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    • 1. 发明授权
    • Process for producing single-crystal semiconductor and apparatus for producing single-crystal semiconductor
    • 单晶半导体的制造方法及单晶半导体的制造装置
    • US07235128B2
    • 2007-06-26
    • US11005180
    • 2004-12-06
    • Susumu MaedaHiroshi InagakiShigeki KawashimaShoei KurosakaKozo Nakamura
    • Susumu MaedaHiroshi InagakiShigeki KawashimaShoei KurosakaKozo Nakamura
    • C30B15/20
    • C30B29/06C30B15/20C30B15/22C30B15/36Y10S117/90Y10T117/1004
    • A process for producing a single-crystal semiconductor and an apparatus therefor. A single-crystal semiconductor of large diameter and large weight can be lifted with the use of existing equipment not having any substantial change thereto while not influencing the oxygen concentration of single-crystal semiconductor and the temperature of melt and while not unduly raising the temperature of seed crystal. In particular, the relationship (L1, L2, L3) between the allowable temperature difference (ΔT) and the diameter (D) of seed crystal (14) is preset so that the temperature difference between the seed crystal (14) at the time the seed crystal (14) is immersed in the melt and the melt (5) falls within the allowable temperature difference (ΔT) at which dislocations are not introduced into the seed crystal (14). In accordance with the relationship (L1, L2, L3), the allowable temperature difference (ΔT) corresponding to the diameter (D) of seed crystal (14) to be immersed in the melt is determined. Temperature control is conducted so that at the time the seed crystal (14) is immersed in the melt (5) the temperature difference between the seed crystal (14) and the melt (5) falls within the determined allowable temperature difference (ΔT).
    • 一种单晶半导体的制造方法及其装置。 可以使用不具有任何显着变化的现有设备来提升大直径和大重量的单晶半导体,同时不影响单晶半导体的氧浓度和熔体的温度,同时不会过度地提高温度 晶种。 特别地,预设晶种(14)的允许温差(DeltaT)和直径(D)之间的关系(L 1,L 2,L 3),使得晶种(14)在 籽晶(14)浸入熔体中的时间和熔体(5)落入未被引入到晶种(14)中的位错的允许温度差(DeltaT)之内。 根据关系(L 1,L 2,L 3),确定与浸入熔体中的晶种(14)的直径(D)相对应的容许温度差(DeltaT)。 进行温度控制,使晶种(14)浸入熔融物(5)中时晶种(14)和熔体(5)之间的温度差落在确定的允许温差(DeltaT)之内。
    • 3. 发明申请
    • Method for producing silicon wafer
    • 硅晶片的制造方法
    • US20060005762A1
    • 2006-01-12
    • US10533147
    • 2003-10-31
    • Susumu MaedaHiroshi InagakiShigeki KawashimaShoei KurosakaKozo Nakamura
    • Susumu MaedaHiroshi InagakiShigeki KawashimaShoei KurosakaKozo Nakamura
    • C30B15/00C30B21/06C30B23/00C30B30/04C30B27/02
    • C30B29/06C30B15/203
    • The present invention is to produce a silicon crystal wherein the boron concentration in the silicon crystal and the growth condition V/G are controlled so that the boron concentration in the silicon crystal is no less than 1×1018 atoms/cm3 and the growth condition V/G falls within the epitaxial defect-free region α2 whose lower limit line LN1 is the line indicating that the growth rate V gradually drops as the boron concentration increases. Further, the present invention is to produce a silicon wafer wherein the boron concentration in the silicon crystal and the growth condition V/G are controlled so as to include at least the epitaxial defect region β1, and the heat treatment condition of the silicon crystal and the oxygen concentration in the silicon crystal are controlled so that no OSF nuclei grow to OSFs. Moreover, the present invention is to produce a silicon crystal wherein the boron concentration in the silicon crystal and the growth condition V/G are controlled so that they fall in the vicinity of the lower limit line LN3 within the epitaxial defect-free region α1.
    • 本发明是为了制造硅晶体,其中硅晶体中的硼浓度和生长条件V / G被控制,使得硅晶体中的硼浓度不低于1×10 18原子/ cm 3,并且生长条件V / G落在外延无缺陷区域α2N中,其下限线LN1是表示生长速率V逐渐下降的线 硼浓度增加。 此外,本发明是为了制造硅晶片,其中硅晶体中的硼浓度和生长条件V / G被控制为至少包括外延缺陷区β1,并且 控制硅晶体的热处理条件和硅晶体中的氧浓度,使得OSF核不生长到OSF。 此外,本发明是为了制造硅晶体,其中硅晶体中的硼浓度和生长条件V / G被控制为使得它们落入外延缺陷区域内的下限线LN3附近, SUB> 1
    • 4. 发明申请
    • Process for producing single-crystal semiconductor and apparatus for producing single-crystal semiconductor
    • 单晶半导体的制造方法及单晶半导体的制造装置
    • US20050139149A1
    • 2005-06-30
    • US11005180
    • 2004-12-06
    • Susumu MaedaHiroshi InagakiShigeki KawashimaShoei KurosakaKozo Nakamura
    • Susumu MaedaHiroshi InagakiShigeki KawashimaShoei KurosakaKozo Nakamura
    • C30B15/00C30B15/20C30B15/22C30B15/36C30B29/06C30B21/06C30B27/02C30B28/10C30B30/04
    • C30B29/06C30B15/20C30B15/22C30B15/36Y10S117/90Y10T117/1004
    • A process for producing a single-crystal semiconductor and an apparatus therefor. A single-crystal semiconductor of large diameter and large weight can be lifted with the use of existing equipment not having any substantial change thereto while not influencing the oxygen concentration of single-crystal semiconductor and the temperature of melt and while not unduly raising the temperature of seed crystal. In particular, the relationship (L1, L2, L3) between the allowable temperature difference (ΔT) and the diameter (D) of seed crystal (14) is preset so that the temperature difference between the seed crystal (14) at the time the seed crystal (14) is immersed in the melt and the melt (5) falls within the allowable temperature difference (ΔT) at which dislocations are not introduced into the seed crystal (14). In accordance with the relationship (L1, L2, L3), the allowable temperature difference (ΔT) corresponding to the diameter (D) of seed crystal (14) to be immersed in the melt is determined. Temperature control is conducted so that at the time the seed crystal (14) is immersed in the melt (5) the temperature difference between the seed crystal (14) and the melt (5) falls within the determined allowable temperature difference (ΔT).
    • 一种单晶半导体的制造方法及其装置。 可以使用不具有任何显着变化的现有设备来提升大直径和大重量的单晶半导体,同时不影响单晶半导体的氧浓度和熔体的温度,同时不会过度地提高温度 晶种。 特别地,预设晶种(14)的允许温差(DeltaT)和直径(D)之间的关系(L 1,L 2,L 3),使得晶种(14)在 籽晶(14)浸入熔体中的时间和熔体(5)落入未被引入到晶种(14)中的位错的允许温度差(DeltaT)之内。 根据关系(L 1,L 2,L 3),确定与浸入熔体中的晶种(14)的直径(D)相对应的允许温度差(DeltaT)。 进行温度控制,使晶种(14)浸入熔融物(5)中时晶种(14)和熔体(5)之间的温度差落在确定的允许温差(DeltaT)之内。
    • 8. 发明授权
    • Monitoring and diagnosing device for working machine
    • 工作机监控诊断装置
    • US08838324B2
    • 2014-09-16
    • US13575668
    • 2010-01-28
    • Hideaki SuzukiYoshinori FurunoKozo NakamuraShinya YudaHiroki Uchiyama
    • Hideaki SuzukiYoshinori FurunoKozo NakamuraShinya YudaHiroki Uchiyama
    • G06F11/30G06F11/00G06F7/70G06F19/00E02F9/26B66C13/16E02F9/20G05B23/02G06Q10/06
    • E02F9/2025B66C13/16E02F9/264E02F9/267G05B23/0278G06Q10/06
    • Monitoring and diagnosing device including: a classification information storage section; frequency information storage section: a first data classifier section reading out reference classification information from the classification information storage section, comparing operational data, detected by a plurality of sensors and inputted in time sequence, with the reference classification information to classify the operational data, and then generating operational data classification information; a frequency comparator section compiling the operational data classification information, generating operational data frequency information by adding, to the operational data classification information, appearance frequency information for each classification of operational data, reading out reference frequency information from the frequency information storage section, and then generating operational data frequency comparison information by comparing operational data frequency information with the reference frequency information; and an abnormality diagnosing section performing an abnormality diagnosis upon the working machine by use of the operational data classification information and operational data frequency comparison information.
    • 监测和诊断装置包括:分类信息存储部分; 频率信息存储部分:从分类信息存储部分读取参考分类信息的第一数据分类器部分,将由多个传感器检测并且按时间顺序输入的操作数据与参考分类信息进行比较以对操作数据进行分类;以及 然后生成操作数据分类信息; 频率比较器部分,编译操作数据分类信息,通过向操作数据分类信息添加用于操作数据的每个分类的出现频率信息,从频率信息存储部分读出参考频率信息,生成操作数据频率信息,然后 通过将操作数据频率信息与参考频率信息进行比较来产生操作数据频率比较信息; 以及异常诊断部,其通过使用所述操作数据分类信息和操作数据频率比较信息对所述作业机进行异常诊断。
    • 9. 发明授权
    • Signal conversion circuit, and multiple-primary-color liquid crystal display device provided with same
    • 信号转换电路,以及多原色液晶显示装置
    • US08780029B2
    • 2014-07-15
    • US13119978
    • 2009-09-18
    • Kozo NakamuraShun UekiKazunari TomizawaTomohiko MoriYuichi Yoshida
    • Kozo NakamuraShun UekiKazunari TomizawaTomohiko MoriYuichi Yoshida
    • G09G3/36G06F3/038G09G5/00G09G5/10G09G5/02
    • G09G3/3655G02F2201/52G09G2300/0426G09G2300/0443G09G2300/0452G09G2320/0242G09G2320/028G09G2340/06
    • A multiprimary liquid crystal display device in which deteriorations in display quality caused by the coloration of a gray representation when viewed from an oblique direction are suppressed, and a signal conversion circuit for use in such a multiprimary liquid crystal display device are provided.A signal conversion circuit according to the present invention is for use in a multiprimary liquid crystal display device, the multiprimary liquid crystal display device having a pixel defined by a plurality of subpixels including a red subpixel, a green subpixel, a blue subpixel, and a yellow subpixel, and performing multicolor display by using four or more primary colors to be displayed by the plurality of subpixels, the signal conversion circuit converting an input video signal to a multiprimary signal corresponding to four or more primary colors. When a video signal for the pixel to display a gray color having a normalized luminance of no less than 0.2 and no more than 0.3 is input, the signal conversion circuit according to the present invention performs a conversion of the video signal so that, among the normalized luminances of the plurality of subpixels, the yellow subpixel has the lowest normalized luminance.
    • 抑制了从倾斜方向观察时由灰色表示着色引起的显示质量恶化的多原色液晶显示装置,并且提供了用于这种多原色液晶显示装置的信号转换电路。 根据本发明的信号转换电路用于多原色液晶显示装置中,所述多原色液晶显示装置具有由包括红色子像素,绿色子像素,蓝色子像素和多个子像素的多个子像素所限定的像素 黄色子像素,并且通过使用由多个子像素显示的四个或更多个原色进行多色显示,信号转换电路将输入视频信号转换为对应于四个或更多原色的多原色信号。 当输入用于显示具有不小于0.2且不大于0.3的归一化亮度的灰度的像素的视频信号时,根据本发明的信号转换电路执行视频信号的转换,使得在 多个子像素的归一化亮度,黄色子像素具有最低归一化亮度。