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1. 发明授权

US5321502A Measuring method and measuring apparatus 失效
标题翻译：测量方法和测量仪器
公开(公告)号：US5321502A
公开(公告)日：1994-06-14
申请号：US910457
申请日：1992-07-08
申请人： Takahiro Matsumoto , Minoru Yoshii , Kenji Saito , Hiroyasu Nose , Koichi Sentoku , Seiji Takeuchi
发明人： Takahiro Matsumoto , Minoru Yoshii , Kenji Saito , Hiroyasu Nose , Koichi Sentoku , Seiji Takeuchi
IPC分类号： G01B9/02 , G03F9/00
CPC分类号： G01B9/02007 , G01B9/02003 , G03F9/7049 , G01B2290/30 , G01B2290/70
摘要： A measuring arrangement includes forming first and second pairs of light beams each having a low frequency light beam and a high frequency light beam. Both pairs of light beams generate beat signals of the same frequency. The low frequency light beam of either pair and the high frequency of the other pair pass through a predetermined optical path to cause phase changes in the same direction. Beat signals are generated by superposing the first and second beam pair to provide measurement information on the phase changes.
摘要翻译：测量装置包括形成第一和第二对光束，每对光束具有低频光束和高频光束。两对光束产生相同频率的节拍信号。任一对的低频光束和另一对的高频光束通过预定的光路以引起相同方向的相位变化。通过叠加第一和第二波束对来产生节拍信号以提供关于相位变化的测量信息。

2. 发明授权

US5432603A Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected 失效
标题翻译：光学外差干涉测量装置和方法以及使用该光学外差干涉测量装置和方法的曝光装置和装置制造方法，其中检测到拍子信号之间的相位差
公开(公告)号：US5432603A
公开(公告)日：1995-07-11
申请号：US153038
申请日：1993-11-17
申请人： Koichi Sentoku , Noriyuki Nose , Minoru Yoshii , Kenji Saito , Toshihiko Tsuji , Takahiro Matsumoto
发明人： Koichi Sentoku , Noriyuki Nose , Minoru Yoshii , Kenji Saito , Toshihiko Tsuji , Takahiro Matsumoto
IPC分类号： G03F9/00 , G01B9/02
CPC分类号： G03F9/70
摘要： An optical element comprised of a plurality of polarizing beam splitters is provided on the optical path of a two-frequency linearly polarized laser beam source, and the optical element divides a light beam from the two-frequency linearly polarized laser beam source into two light beams, whereafter these two light beams are incident on diffraction gratings provided on a mask and a wafer, respectively. A pair of mirrors are provided vertically above the mask, and a pair of lenses, a pair of polarizing plates and a pair of photoelectric detectors are arranged in succession in the directions of reflection of the pair of mirrors. The outputs of the two photoelectric detectors become beat signals, and the phase difference between these beat signals is measured, whereby the alignment of the mask and wafer is effected. Since the optical element is comprised of a plurality of polarizing beam splitters, leak-in light included in each light beam is reduced.
摘要翻译：在双频线性偏振激光束源的光路上设置由多个偏振分束器构成的光学元件，光学元件将来自双频线性偏振激光束源的光束分成两束光束之后，这两个光束分别入射到设置在掩模和晶片上的衍射光栅上。一对镜子垂直地设置在掩模上方，并且一对透镜，一对偏振片和一对光电检测器沿着该对反射镜的反射方向相继布置。两个光电检测器的输出变为差拍信号，并且测量这些拍频信号之间的相位差，从而实现掩模和晶片的对准。由于光学元件由多个偏振分束器组成，因此减少了包括在每个光束中的泄漏光。

3. 发明授权

US5465148A Apparatus and method for detecting the relative positional deviation between two diffraction gratings 失效
$Apparatus and method for detecting the relative positional deviation between two diffraction gratings$
标题翻译：用于检测两个衍射光栅之间的相对位置偏差的装置和方法
公开(公告)号：US5465148A
公开(公告)日：1995-11-07
申请号：US139143
申请日：1993-10-21
申请人： Takahiro Matsumoto , Noriyuki Nose , Kenji Saito , Koichi Sentoku
发明人： Takahiro Matsumoto , Noriyuki Nose , Kenji Saito , Koichi Sentoku
IPC分类号： G01B9/02 , G01B11/24 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70633 , G03F9/70
摘要： A first Savart plate and an object to be measured are arranged on the light path of a Zeeman light source. The object to be measured is constructed of a diffraction grating on a mask and a diffraction grating on a wafer. A second Savart plate, a deflection plate and a photoelectric detector are sequentially arranged in the light path for the diffracted beams from the measured object. The output of the photoelectric detector is connected to a phase-difference unit to detect the phase difference between two beat signals. Herein, the light is split into two beams by the Savart plate. After a diffraction is caused by the diffraction gratings, thereafter, the beams are re-synthesized by the Savart plates. The two beams travel on the same light path, thereby improving a measurement accuracy.
摘要翻译：第一萨瓦特板和待测对象被布置在塞曼光源的光路上。要测量的对象由掩模上的衍射光栅和晶片上的衍射光栅构成。第二萨瓦特板，偏转板和光电检测器依次布置在来自测量对象的衍射光束的光路中。光电检测器的输出连接到相位差单元，以检测两个差拍信号之间的相位差。这里，萨瓦特板将光分成两束。衍射由衍射光栅引起之后，光束由Savart板重新合成。两个光束在相同的光路上行进，从而提高测量精度。

4. 发明授权

US5553110A X-ray mask structure, process for production thereof, apparatus and method for X-ray exposure with the X-ray mask structure, and semiconductor device produced by the X-ray exposure method 失效
标题翻译： X射线掩模结构，其制造方法，用X射线掩模结构X射线曝光的装置和方法以及通过X射线曝光方法制造的半导体器件
公开(公告)号：US5553110A
公开(公告)日：1996-09-03
申请号：US345395
申请日：1994-11-18
申请人： Koichi Sentoku , Kenji Saito , Keiko Chiba , Hiroshi Maehara
发明人： Koichi Sentoku , Kenji Saito , Keiko Chiba , Hiroshi Maehara
IPC分类号： G03F7/20 , C30B33/00 , G03F1/22 , H01L21/027 , H01L21/302 , H01L21/3065 , H01L39/00
CPC分类号： G03F1/22 , Y10S430/167 , Y10S430/168
摘要： An X-ray mask structure for X-ray lithography comprises a pattern, an X-ray transmissive film for holding the pattern, and a frame for supporting the X-ray transmissive film, wherein a light-scattering prevention film is formed on at least a part of the surface of the X-ray transmissive film and/or of the pattern, and the light scattering prevention film may be a flat coating film formed on at least one of the top face and the back face of the X-ray transmissive film and having a refractive index substantially equal to the refractive index of the X-ray transmissive film. A process for producing the X-ray mask structure comprises steps of forming a flat coating film having a refractive index substantially the same as that of the X-ray transmissive film on at least one of the top face and the back face of the X-ray transmissive film, and forming a pattern at least on the top face of the X-ray transmissive film. An X-ray exposure apparatus comprises an X-ray source, and the X-ray mask structure, and conducts transcription of the pattern formed on the x-ray mask structure onto a transcription-receiving member by projecting X-rays through the X-ray mask structure to the transcription receiving member.
摘要翻译：用于X射线光刻的X射线掩模结构包括图案，用于保持图案的X射线透射膜和用于支撑X射线透射膜的框架，其中至少形成光散射防止膜 X射线透过膜表面的一部分和/或图案的一部分，光散射防止膜可以是形成在X射线透射性的上表面和背面的至少一面上的平坦的涂膜并且具有基本上等于X射线透射膜的折射率的折射率。一种X射线掩模结构体的制造方法，其特征在于，在上述X射线掩模结构的上表面和背面的至少一面上，形成与X射线透过膜的折射率基本相同的折射率的平面涂膜，并且至少在X射线透射膜的顶面上形成图案。 X射线曝光装置包括X射线源和X射线掩模结构，并且通过X射线X射线透过X射线掩模结构将X射线掩模结构上形成的图案转印到转录接收部件上，射线掩模结构。

5. 发明授权

US09046059B2 Electric vehicle and fault detection method for exhaust gas recirculation system of internal combustion engine 有权
标题翻译：内燃机废气再循环系统的电动汽车和故障检测方法
公开(公告)号：US09046059B2
公开(公告)日：2015-06-02
申请号：US13618101
申请日：2012-09-14
申请人： Katsuhiro Furuta , Hideo Matsunaga , Hitoshi Kamura , Kenji Saito
发明人： Katsuhiro Furuta , Hideo Matsunaga , Hitoshi Kamura , Kenji Saito
IPC分类号： F02D41/22 , F02M25/07 , B60W20/00 , F02D41/00 , B60K6/442 , B60K6/52 , B60W10/06 , F02D41/02
CPC分类号： F02M25/0702 , B60K6/442 , B60K6/52 , B60W10/06 , B60W20/00 , B60W20/50 , B60W2510/0604 , B60W2510/0671 , B60Y2400/442 , F02D41/0055 , F02D41/022 , F02D2200/0406 , F02M26/49 , Y02T10/47 , Y02T10/6234 , Y02T10/6265
摘要： An electric vehicle includes engine in which the amount of fuel supply is controlled by a throttle, a generator that produces electricity using the power of the engine, a motor outputs power to a drive shaft, an EGR system that supplies gas, exhausted from the engine, to a manifold of the engine, a clutch that switches between the transmission and the non-transmission of power from the engine to the drive shaft, a sensor that measures the change of a pressure of the manifold before and after the EGR system supplies the gas to the manifold, and ECU that performs fault detection of the EGR system using the sensor when conditions, where a series mode is selected, the degree of opening of the throttle is constant, are satisfied.
摘要翻译：电动车辆包括其中通过节气门控制燃料供给量的发动机，使用发动机的动力产生电的发电机，电动机向驱动轴输出动力，从发动机排出的EGR的EGR系统到发动机的歧管，离合器，其在变速器和从发动机到驱动轴的不传动动力之间切换;传感器，其测量在EGR系统供给前后的歧管的压力变化满足歧管的气体和在选择串联模式的情况下，节气门的开度恒定的条件下，使用传感器进行EGR系统的故障检测的ECU。

6. 发明授权

US08597439B2 High-strength cold rolled steel sheet having excellent formability, and plated steel sheet 有权
标题翻译：优异的成形性的高强度冷轧钢板，镀钢板
公开(公告)号：US08597439B2
公开(公告)日：2013-12-03
申请号：US12640229
申请日：2009-12-17
申请人： Shushi Ikeda , Yoichi Mukai , Hiroshi Akamizu , Koichi Makii , Koichi Sugimoto , Shunichi Hashimoto , Kenji Saito
发明人： Shushi Ikeda , Yoichi Mukai , Hiroshi Akamizu , Koichi Makii , Koichi Sugimoto , Shunichi Hashimoto , Kenji Saito
IPC分类号： C22C38/12
CPC分类号： C22C38/02 , C22C38/04 , C22C38/12
摘要： A high-strength cold rolled steel sheet contains:0.10 to 0.28% of C,1.0 to 2.0% of Si,1.0 to 3.0% of Mn, and0.03 to 0.10% of Nb in terms of % by mass,Al is controlled to 0.5 or less, P is controlled to 0.15% or less, and S is controlled to 0.02% or less, and residual austenite accounts for 5 to 20%, bainitic ferrite accounts for 50% or more, and polygonal ferrite accounts for 30% or less (containing 0%), of the entire structure, and a mean number of residual austenite blocks is 20 or more as determined when the random area (15 μm×15 μm) is observed by EBSP (electron back scatter diffraction pattern).
摘要翻译：高强度冷轧钢板包含：以质量％计，C：0.10〜0.28％，Si：1.0〜2.0％，Mn：1.0〜3.0％，Nb：0.03〜0.10％，Al：以下，P为0.15％以下，S为0.02％以下，残留奥氏体为5〜20％，贝氏体铁素体为50％以上，多边形铁素体为30％以下（含有0％），并且当通过EBSP（电子背散射衍射图）观察到随机面积（15mum×15mum））时，残留奥氏体块的平均数为20以上。

7. 发明授权

US08564941B2 Electronic apparatus 失效
标题翻译：电子仪器
公开(公告)号：US08564941B2
公开(公告)日：2013-10-22
申请号：US12827088
申请日：2010-06-30
申请人： Manabu Watabe , Kenji Saito
发明人： Manabu Watabe , Kenji Saito
IPC分类号： H05K5/00 , H05K7/00 , G06F1/16
CPC分类号： G06F1/1616
摘要： An electronic apparatus includes a keyboard unit, a first circuit board, and a first electronic component. The keyboard unit includes a plate that includes a front surface and a bottom surface facing each other and a first coupling portion protruding from the bottom surface, and a plurality of keys provided on the front surface side of the plate. The first circuit board is provided to face the bottom surface via the first coupling portion and includes a second coupling portion to be coupled with the first coupling portion and a first front surface as a surface on a side that faces the bottom surface. The first electronic component is mounted on the first front surface of the first circuit board.
摘要翻译：电子设备包括键盘单元，第一电路板和第一电子元件。键盘单元包括：板，其包括彼此面对的前表面和底表面;以及从底表面突出的第一联接部分和设置在板的前表面侧上的多个键。第一电路板经由第一联接部分设置为面对底面，并且包括与第一联接部分联接的第二联接部分和作为面向底面的一侧上的表面的第一前表面。第一电子部件安装在第一电路板的第一前表面上。

8. 发明授权

US08517795B2 Surface treatment method for vacuum member 有权
标题翻译：真空部件的表面处理方法
公开(公告)号：US08517795B2
公开(公告)日：2013-08-27
申请号：US10532586
申请日：2003-10-31
申请人： Kenji Saito , Tamao Higuchi
发明人： Kenji Saito , Tamao Higuchi
IPC分类号： B24B49/08
CPC分类号： C23F3/06 , B24B1/00 , B24B31/0218 , C23F3/03 , C25F3/16
摘要： A surface-treating process and a forming process in which an inner surface of a vacuum member is mechanically polished in the presence of a liquid medium including no hydrogen atom.
摘要翻译：在不含氢原子的液体介质的存在下，对真空部件的内表面进行机械研磨的表面处理工序和成形工序。

9. 发明授权

US08415502B2 Method and apparatus for producing mono-lower-alkyl monoalkanolamine 有权
标题翻译：单低级烷基单链烷醇胺的制备方法和装置
公开(公告)号：US08415502B2
公开(公告)日：2013-04-09
申请号：US12994599
申请日：2008-10-24
申请人： Tatsuya Tsujiuchi , Shinya Tachibana , Tsuyoshi Oishi , Tomio Mimura , Yasuyuki Yagi , Hidehisa Mita , Ryosuke Araki , Kenji Saito
发明人： Tatsuya Tsujiuchi , Shinya Tachibana , Tsuyoshi Oishi , Tomio Mimura , Yasuyuki Yagi , Hidehisa Mita , Ryosuke Araki , Kenji Saito
IPC分类号： C07C213/04
CPC分类号： C07C213/10 , C07C213/04 , C07C215/08
摘要： A reaction column (12) to which a raw material mixture (11) containing a mono-lower-alkylamine (AA: raw material I) and an alkylene oxide (AO: raw material II) is supplied, an unreacted raw material distillation column (14) that separates an unreacted raw material (15) from a reaction product (13a) (containing the unreacted raw material (15), a target reaction product (monomer) (17), and a by-product (dimer) (18)), and a flash drum (16) to which a reaction product (13b) (containing the target reaction product (monomer) (17) and the by-product (dimer) (18)) is supplied, the flash drum (16) separating a mono-lower-alkyl monoalkanolamine (monomer, the target reaction product 17) in a gas state, are provided.
摘要翻译：将供给含有单低级烷基胺（AA：原料I）和环氧烷（AO：原料II））的原料混合物（11）的反应塔（12），未反应原料蒸馏塔 14），将未反应的原料（15）与反应产物（13a）（含有未反应的原料（15）），目标反应产物（单体）（17）和副产物（二聚体）（18）分离，）和提供有反应产物（13b）（含有目标反应产物（单体）（17）和副产物（二聚体）（18））的闪蒸筒），闪蒸鼓（16）分离出气态下的单低级烷基单烷醇胺（单体，目标反应产物17）。

10. 发明授权

US08323880B2 Positive resist processing liquid composition and liquid developer 失效
标题翻译：正抗蚀剂处理液体组合物和液体显影剂
公开(公告)号：US08323880B2
公开(公告)日：2012-12-04
申请号：US12310054
申请日：2007-08-10
申请人： Yutaka Murakami , Norio Ishikawa , Taku Murata , Kenji Saito , Ryosuke Araki
发明人： Yutaka Murakami , Norio Ishikawa , Taku Murata , Kenji Saito , Ryosuke Araki
IPC分类号： G03F7/26
CPC分类号： G03F7/322
摘要： Disclosed is a positive resist processing liquid composition which is composed of an aqueous solution containing a quaternary ammonium hydroxide represented by the following general formula (I). In the formula, R1 and R3 independently represent a methyl group, and R2 represents an alkyl group having 12-18 carbon atoms.
摘要翻译：公开了由含有由以下通式（I）表示的季铵氢氧化物的水溶液组成的正性抗蚀剂处理液体组合物。在该式中，R 1和R 3独立地表示甲基，R 2表示具有12-18个碳原子的烷基。

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