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    • 1. 发明授权
    • Method of removing siloxanes from silicon compound gases and apparatus therefor, and siloxane content analyzing method and analyzing apparatus
    • 从硅化合物气体中除去硅氧烷的方法及其设备,以及硅氧烷含量分析方法和分析装置
    • US06196050B1
    • 2001-03-06
    • US09217992
    • 1998-12-22
    • Takuya IkedaToyohiko Abe
    • Takuya IkedaToyohiko Abe
    • G01N1910
    • G01N1/405B01D53/0423B01D53/0438B01D2253/106B01D2257/70G01N33/0016G01N2033/0095H01J49/0422H01J49/049Y10T137/86863
    • The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal-column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0° C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
    • 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 去除塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.活化后,将除去塔冷却至60℃的温度,在此温度下 诸如硅烷的硅化合物气体S通过压力调节器5和进入阀6进入去除塔2中以与活化的硅藻土M接触。结果,已经将高纯度硅化合物气体 通过除去硅氧烷净化出来,通过排气管9排出,通过出口阀8将其从输送阀8输送到使用区域。
    • 2. 发明授权
    • Apparatus for analyzing a silicon compound gas for siloxane content
    • 硅化合物气体分析硅氧烷含量的装置
    • US5952557A
    • 1999-09-14
    • US115541
    • 1998-07-15
    • Takuya IkedaToyohiko Abe
    • Takuya IkedaToyohiko Abe
    • B01D53/04G01N1/34G01N33/00H01J49/04G01N30/04G01N7/00G01N31/12E03B31/00
    • G01N1/405G01N33/0016H01J49/0422H01J49/049B01D2253/106B01D2257/70B01D53/0423B01D53/0438G01N2033/0095Y10T137/86863
    • The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
    • 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 除去塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.在活化后,将除去塔冷却至60℃的温度,在该温度下将硅 诸如硅烷的复合气体S通过压力调节器5和入口阀6进入去除塔2,以便与活化的硅藻土M接触。结果,已经纯化的高纯度硅化合物气体 通过除去硅氧烷通过排气管9排出,从该出口阀9将其通过出口阀8输送到使用区域。
    • 3. 发明授权
    • Method of removing siloxanes from silicon compound gases and apparatus
therefor
    • 从硅化合物气体中除去硅氧烷的方法及其设备
    • US5900532A
    • 1999-05-04
    • US15780
    • 1998-01-29
    • Takuya IkedaToyohiko Abe
    • Takuya IkedaToyohiko Abe
    • B01D53/04G01N1/34G01N33/00H01J49/04G01N1/00B01D53/02
    • G01N1/405G01N33/0016H01J49/0422H01J49/049B01D2253/106B01D2257/70B01D53/0423B01D53/0438G01N2033/0095Y10T137/86863
    • The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
    • 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 除去塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.在活化后,将除去塔冷却至60℃的温度,在该温度下将硅 诸如硅烷的复合气体S通过压力调节器5和入口阀6进入去除塔2,以便与活化的硅藻土M接触。结果,已经纯化的高纯度硅化合物气体 通过除去硅氧烷通过排气管9排出,从该出口阀9将其通过出口阀8输送到使用区域。
    • 4. 发明授权
    • Illumination system, liquid crystal device, and electronic device
    • 照明系统,液晶装置和电子装置
    • US08488080B2
    • 2013-07-16
    • US11831553
    • 2007-07-31
    • Takuya Ikeda
    • Takuya Ikeda
    • G02F1/1335
    • G02F1/133615G02B6/0016
    • An illumination system includes: a light source that emits light; and a light guide that introduces the light through a light-incident end face facing the light source and that lets out the light from a light-exiting surface adjacent to the light-incident end face. The light source is disposed adjacent to the light-incident end face and in the position shifted from the center of the width of the light guide intersecting the direction in which the light source emits light. The light-incident end face of the light guide has at least one projection or recess in the direction intersecting the light-exiting direction of the light source. The projection or recess has an asymmetrical shape inclined in the direction intersecting the light-exiting direction of the light source. The projection or recess is inclined in one of directions intersecting the light-exiting direction of the light source.
    • 照明系统包括:发光的光源; 以及导光体,其通过面向光源的光入射端面引入光,并且使来自与光入射端面相邻的光出射面的光放出。 光源与光入射端面相邻,并且在与光源发光的方向相交的光导的宽度的中心偏移的位置。 导光体的光入射端面在与光源的光出射方向相交的方向上具有至少一个突起或凹部。 突起或凹部具有在与光源的光出射方向相交的方向上倾斜的不对称形状。 突起或凹部在与光源的光出射方向相交的方向之一上倾斜。
    • 8. 发明授权
    • Terminal for coaxial cable, and attachment structure and attachment method for attaching the same terminal for coaxial cable
    • 用于同轴电缆的端子,以及用于连接同轴电缆的同一端子的附接结构和附接方法
    • US07029321B2
    • 2006-04-18
    • US11116423
    • 2005-04-28
    • Kensaku SatoTakuya IkedaHiroshi IijimaHideaki Oshima
    • Kensaku SatoTakuya IkedaHiroshi IijimaHideaki Oshima
    • H01R27/00
    • H01R24/40H01R9/0515H01R2103/00
    • Since the invention makes a structure in which bent portions 18A, 18B of grounding pieces 16A, 16B of a center conductor side grounding portion 11 and bent portions 22A, 22B of grounding pieces 20A, 20B of an outer conductor side grounding portion 13 are connected to each other by joint portions 12A, 12B, solders contact portions 17A, 17B and 21A, 21B of the center conductor side grounding portion 11 and the outer conductor side grounding portion 13 respectively to a center conductor grounding side conductor portion F and an outer conductor grounding side conductor portion G of an antenna element of a glass board face 25a, and then breaks off the joint portions 12A, 12B and thereby separates the center conductor side grounding portion 11 and the outer conductor side grounding portion 13 from each other, the invention makes it possible to stably attach a center conductor and an outer conductor of the fore-end portion of a coaxial cable to the same positions as determined in a terminal for coaxial cable and to accurately and stably mount the center conductor and the outer conductor on the same positions as determined also with respect to the interval between them on a mounted object.
    • 由于本发明的结构是将中心导体侧接地部11的接地片16A,16B的弯曲部18A,18B以及外部的接地片20A,20B的弯曲部22A,22B 导体侧接地部分13通过接头部分12A,12B,中心导体侧接地部分11和外导体侧接地部分13的焊料接触部分17A,17B和21A,21B分别连接 到玻璃板面25a的天线元件的中心导体接地侧导体部F和外导体接地侧导体部G,然后断开接合部12A,12B,从而将中心导体侧接地 部分11和外导体侧接地部分13彼此之间,本发明使得可以将同轴电缆的前端部分的中心导体和外导体稳定地连接到与确定相同的位置 在同轴电缆的端子中,并且将中心导体和外部导体准确且稳定地安装在与安装对象上的间隔相对应的相同位置上。