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    • 2. 发明授权
    • Fast atom bombardment source, fast atom beam emission method, and surface modification apparatus
    • 快原子轰击源,快原子束发射法和表面改性装置
    • US07550715B2
    • 2009-06-23
    • US11790611
    • 2007-04-26
    • Takashi OmuraShinji IshitaniNaoki Suzuki
    • Takashi OmuraShinji IshitaniNaoki Suzuki
    • H05H3/02
    • H05H3/02G21K5/02G21K5/04
    • A positive electrode drive unit enables a positive electrode to be repeatedly rotated about the center of the positive electrode to vary a distance between the positive electrode and an atom emission unit. A control unit receives input data which is set to obtain a desired atom density distribution by displacement of the positive electrode, and the control unit outputs a drive control signal for displacing the positive electrode to the positive electrode drive unit. The positive electrode drive unit is stopped during running by the control unit, or a drive speed of the positive electrode drive unit is changed by the control unit. Therefore, a residence time of each attitude is changed in the positive electrode to vary the atom density per unit time.
    • 正极驱动单元能够使正极围绕正极的中心反复旋转,以改变正极和原子发射单元之间的距离。 控制单元接收输入数据,其被设置为通过正极的位移获得期望的原子密度分布,并且控制单元输出用于将正电极移位到正电极驱动单元的驱动控制信号。 正极驱动单元在由控制单元运行期间停止,或者通过控制单元改变正极驱动单元的驱动速度。 因此,在正极中改变每个姿态的停留时间,以改变每单位时间的原子密度。
    • 7. 发明授权
    • Joining apparatus with UV cleaning
    • 带紫外线清洗的接头装置
    • US08240539B2
    • 2012-08-14
    • US11136433
    • 2005-05-25
    • Kazushi HigashiTatsuo SasaokaShinji Ishitani
    • Kazushi HigashiTatsuo SasaokaShinji Ishitani
    • B23K1/06B23K1/00B23K37/00B23K37/04
    • H05K3/328B23K20/10B23K2101/40H01L2224/75H05K3/3489H05K2203/0285
    • The joining apparatus includes a suction nozzle for holding an electronic component, a board stage for holding a circuit board in opposition to the electronic component, and an excimer ultraviolet lamp placed at an irradiation position between the positioned electronic component and circuit board. In such a joining apparatus, ultraviolet irradiation to Au bumps of the electronic component and ultraviolet irradiation to board electrodes of the circuit board are performed concurrently by the excimer ultraviolet lamp to execute a cleaning process of the two metallic portions. Thereafter, ultrasonic vibrations are imparted to the two metallic portions while those metallic portions are kept in contact with each other, by which metal joining between the two metallic portions is fulfilled.
    • 接合装置包括用于保持电子部件的吸嘴,用于保持与电子部件相对的电路板的板台,以及放置在定位的电子部件和电路板之间的照射位置处的准分子紫外线灯。 在这种接合装置中,由准分子紫外线灯同时进行对电子部件的Au凸块的紫外线照射和电路基板的电极板的紫外线照射,以进行两个金属部的清洗处理。 此后,对这两个金属部分施加超声波振动,同时使这些金属部分彼此保持接触,由此满足两个金属部分之间的金属接合。