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1. 发明授权

US08397667B2 Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters 有权
标题翻译：工件等离子体涂层的工艺和设备，具有工艺参数的光谱评估
公开(公告)号：US08397667B2
公开(公告)日：2013-03-19
申请号：US11215163
申请日：2005-08-30
申请人： Stephan Behle , Andreas Lüettringhaus-Henkel , Peter Eimann , Juergen Klein
发明人： Stephan Behle , Andreas Lüettringhaus-Henkel , Peter Eimann , Juergen Klein
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01J37/32972 , C23C16/045 , C23C16/515 , C23C16/52
摘要： The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter.
摘要翻译：本发明提供了一种通过等离子体诱导的化学气相沉积来涂覆工件的方法，其中将工艺气体引入涂覆室中，并且等离子体在与涂覆室邻接的工件的至少一个区域中的电磁能量点燃，其中存在工艺气体，其中基于等离子体的至少一个测量的光谱参数来监测涂覆操作，并且在偏离参数的期望范围的情况下去除工件。

2. 发明申请

US20060051520A1 Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters 有权
公开(公告)号：US20060051520A1
公开(公告)日：2006-03-09
申请号：US11215163
申请日：2005-08-30
申请人： Stephan Behle , Andreas Luettringhaus-Henkel , Peter Eimann , Juergen Klein
发明人： Stephan Behle , Andreas Luettringhaus-Henkel , Peter Eimann , Juergen Klein
IPC分类号： H05H1/24 , C23C16/00 , B05C11/00
CPC分类号： H01J37/32972 , C23C16/045 , C23C16/515 , C23C16/52
摘要： The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter.

3. 发明授权

US07433752B2 Device and method for automatic generation of control instructions for rotary machines 有权
标题翻译：自动生成旋转机械控制指令的装置和方法
公开(公告)号：US07433752B2
公开(公告)日：2008-10-07
申请号：US11391172
申请日：2006-03-28
申请人： Peter Eimann , Patrick Johannes , Felix Petry , Hartmut Eggert , Peter Woerner , Matthias Bicker
发明人： Peter Eimann , Patrick Johannes , Felix Petry , Hartmut Eggert , Peter Woerner , Matthias Bicker
IPC分类号： G06F19/00
CPC分类号： G05B19/056 , G05B2219/13015 , G05B2219/13106 , G05B2219/13144
摘要： The controller and method of the invention generate control instructions for a rotary machine that coats bottles. Gas is supplied to processing stations holding the bottles via a pressure management system. The processing stations are centrally controlled by a programmable PLC or microcontroller with an input device and display terminal. Since rotary machines need to be controlled differently depending on the type of bottles and the type of coating, different programs should be interactively created using the input device and display terminal, which then control the individual components of the rotary machine and the processing stations during the coating process. This eliminates unnecessary errors resulting from preparation of the different programs individually by a normal user.
摘要翻译：本发明的控制器和方法产生涂覆瓶子的旋转机器的控制指令。通过压力管理系统将气体供给到容纳瓶的加工站。处理站由具有输入设备和显示终端的可编程PLC或微控制器集中控制。由于旋转机器需要根据瓶子的类型和涂层的类型进行不同的控制，所以应该使用输入设备和显示终端来交互地创建不同的程序，然后控制旋转机器和处理站的各个部件涂层工艺。这消除了由普通用户单独准备不同程序所导致的不必要的错误。

4. 发明申请

US20060224257A1 Device and method for automatic generation of control instructions for rotary machines 有权
标题翻译：自动生成旋转机械控制指令的装置和方法
公开(公告)号：US20060224257A1
公开(公告)日：2006-10-05
申请号：US11391172
申请日：2006-03-28
申请人： Peter Eimann , Patrick Johannes , Felix Petry , Hartmut Eggert , Peter Woerner , Matthias Bicker
发明人： Peter Eimann , Patrick Johannes , Felix Petry , Hartmut Eggert , Peter Woerner , Matthias Bicker
IPC分类号： G05B15/00
CPC分类号： G05B19/056 , G05B2219/13015 , G05B2219/13106 , G05B2219/13144
摘要： The invention relates to a device and a method for generating control instructions for a rotary machine, wherein processing stations are disposed on a rotary machine. In the preferred embodiment, the processing stations have holders for receiving bottles. Furthermore, gas is supplied via the processing stations and via the pressure management system. The processing stations can be controlled centrally by a PLC, by respectively one separate PLC or by specific microcontrollers. Said components can be programmed by code instructions. A further component of the device is an input and display terminal by which means the programs are created interactively. This is preferably a laptop with a windowed interface such as Windows®. Since rotary machines need to be controlled differently depending on the type of bottles and the type of coating, different programs should be created which then control the individual components of the rotary machine and the processing stations. As a result of the complexity of the control instructions and the associated liability to error in the programming, it is unreasonable for a normal user to create such a program which is generally based on a recipe.
摘要翻译：本发明涉及一种用于产生旋转机器的控制指令的装置和方法，其中处理站设置在旋转机器上。在优选实施例中，处理站具有用于接收瓶的保持器。此外，气体经由处理站和压力管理系统供应。处理站可以由PLC集中控制，分别由一个独立的PLC或特定的微控制器控制。所述组件可以通过代码指令进行编程。该装置的另一个部件是输入和显示终端，通过该输入和显示终端，这意味着程序是以交互方式创建的。这优选地是具有窗口界面的笔记本电脑，例如Windows（R）。由于旋转机器需要根据瓶子的类型和涂层的类型进行不同的控制，因此应该创建不同的程序，然后控制旋转机器和加工站的各个部件。由于控制指令的复杂性和编程中与错误相关的责任，普通用户创建一般基于配方的程序是不合理的。

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