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    • 2. 发明申请
    • OPTICAL MODULATOR
    • US20230036811A1
    • 2023-02-02
    • US17716440
    • 2022-04-08
    • TDK CORPORATION
    • Kenji NAGASEHiroshi TAKEAnthony Reymund Melad BINARAOCheng Bu HENG
    • G02F1/225G02F1/035G02F1/21
    • The invention relates to an optical modulator. The optical modulator comprising: a substrate; an electro-optical material layer formed on a predetermined region of the substrate; a buffer layer formed on the substrate which is provided so as to cover the electro-optical material layer; and an electrode formed on the buffer layer, and the electro-optical material layer has a RF portion optical waveguide which is applied with a modulation signal and is patterned, and a DC portion optical waveguide which is applied with a DC voltage and is patterned, the electrode has an RF portion electrode formed on the buffer layer where the RF portion optical waveguide is located and a DC portion electrode formed on the buffer layer where the DC portion optical waveguide is located, the film thickness of the DC portion electrode is smaller than the film thickness of the RF portion electrode. According to the present invention, an optical modulator which can suppress electrical crosstalk caused by the noise signal generated in the DC portion electrode and can improve high-frequency characteristics and achieve a widening of bandwidth of the optical frequency band in the high-frequency signals propagating in the RF portion electrode is provided.