括层间绝缘膜，设置在层间绝缘膜中的布线以及设置在层间绝缘膜上并在布线上的SiN膜。通过FTIR测量的SiN膜的Si-N键的峰位置在845cm -1至860cm -1的范围内。这使得可以抑制作为用于防止布线金属扩散的阻挡绝缘膜的氮化硅膜中的电流泄漏。

2. 发明申请

US20120181694A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20120181694A1
公开(公告)日：2012-07-19
申请号：US13324925
申请日：2011-12-13
申请人： Tatsuya Usami , Hideaki Tsuchiya , Yukio Miura , Tomoyuki Nakamura , Koichi Ohto , Chikako Ohto , Shinji Yokogawa
发明人： Tatsuya Usami , Hideaki Tsuchiya , Yukio Miura , Tomoyuki Nakamura , Koichi Ohto , Chikako Ohto , Shinji Yokogawa
IPC分类号： H01L23/532 , H01L21/768
CPC分类号： H01L23/53295 , H01L21/0217 , H01L21/02211 , H01L21/02274 , H01L21/0234 , H01L21/3105 , H01L21/76826 , H01L21/76834 , H01L23/5226 , H01L23/53238 , H01L23/5329 , H01L2924/0002 , H01L2924/00
摘要： The semiconductor device includes an interlayer insulating film, a wiring provided in the interlayer insulating film, and a SiN film provided over the interlayer insulating film and over the wiring. The peak positions of Si—N bonds of the SiN film, which are measured by FTIR, are within the range of 845 cm−1 to 860 cm−1. This makes it possible to inhibit current leakage in a silicon nitride film, which is a barrier insulating film for preventing the diffusion of wiring metal.
摘要翻译：半导体器件包括层间绝缘膜，设置在层间绝缘膜中的布线以及设置在层间绝缘膜上并在布线上的SiN膜。通过FTIR测量的SiN膜的Si-N键的峰位置在845cm -1至860cm -1的范围内。这使得可以抑制作为用于防止布线金属扩散的阻挡绝缘膜的氮化硅膜中的电流泄漏。

3. 发明申请

US20100095258A1 Wiring layout method of integrated circuit and computer-readable medium storing a program executed by a computer to execute the same 失效
标题翻译：集成电路的布线方法和存储由计算机执行的程序的计算机可读介质
公开(公告)号：US20100095258A1
公开(公告)日：2010-04-15
申请号：US12588995
申请日：2009-11-04
申请人： Shinji Yokogawa , Hideaki Tsuchiya
发明人： Shinji Yokogawa , Hideaki Tsuchiya
IPC分类号： G06F17/50
CPC分类号： G06F17/5077
摘要： A wiring layout method includes designing a layout of a power wiring for an integrated circuit; designing a layout of plural signal wirings for the integrated circuit; comparing the signal frequency; classifying the signal wirings; calculating an evaluation value of a temperature rise; and modifying the layouts of the integrated circuit.In the comparing the signal frequency, the signal frequency of each of the signal wirings is compared with a predetermined reference frequency. In the classifying the signal wirings, the signal wirings are classified into a first group in which a signal frequency is equal to or higher than a reference frequency and a second group in which a signal frequency is lower than the reference frequency. In the calculating an evaluation value of a temperature rise, an evaluation value of a temperature rise is calculated by excluding the temperature rise caused by a power consumption of the signal wirings of the first group. And in the modifying the layouts, the layouts of the integrated circuit is modified if the evaluation value is over the predetermined allowable value.
摘要翻译：布线布置方法包括设计用于集成电路的电力布线的布局; 设计用于集成电路的多个信号布线的布局; 比较信号频率; 分类信号线; 计算温升的评价值; 并修改集成电路的布局。在比较信号频率时，将每个信号布线的信号频率与预定的参考频率进行比较。在对信号配线进行分类时，信号配线分为信号频率等于或高于参考频率的第一组，信号频率低于参考频率的第二组。在计算温度上升的评估值时，通过排除由第一组的信号配线的功耗引起的温度上升来计算温升的评价值。并且在修改布局时，如果评估值超过预定的允许值，则修改集成电路的布局。

4. 发明授权

US08209651B2 Wiring layout decision method of integrated circuit 失效
标题翻译：集成电路接线布局决策方法
公开(公告)号：US08209651B2
公开(公告)日：2012-06-26
申请号：US12588995
申请日：2009-11-04
申请人： Shinji Yokogawa , Hideaki Tsuchiya
发明人： Shinji Yokogawa , Hideaki Tsuchiya
IPC分类号： G06F17/50
CPC分类号： G06F17/5077
摘要： A wiring layout method includes designing a layout of a power wiring for an integrated circuit; designing a layout of plural signal wirings for the integrated circuit; comparing the signal frequency; classifying the signal wirings; calculating an evaluation value of a temperature rise; and modifying the layouts of the integrated circuit.
摘要翻译：布线布置方法包括设计用于集成电路的电力布线的布局; 设计用于集成电路的多个信号布线的布局; 比较信号频率; 分类信号线; 计算温升的评价值; 并修改集成电路的布局。

5. 发明授权

US07966587B2 Information storage medium on which is stored an interconnection program, interconnection method, interconnection apparatus, and semiconductor device 有权
标题翻译：其上存储有互连程序，互连方法，互连设备和半导体器件的信息存储介质
公开(公告)号：US07966587B2
公开(公告)日：2011-06-21
申请号：US11798981
申请日：2007-05-18
申请人： Hideaki Tsuchiya , Shinji Yokogawa
发明人： Hideaki Tsuchiya , Shinji Yokogawa
IPC分类号： G06F17/50
CPC分类号： G06F17/5036 , G06F17/5081 , G06F2217/78
摘要： Conventionally, an excessively strict current limitation is often adopted. An interconnection apparatus includes an acquisition unit and a decision unit. The acquisition unit serves to acquire a current density and data rate of a region that a specific interconnect passes through. The decision unit serves to decide whether the temperature increase corresponding to the current density and the data rate acquired by the acquisition unit is within a permissible range.
摘要翻译：通常，通常采用过分严格的限制。互连装置包括采集单元和判定单元。采集单元用于获取特定互连通过的区域的电流密度和数据速率。决定单元用于判定与采集单元获取的电流密度和数据速率对应的温度升高是否在容许范围内。

6. 发明申请

US20080150168A1 Information storage medium on which is stored an interconnection program, interconnection method, interconnection apparatus, and semiconductor device 有权
标题翻译：其上存储有互连程序，互连方法，互连设备和半导体器件的信息存储介质
公开(公告)号：US20080150168A1
公开(公告)日：2008-06-26
申请号：US11798981
申请日：2007-05-18
申请人： Hideaki Tsuchiya , Shinji Yokogawa
发明人： Hideaki Tsuchiya , Shinji Yokogawa
IPC分类号： G06F17/50 , H01L23/52
CPC分类号： G06F17/5036 , G06F17/5081 , G06F2217/78
摘要： Conventionally, an excessively strict current limitation is often adopted. An interconnection apparatus includes an acquisition unit and a decision unit. The acquisition unit serves to acquire a current density and data rate of a region that a specific interconnect passes through. The decision unit serves to decide whether the temperature increase corresponding to the current density and the data rate acquired by the acquisition unit is within a permissible range.
摘要翻译：通常，通常采用过分严格的限制。互连装置包括采集单元和判定单元。采集单元用于获取特定互连通过的区域的电流密度和数据速率。决定单元用于判定与采集单元获取的电流密度和数据速率对应的温度升高是否在容许范围内。

7. 发明申请

US20100333052A1 Method of manufacturing semiconductor device, semiconductor inspection apparatus, and program 审中-公开
标题翻译：制造半导体器件的方法，半导体检查装置和程序
公开(公告)号：US20100333052A1
公开(公告)日：2010-12-30
申请号：US12588151
申请日：2009-10-06
申请人： Hideaki Tsuchiya
发明人： Hideaki Tsuchiya
IPC分类号： G06F17/50
CPC分类号： G03F7/70633
摘要： A reliability reference storage unit stores reference data for dividing semiconductor devices into equal to or more than three reliability ranks on the basis of the magnitude of an overlay error between a first interconnect layer and a second interconnect layer disposed over the first interconnect layer. An error storage unit stores overlay errors measured at multiple points within the surface of a semiconductor wafer. An error calculation unit calculates the overlay errors for a plurality of semiconductor chips on the basis of the coordinates of the plurality of semiconductor chips within the surface of the semiconductor wafer and the overlay errors stored in the error storage unit. A reliability information providing unit provides reliability information indicating reliability ranks to the plurality of semiconductor chips on the basis of the overlay errors for the plurality of semiconductor chips and reference data.
摘要翻译：可靠性参考存储单元基于第一互连层和布置在第一互连层上的第二互连层之间的覆盖误差的大小，存储用于将半导体器件分割成等于或大于三个可靠性等级的参考数据。误差存储单元存储在半导体晶片的表面内的多个点处测量的重叠误差。误差计算单元基于半导体晶片的表面内的多个半导体芯片的坐标和存储在误差存储单元中的重叠误差来计算多个半导体芯片的重叠误差。可靠性信息提供单元基于多个半导体芯片和参考数据的重叠误差，向多个半导体芯片提供表示可靠性等级的可靠性信息。

8. 再颁专利

USRE37610E1 Running guide apparatus for vehicle capable of keeping safety at passing through narrow path and the method thereof 失效
标题翻译：能够保持通过狭窄路径的安全的车辆用导向装置及其方法
公开(公告)号：USRE37610E1
公开(公告)日：2002-03-26
申请号：US09102880
申请日：1998-06-24
申请人： Hideaki Tsuchiya , Keiji Hanawa , Keiji Saneyoshi
发明人： Hideaki Tsuchiya , Keiji Hanawa , Keiji Saneyoshi
IPC分类号： B60Q100
CPC分类号： G06K9/00805 , G01S11/12 , G05D1/0251 , G05D2201/0213 , G06T7/593 , G06T2200/28 , G06T2207/10012 , G06T2207/30252 , H04N13/10 , H04N13/167 , H04N13/189 , H04N13/239 , H04N2013/0081 , H04N2013/0092 , H04N2013/0096
摘要： A running guide apparatus for a vehicle includes stereoscopic picture processing element for processing a pair of stereoscopic pictures of an object outside a vehicle imaged by a imaging system mounted on the vehicle, construction detection element for detecting a plurality of various constructions by using three dimensional position data calculated with each portion of the object corresponding to the distance distribution data from the stereoscopic picture processing element; gap distance calculation element for respectively calculating the nearest distance as right and left gap distances each between an extended line of right or left side of the vehicle and each of ends on the vehicle side of the plurality of various constructions detected by the construction detection element; and information element for informing the driver of data related to the right and left gap data calculated by the gap distance calculation element; so as to obtain a distance distribution of an entire picture in dependency upon a discrepancy amount positions corresponding to of the pair of the stereoscopic pictures in accordance with a principle of a triangulation.
摘要翻译：一种用于车辆的行驶引导装置，包括用于处理由安装在车辆上的成像系统成像的车辆外部的对象的一对立体图像的立体图像处理元件，用于通过使用三维位置来检测多个各种结构的构造检测元件根据与来自立体图像处理元件的距离分布数据对应的对象的每个部分计算的数据; 间隙距离计算元件，用于分别计算最近的距离，作为由所述构造检测元件检测到的所述车辆的右侧或左侧的延伸线与所述多个各种结构中的车辆侧的每个端部之间的左右间隙距离; 以及信息单元，用于通知驾驶员与间隙距离计算单元计算的与左右间隙数据有关的数据; 以便根据三角测量原理，根据与一对立体图像对应的差异量位置获得整个图像的距离分布。

9. 发明授权

US07356408B2 Information display apparatus and information display method 有权
标题翻译：信息显示装置和信息显示方法
公开(公告)号：US07356408B2
公开(公告)日：2008-04-08
申请号：US10965126
申请日：2004-10-14
申请人： Hideaki Tsuchiya , Tsutomu Tanzawa
发明人： Hideaki Tsuchiya , Tsutomu Tanzawa
IPC分类号： G08G1/0969 , G01C21/34
CPC分类号： G08G1/166 , G08G1/165
摘要： A recognizing unit recognizes targets located in front of the own vehicle based upon a detection result obtained from a preview sensor, and then, classifies the recognized targets by sorts to which these targets belong. A control unit determines information to be displayed based upon both the targets recognized by the recognizing unit and navigation information. A display device is controlled by the control unit so as to display thereon the determined information. The control unit controls the display device so that symbols indicative of the recognized targets are displayed to be superimposed on the navigation information, and also, controls the display device so that the symbols are displayed by employing a plurality of different display colors corresponding to the sorts to which the respective targets belong.
摘要翻译：基于从预览传感器获得的检测结果，识别单元识别位于本车辆前方的目标，然后根据这些目标所属的种类将识别的目标进行分类。控制单元基于由识别单元识别的目标和导航信息确定要显示的信息。显示装置由控制单元控制，以便在其上显示确定的信息。控制单元控制显示装置，使得指示识别的目标的符号被显示为叠加在导航信息上，并且还控制显示装置，使得通过采用与各种对应的多种不同的显示颜色来显示符号各个目标所属的目标。

10. 发明授权

US6148250A Altitude detection by use of planar approximation of a region of ground surface 失效
标题翻译：通过使用地面区域的平面近似来进行海拔检测
公开(公告)号：US6148250A
公开(公告)日：2000-11-14
申请号：US246456
申请日：1999-02-09
申请人： Keiji Saneyoshi , Hideaki Tsuchiya
发明人： Keiji Saneyoshi , Hideaki Tsuchiya
IPC分类号： G01C11/00 , G01C3/06 , G01C5/00 , G01C11/06 , G06T1/00 , H04N13/00 , G05D1/00
CPC分类号： H04N13/0239 , G01C11/06 , G01C5/005 , G06T7/004 , G06T2207/10012 , H04N13/0003 , H04N13/0055 , H04N13/0221 , H04N13/0296 , H04N2013/0081
摘要： A three-dimensional image of a ground surface taken by a stereoscopic camera is converted to a distance image in a stereoscopic processing section. In an altitude calculating section, after peculiar points contained in the distance image are deleted and further the lens distortion is deleted from the distance image, the distance image is transferred to a real space coordinate. Then, an equation approximating to a plane is obtained from data of the distance image and a length of a perpendicular line to the plane is calculated as a ground altitude.
摘要翻译：由立体摄像机拍摄的地面的三维图像被转换为立体处理部分中的距离图像。在高度计算部分中，在包含在距离图像中的特有点被删除之后，并且从距离图像中删除透镜失真，将距离图像传送到实际空间坐标。然后，从距离图像的数据获得近似于平面的方程，并计算与该平面的垂直线的长度作为地面高度。

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