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1. 发明授权

US5923693A Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper 失效
标题翻译：放电电极，其形状修复，准分子激光振荡器和步进机
公开(公告)号：US5923693A
公开(公告)日：1999-07-13
申请号：US807784
申请日：1997-02-28
申请人： Tadahiro Ohmi , Naoto Sano , Yasuyuki Shirai
发明人： Tadahiro Ohmi , Naoto Sano , Yasuyuki Shirai
IPC分类号： H01L21/027 , H01S3/038 , H01S3/0979 , H01S3/134 , H01S3/225 , H01S3/22
CPC分类号： H01S3/0388
摘要： A discharge electrode for an excimer laser oscillator according to the present invention contains oxygen at a content of not more than 10 ppm, and a method of restoring the shape of a discharge electrode according to the present invention comprises introducing an inert gas into a laser chamber, and conducting discharge for several seconds.
摘要翻译：根据本发明的准分子激光振荡器用放电电极含有不大于10ppm的氧，并且根据本发明的恢复放电电极的形状的方法包括将惰性气体引入激光室并进行放电几秒钟。

2. 发明授权

US06215806B1 Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface 失效
标题翻译：准分子激光发生器具有激光室，具有氟化物钝化的内表面
公开(公告)号：US06215806B1
公开(公告)日：2001-04-10
申请号：US08812288
申请日：1997-03-06
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Naoto Sano
IPC分类号： H01S322
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/225
摘要： An excimer laser generating system includes a laser chamber whose inner surface is covered with a fluorine-passivated surface. Preferably, the surfaces of a blower and heat exchanger disposed in the laser chamber are also covered with a fluorine-passivated surface. The fluorine-passivated surface may be formed of a wide variety of materials including an aluminum oxide film, a fluoride film containing aluminum fluoride and magnesium fluoride, iron fluoride, and nickel fluoride. Preferably, the excimer laser generation system includes a gas supply system having an inert gas purging system so that gas sources can be replaced without exposing the inside of gas supply pipes to atmosphere. With the above arrangement, the excimer laser generating system can generate a laser beam pulse whose energy and shape are maintained constant for a long period of operation time without encountering serious degradation. The invention also provides a high-reliability step-and-repeat exposure apparatus using the above excimer laser generating system, capable of exposing a very fine pattern.
摘要翻译：准分子激光发生系统包括其内表面被氟钝化表面覆盖的激光室。优选地，设置在激光室中的鼓风机和热交换器的表面也被氟钝化表面覆盖。氟钝化表面可以由各种各样的材料形成，包括氧化铝膜，含氟化铝和氟化镁的氟化物膜，氟化铁和氟化镍。优选地，准分子激光发生系统包括具有惰性气体吹扫系统的气体供应系统，使得可以更换气体源而不将气体供应管的内部暴露于大气。通过上述布置，准分子激光发生系统可以产生激光束脉冲，其能量和形状在长时间的操作时间内保持恒定，而不会严重恶化。本发明还提供了使用上述准分子激光发生系统的能够曝光非常精细图案的高可靠性分步重复曝光装置。

3. 发明授权

US07031364B2 Gas laser device and exposure apparatus using the same 失效
标题翻译：气体激光装置及使用其的曝光装置
公开(公告)号：US07031364B2
公开(公告)日：2006-04-18
申请号：US09163402
申请日：1998-09-30
申请人： Naoto Sano , Yoshiyuki Nagai
发明人： Naoto Sano , Yoshiyuki Nagai
IPC分类号： H01S3/22
CPC分类号： H01S3/036
摘要： In a gas laser device, a laser gas sealingly stored in a chamber is excited using a discharging electrode that is electrically discharged. Laser light produced by the electrical discharging is totally reflected by a total reflection mirror. An output window partially reflects the laser light and outputs a portion of the laser light reflected between the total reflection mirror and the output window. A blower circulates the laser gas within the chamber so that the laser gas passing an electrical discharging region of the discharging electrode is circulated in the chamber and is returned to the electrical discharging region of the discharging electrode. The blower is operated according to the state of electrical discharging from the discharging electrode. The blower operation includes operating rotation of the blower in a stand-by state in which no laser gas is excited by the electrical discharging from said discharging electrode so that no laser light is emitted but the gas laser device is in a condition to output the laser light, and operating rotation of the blower in an in-operation state in which the laser gas is excited by the electrical discharging from said discharge electrode and laser light is outputted.
摘要翻译：在气体激光装置中，利用电放电的放电电极激发密封地存储在腔室中的激光气体。由放电产生的激光完全由全反射镜反射。输出窗部分地反射激光并输出在全反射镜和输出窗之间反射的激光的一部分。鼓风机使激光气体在室内循环，使得通过放电电极的放电区域的激光气体在室内循环并返回到放电电极的放电区域。鼓风机根据从放电电极放电的状态进行操作。鼓风机操作包括在等待状态下操作鼓风机的旋转，其中没有激光气体通过从所述放电电极的放电而被激发，使得不会发射激光，但是气体激光装置处于输出激光的状态输出激光器通过从放电电极放电激光而激发激光的工作状态下的鼓风机的光和操作旋转。

4. 发明申请

US20050189566A1 Switching power-supply module 有权
标题翻译：开关电源模块
公开(公告)号：US20050189566A1
公开(公告)日：2005-09-01
申请号：US10746660
申请日：2003-12-26
申请人： Tadahiko Matsumoto , Syuichi Honda , Yasuo Ohashi , Naoto Sano
发明人： Tadahiko Matsumoto , Syuichi Honda , Yasuo Ohashi , Naoto Sano
IPC分类号： H02M3/28 , H01L31/109 , H02M3/335 , H02M7/00 , H05K1/14 , H05K3/34 , H05K3/36
CPC分类号： H02M7/003 , H02M3/33538 , H02M2001/0074 , H05K1/144 , H05K3/3405 , H05K3/3421 , H05K3/368 , H05K2201/10386
摘要： A switching power-supply module includes circuit boards, power conversion circuit sections provided on the respective circuit boards, conductor land patterns provided with spacing therebetween along edges of the circuit boards, conductor terminals for interconnecting the conductor land patterns. The circuit boards are stacked with spacing therebetween with the corresponding conductor land patterns being aligned, and the aligned conductor land patterns are interconnected by the corresponding conductor terminals. At least one of the conductor terminals includes an interboard-connection portion for interconnecting the conductor land patterns of the circuit boards and a leg portion that extends from the interboard-connection portion in the stacking direction of the circuit boards and that defines an external-connection portion, and the other conductor terminals each function as an interboard-connection dedicated terminal for providing connection between the circuit boards.
摘要翻译：开关电源模块包括电路板，设置在各个电路板上的功率转换电路部分，沿着电路板的边缘设置有间隔的导体焊盘图案，用于互连导体焊盘图案的导体端子。电路板之间具有间隔地堆叠，相应的导体焊盘图案对准，并且对准的导体焊盘图案通过相应的导体端子互连。至少一个导体端子包括用于互连电路板的导体焊盘图案的板间连接部分和从电路板的层叠方向上从板间连接部分延伸的脚部分，并且限定外部连接部分，其他导体端子各自用作板间连接专用端子，用于提供电路板之间的连接。

5. 发明授权

US06795167B2 Projection exposure apparatus and device manufacturing method using the same 失效
标题翻译：投影曝光装置及其制造方法
公开(公告)号：US06795167B2
公开(公告)日：2004-09-21
申请号：US09986303
申请日：2001-11-08
申请人： Masakatsu Ota , Naoto Sano
发明人： Masakatsu Ota , Naoto Sano
IPC分类号： G03B2754
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70075 , G03F7/70108 , G03F7/70358 , G03F7/70566 , G03F7/70575
摘要： A projection exposure apparatus includes an illumination optical system for illuminating a pattern of a reticle with laser light from a continuous emission excimer laser, a projection optical system projecting the illuminated pattern onto a substrate, an adjusting device for adjusting an optical characteristic of the projection optical system in accordance with a change in wavelength of the laser, and a wavelength stabilizing device for stabilizing the wavelength of the laser light when the adjustment of the optical characteristic of the projection optical system by the adjusting device is insufficient.
摘要翻译：投影曝光装置包括：照明光学系统，用于利用来自连续发射准分子激光器的激光照射标线图案;将照射图案投影到基板上的投影光学系统;调整投影光学的光学特性的调节装置; 根据激光器的波长变化的系统，以及用于在通过调节装置调整投影光学系统的光学特性的情况下稳定激光的波长的波长稳定装置。

6. 发明授权

US06434027B1 Switching power supply having a plurality of output voltages and minimal number of terminals 有权
标题翻译：开关电源具有多个输出电压和最少数量的端子
公开(公告)号：US06434027B1
公开(公告)日：2002-08-13
申请号：US09625714
申请日：2000-07-26
申请人： Naoto Sano , Shingo Kunii , Yasuyuki Morishima
发明人： Naoto Sano , Shingo Kunii , Yasuyuki Morishima
IPC分类号： H02M3335
CPC分类号： H02M3/07 , H02M3/156 , H02M2003/071
摘要： A switching power supply which is capable of generating several different output voltages and which can be easily miniaturized by using a transformer with a small number of terminals. For example, using a transformer with four terminals and three windings that are connected in series, a rectifying-smoothing circuit having a diode and a capacitor is connected to a connection point of the collector of a switching transistor and the windings. A further pair of rectifying-smoothing circuits having diodes and capacitors is commonly connected to one end of the windings, according to one example. As a result thereof, three voltages are generated.
摘要翻译：一种开关电源，其能够产生几种不同的输出电压，并且可以通过使用具有少量端子的变压器而容易地小型化。例如，使用具有串联连接的四个端子和三个绕组的变压器，具有二极管和电容器的整流平滑电路连接到开关晶体管的集电极和绕组的连接点。根据一个示例，另外一对具有二极管和电容器的整流平滑电路通常连接到绕组的一端。结果，产生三个电压。

7. 发明申请

US20120259714A1 ALLOCATION APPARATUS AND ALLOCATION METHOD 审中-公开
标题翻译：分配装置和分配方法
公开(公告)号：US20120259714A1
公开(公告)日：2012-10-11
申请号：US13430946
申请日：2012-03-27
申请人： Naoto Sano
发明人： Naoto Sano
IPC分类号： G06Q50/12
CPC分类号： G06Q30/0601 , G06Q50/12
摘要： An allocation apparatus registers the data of the commodity selected as allocation object of the key button from the commodities displayed the names in association with the key button which is specified, then, if the existence of the commodity which is associated with the registered commodity is confirmed, takes the associated commodity as allocation object of next key button.
摘要翻译：分配装置从所指定的按键与所显示的名称的商品登记作为按键按钮的分配对象选择的商品的数据，然后如果确认与登记的商品有关的商品的存在将相关商品作为下一个按键按钮的分配对象。

8. 发明授权

US06486567B2 Multi-output DC-DC converter and electronic apparatus using the same 失效
标题翻译：多输出DC-DC转换器和使用其的电子设备
公开(公告)号：US06486567B2
公开(公告)日：2002-11-26
申请号：US09985723
申请日：2001-10-15
申请人： Naoto Sano , Shingo Kunii
发明人： Naoto Sano , Shingo Kunii
IPC分类号： H02J100
CPC分类号： H02M3/158 , H02M2001/009 , Y10T307/414
摘要： A multi-output DC-DC converter includes a step-down DC-DC converter circuit which includes a switching device for switching an input DC voltage to convert it to a pulse voltage, a choke coil and a smoothing capacitor for smoothing the pulse voltage to obtain a first output lower than the input DC voltage, and a flywheel rectifying device for causing a current to flow through the choke coil when the switching device is off; and a rectifying circuit for processing and rectifying the pulse voltage in the DC-DC converter circuit to obtain a second output. Since the flywheel rectifying device is a bi-directional synchronous rectifying device which is turned on when the switching device is off, even when the load current of the first output decreases, the amplitude of the source voltage of the switching device is not reduced. Therefore, the second output obtained from the rectifying circuit always maintains a normal value.
摘要翻译：多输出DC-DC转换器包括降压DC-DC转换器电路，其包括用于切换输入DC电压以将其转换成脉冲电压的开关装置，扼流线圈和用于使脉冲电压平滑的平滑电容器获得低于输入直流电压的第一输出;以及飞轮整流装置，用于当切换装置关闭时使电流流过扼流线圈; 以及整流电路，用于处理和整流DC-DC转换器电路中的脉冲电压以获得第二输出。由于飞轮整流装置是开关装置关闭时导通的双向同步整流装置，所以即使第一输出的负载电流减小，开关装置的源极电压的振幅也不会降低。因此，从整流电路获得的第二输出总是保持正常值。

9. 发明授权

US5661547A Exposure method and apparatus and device produced thereby in which a stop includes an opening which is variable to substantially compensate for a change in bandwidth of a laser beam 失效
标题翻译：由此产生的曝光方法和装置和装置，其中停止包括可变的大致补偿激光束的带宽变化的开口
公开(公告)号：US5661547A
公开(公告)日：1997-08-26
申请号：US444929
申请日：1995-05-19
申请人： Masato Aketagawa , Naoto Sano
发明人： Masato Aketagawa , Naoto Sano
IPC分类号： G03F7/20 , G03G15/04 , H01L21/027 , H01L21/30 , H01S3/134 , G03B27/42
CPC分类号： G03F7/70575 , Y10S430/146
摘要： An exposure apparatus includes a supplying device for supplying a band-narrowed laser beam, an optical system for directing the laser beam to a substrate, a detecting device for detecting a change in bandwidth of the laser beam and a stop provided on a path of the laser beam, the stop including an opening having a size which is variable to substantially compensate for the change in bandwidth of the laser beam. Also, a device is manufactured by a method of exposing a photosensitive layer of a substrate through an optical system with a band-narrowed laser beam to print a circuit pattern on the photosensitive layer, in which a bandwidth of the laser beam is substantially compensated for, upon detecting a change in bandwidth of the laser beam, by adjusting a size of an opening of a stop provided in a path of the laser beam.
摘要翻译：曝光装置包括用于提供带窄激光束的供应装置，用于将激光束引导到基板的光学系统，用于检测激光束的带宽变化的检测装置和设置在激光束的路径上的停止激光束，其包括具有可变大小以大致补偿激光束带宽变化的尺寸的开口。另外，通过通过具有带宽窄的激光束的光学系统曝光基板的感光层以在光敏层上印刷电路图案的方法来制造器件，其中激光束的带宽基本上被补偿在检测到激光束的带宽变化时，通过调整设置在激光束路径中的停止开口的尺寸。

10. 发明授权

US5121160A Exposure method and apparatus 失效
标题翻译：曝光方法和装置
公开(公告)号：US5121160A
公开(公告)日：1992-06-09
申请号：US715745
申请日：1991-06-18
申请人： Naoto Sano , Masato Aketagawa , Hitoshi Nakano , Takahisa Shiozawa
发明人： Naoto Sano , Masato Aketagawa , Hitoshi Nakano , Takahisa Shiozawa
IPC分类号： G03F7/20
CPC分类号： G03F7/70058
摘要： An exposure method, includes the steps of directing a radiation beam to a substrate to be exposed; and substantially correcting any change in the size of the radiation beam. Also, there is disclosed an exposure apparatus, which includes a laser for emitting a laser beam; a detector for detecting any change in the size of the laser beam; and a device for directing the laser beam to a substrate to be exposed, the directing device including a compensator responsive to an output signal from the detector for substantially correcting the change in the beam size.
摘要翻译：曝光方法包括以下步骤：将辐射束引导到要曝光的基底; 并且基本上校正辐射束的尺寸的任何变化。此外，公开了一种曝光装置，其包括用于发射激光束的激光器; 用于检测激光束尺寸变化的检测器; 以及用于将激光束引导到待暴露的基板的装置，所述引导装置包括响应于来自检测器的输出信号的补偿器，用于基本上校正光束尺寸的变化。

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