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    • 1. 发明授权
    • Method of detaching article fixed through pressure sensitive adhesive double coated sheet
    • 通过压敏双面涂层片固定的物品分离方法
    • US06627037B1
    • 2003-09-30
    • US09595809
    • 2000-06-16
    • Shuji KurokawaKenji Kobayashi
    • Shuji KurokawaKenji Kobayashi
    • B32B3500
    • H01L21/67132H01L21/6836H01L2221/68327Y10T156/1153Y10T156/1158
    • Laminate unit C obtained by fixing article B to support plate A through pressure sensitive adhesive double coated sheet 1 capable of being deformed by heating to thereby exert a detachment effect is held between a pair of sandwiching means, the sandwiching means so arranged as to enable interposition of the laminate unit C. The laminate unit C is heated by heating means 7 so that the pressure sensitive adhesive double coated sheet 1 is deformed to thereby reduce an area of contact of the pressure sensitive adhesive double coated sheet 1 with the article B with the result that the article B comes up from the pressure sensitive adhesive double coated sheet 1. Thereafter, the article B is detached from the pressure sensitive adhesive double coated sheet 1. Thus, there can be provided method of detaching an article fixed through a pressure sensitive adhesive double coated sheet and a detachment apparatus therefor, which realize effective detachment of articles and ensure suitability to processing by an automatic line.
    • 通过能够通过加热而变形从而发挥脱离效果的压敏粘合剂双面涂布片1将制品B固定在支撑板A上而获得的层叠单元C保持在一对夹持装置之间,夹持装置被布置成能够插入 层压单元C通过加热装置7加热,使得压敏粘合剂双面涂布片1变形,从而将压敏粘合剂双面涂布片1与制品B的接触面积减小, 导致物品B从压敏双面涂布片材1出来。之后,将物品B从压敏粘合剂双面涂布片材1上分离。因此,可以提供通过压敏粘合剂分离固定物品的方法 粘合剂双面涂布片及其分离装置,实现物品的有效分离并确保专业的适用性 通过自动线路停止。
    • 2. 发明授权
    • Lighting apparatus
    • 照明设备
    • US5923020A
    • 1999-07-13
    • US621694
    • 1996-03-26
    • Shuji KurokawaKenji Kobayashi
    • Shuji KurokawaKenji Kobayashi
    • G01N21/88G06K7/10
    • G01N21/8806
    • A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle .theta. with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11. By changing the position of the light-emitting portion 13 in this way, it is possible to change the illuminating angle and the illuminating angle distribution, and by adjusting the position of the light-emitting portion 13 in accordance with the optical characteristics of the object 3, it is possible to obtain a high contrast image. It is also possible for these adjustments to be carried out automatically by using an actuator, microcomputer or the like.
    • 照明装置1具有凸透镜11,其布置成使得其光轴相对于观察部分3a(例如,半导体衬底等)的法线成角度θ,其中照相机5布置在 反射光线。 当沿着透镜11的光轴布置发光部分13时,发生明场照明。 如果旋钮29转动,则发光部13沿着滚珠丝杠25移动,从而将照明从亮场照明改变为暗场照明。 当旋钮37转动时,如果发光部分13靠近透镜11移动,离开透镜11的光将发散,如果发光部分13远离透镜11移动则会聚,并且平行 如果发光部分13位于透镜11的焦点处。通过以这种方式改变发光部分13的位置,可以改变照明角度和照明角度分布,并且通过调节 根据物体3的光学特性的发光部分13的位置,可以获得高对比度图像。 这些调整也可以通过使用致动器,微型计算机等自动进行。
    • 4. 发明授权
    • Observation apparatus
    • 观察装置
    • US06400455B1
    • 2002-06-04
    • US09209046
    • 1998-12-09
    • Shuji KurokawaKenji Kobayashi
    • Shuji KurokawaKenji Kobayashi
    • E01N2100
    • G01N21/8806H01L22/12H01L2924/0002H01L2924/00
    • An observation apparatus for observing an observation object is constructed from a light source portion for emitting illumination light, a converging lens for focusing illumination light from the light source portion onto the observation object and a light-receiving portion for receiving light reflected from the observation object, wherein the light source portion includes a first arrangement of at least one light-emitting body provided on the optical axis of the converging lens, a second arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which allows the light source image to completely cover the light-receiving portion (bright field illumination), a third arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which allows the light source image to cover a portion of the light-receiving portion, and a fourth arrangement of at least one light-emitting body provided near the optical axis so as to shine light onto the observation object at an incidence angle which prevents the light source image from covering any of the light-receiving portion (dark field illumination), in which the light-emitting bodies are adapted for selective activation.
    • 用于观察观察对象的观察装置由用于发射照明光的光源部分构成,用于将来自光源部分的照明光聚焦到观察对象上的会聚透镜和用于接收从观察对象反射的光的光接收部分 其中,所述光源部分包括设置在会聚透镜的光轴上的至少一个发光体的第一布置,设置在所述光轴附近的至少一个发光体的第二布置,以将光照射到 以允许光源图像完全覆盖光接收部分的入射角的观察对象(亮场照明),设置在光轴附近的至少一个发光体的第三布置,以将光照射到 观察对象以允许光源图像覆盖光接收部分的一部分的入射角 以及设置在光轴附近的至少一个发光体的第四布置,以便以防止光源图像覆盖任何光接收部分(暗场照明)的入射角将光照射到观察对象上 ),其中发光体适于选择性激活。
    • 5. 发明授权
    • Lighting apparatus
    • 照明设备
    • US06286969B1
    • 2001-09-11
    • US09352324
    • 1999-07-12
    • Shuji KurokawaKenji Kobayashi
    • Shuji KurokawaKenji Kobayashi
    • G03B1502
    • G01N21/8806
    • A lighting apparatus 1 has a convex lens 11 arranged so that its optical axis is at an angle &thgr; with respect to the normal of an observation portion 3a (e.g., a semiconductor substrate or the like), with a camera 5 arranged in the path of the reflected light rays. When a light-emitting portion 13 is arranged along the optical axis of the lens 11, a bright field illumination takes place. If a knob 29 is turned, the light-emitting portion 13 moves along a ball screw 25, thereby changing the illumination from a bright field illumination to a dark field illumination. When a knob 37 is turned, the light exiting the lens 11 will diverge if the light-emitting portion 13 is moved close to the lens 11, converge if the light-emitting portion 13 is moved far away from the lens 11, and be parallel if the light-emitting portion 13 is positioned at the focal point of the lens 11. By changing the position of the light-emitting portion 13 in this way, it is possible to change the illuminating angle and the illuminating angle distribution, and by adjusting the position of the light-emitting portion 13 in accordance with the optical characteristics of the object 3, it is possible to obtain a high contrast image. It is also possible for these adjustments to be carried out automatically by using an actuator, microcomputer or the like.
    • 照明装置1具有凸透镜11,其布置成使得其光轴相对于观察部分3a(例如,半导体衬底等)的法线成角度θ,其中照相机5布置在 反射光线。 当沿着透镜11的光轴布置发光部分13时,发生明场照明。 如果旋钮29转动,则发光部13沿着滚珠丝杠25移动,从而将照明从亮场照明改变为暗场照明。 当旋钮37转动时,如果发光部分13靠近透镜11移动,离开透镜11的光将发散,如果发光部分13远离透镜11移动则会聚,并且平行 如果发光部分13位于透镜11的焦点处。通过以这种方式改变发光部分13的位置,可以改变照明角度和照明角度分布,并且通过调节 根据物体3的光学特性的发光部分13的位置,可以获得高对比度图像。 这些调整也可以通过使用致动器,微型计算机等自动进行。
    • 6. 发明授权
    • Method of detaching article fixed through pressure sensitive adhesive double coated sheet
    • 通过压敏双面涂层片固定的物品分离方法
    • US06649017B1
    • 2003-11-18
    • US09654819
    • 2000-09-05
    • Shuji Kurokawa
    • Shuji Kurokawa
    • B32B3500
    • H01L21/67092H01L21/6836H01L2221/68381H01L2221/68386Y10S438/976Y10T29/49819Y10T29/49822Y10T156/1153
    • A method of detaching an article (B) from a laminate unit (C), the laminate unit (C) comprising a support plate (A) and, fixed thereto, the article (B), the fixing effected through a pressure sensitive adhesive double coated sheet (1) deformable by heating to thereby exert a peeling effect, which method comprises heating at least one outer part of the laminate unit so that at least part of an outer region of the laminate unit is initially heated up, with other regions heated up later, and detaching the article (B) from the pressure sensitive adhesive double coated sheet (1) in a direction from the outer region toward the other regions. Thus, there are provided a detaching method and a detacher apparatus which enable efficiently detaching an article, such as an extremely thin wafer, having been fixed through a heat shrinkable pressure sensitive adhesive double coated sheet without cracking of the article.
    • 一种从层压单元(C)分离物品(B)的方法,包括支撑板(A)的层压单元(C)和固定到其上的物品(B),通过压敏粘合剂双重固定 通过加热变形从而施加剥离效果的涂布片(1),该方法包括加热层压单元的至少一个外部部分,使得层压单元的外部区域的至少一部分最初被加热,其他区域被加热 并且在从外部区域朝向其他区域的方向上将物品(B)从压敏双面涂布纸(1)分离。 因此,提供了一种分离方法和分离装置,其能够有效地分离已经通过热收缩压敏粘合剂双重涂层固定的物品,例如极薄的晶片,而不会使产品开裂。
    • 9. 发明授权
    • Alignment apparatus
    • 校准装置
    • US07274452B2
    • 2007-09-25
    • US10689525
    • 2003-10-21
    • Shuji Kurokawa
    • Shuji Kurokawa
    • G01B11/00
    • H01L21/681B23Q1/52B23Q3/183
    • An alignment apparatus 10 comprises a table 11 which is provided rotatably in a plane, and equipped with a loading plane 12A capable of sucking a wafer W, a shift mechanism 30 that moves the table 11 in the X- and Y-axis directions, and a sensor 50 that detects the position of the peripheral edge of the wafer W. The loading plane 12A is provided so as to come to a position inside the periphery of the wafer W. On the other hand, outside the table 11, a receiving member 15, which is positioned on the generally same plane as the loading plane 12A, is provided, and the receiving member 15 is provided with a plane configuration larger than the wafer W.
    • 对准装置10包括:台面11,其可旋转地设置在平面内,并具有能够吸收晶片W的装载平面12A;移动机构30,其使工作台11沿X轴方向和Y轴方向移动; 以及检测晶片W的周缘的位置的传感器50.装载面12A设置成进入晶片W的周围的位置。另一方面,在台11的外侧, 接收构件15设置在与加载平面12A大致相同的平面上,并且接收构件15设置有比晶片W大的平面构造。
    • 10. 发明申请
    • Malfunction detector for rotation sensor
    • 旋转传感器故障检测器
    • US20060069524A1
    • 2006-03-30
    • US11238863
    • 2005-09-29
    • Jun HashimotoSatoshi TakizawaAtsushi KobayashiShuji KurokawaYasukazu MaekawaMasatoshi Akanuma
    • Jun HashimotoSatoshi TakizawaAtsushi KobayashiShuji KurokawaYasukazu MaekawaMasatoshi Akanuma
    • G06F19/00
    • F16H61/12F16H2061/1208F16H2061/1284
    • While a voltage value of the battery detected by a battery voltage-detecting part is less than a predetermined threshold voltage value for determining a low voltage state, a rotation sensor malfunction-detecting part stops calculating a vehicle speed and uses the vehicle speed calculated at a time immediately before a time when a voltage value of a battery becomes less than the threshold voltage value for determining the low voltage state, for detecting malfunction in a rotation sensor. Thereby, even if noises due to a voltage fluctuation in the battery mix with the rotation signal from the rotation sensor, since the rotation sensor malfunction-detecting part does not calculate the vehicle speed during a period of time when the voltage value of the battery detected by a battery voltage-detecting part is less than the threshold voltage value for determining the low voltage state, the vehicle speed is not miscalculated based on the rotation signal including noises, and the malfunction in the rotation sensor can be precisely detected.
    • 当由电池电压检测部检测到的电池的电压值小于用于确定低电压状态的预定阈值电压值时,旋转传感器故障检测部分停止计算车速并使用在 在电池的电压值变得小于用于确定低电压状态的阈值电压值的时间之前,用于检测旋转传感器中的故障。 因此,即使由于电池中的电压波动引起的噪声与来自旋转传感器的旋转信号混合,由于旋转传感器故障检测部件在检测到电池的电压值的时间段内不计算车速 通过电池电压检测部分小于用于确定低电压状态的阈值电压值,基于包括噪声的旋转信号不会对车速进行计算,并且可以精确地检测旋转传感器的故障。