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    • 6. 发明授权
    • Humidity sensor with improved protective layering
    • 湿度传感器具有改进的保护层
    • US4473813A
    • 1984-09-25
    • US426087
    • 1982-09-28
    • Noriyuki KinjoShuichi OharaToru SugawaraShigeki Tsuchitani
    • Noriyuki KinjoShuichi OharaToru SugawaraShigeki Tsuchitani
    • G01N27/12H01L7/00
    • G01N27/121
    • The invention relates to a humidity sensor of electric resistance type whose electric resistance changes in accordance with an ambient humidity, characterized by a protective film of silicone resin provided on the surface of a humidity-sensitive material, and to a method for preparing the same. The protective film of silicone resin is formed by applying a varnish of siloxanes to the humidity-sensitive material and subjecting the varnish to reaction. The varnish can be of one-part curing system or two-part curing system, and desirably the reaction of siloxanes is a cross-linking reaction. The formed protective film is not influenced by swelling or shrinking of the humidity-sensitive material, and is prevented from flowing off due to a temperature rise, or from deposition of dusts, etc.
    • 本发明涉及一种电阻型的湿度传感器,其电阻根据环境湿度而变化,其特征在于在湿度敏感材料的表面上设置有机硅树脂的保护膜及其制备方法。 有机硅树脂的保护膜通过将硅氧烷清漆施加到湿度敏感材料上并使清漆反应而形成。 清漆可以是单组分固化体系或两部分固化体系,并且希望的是硅氧烷的反应是交联反应。 所形成的保护膜不受湿敏材料的膨胀或收缩的影响,并且由于温度升高或灰尘等的沉积而被防止流出。
    • 10. 发明授权
    • Humidity-sensitive element
    • 湿度敏感元件
    • US4642601A
    • 1987-02-10
    • US361903
    • 1982-03-18
    • Tooru SugawaraShigeki TsuchitaniNoriyuki KinjoShuichi Ohara
    • Tooru SugawaraShigeki TsuchitaniNoriyuki KinjoShuichi Ohara
    • G01N27/12H01L7/00
    • G01N27/121
    • The humidity-sensitive element of this invention is composed of an insulating substrate (1), a pair of electrodes (2, 3) mounted thereon, and a humidity-sensitive material (8) covering the electrodes. The humidity-sensitive material (8) has a property to change its electric resistance depending on the moisture content in the atmosphere and is formed from fine particles each having a hydrophobic core and a hydrophilic group-containing surface layer covering the core. This humidity-sensitive element exhibits a nearly linear relationship between logarithum of electric resistance and relative humidity and small hysteresis, permitting a precise measurement of relative humidity. Insulating substrate (1) and electrodes (2,3) are preferred to form from an insulating layer of silicon semiconductor and conductive monosilicon formed on it, respectively. This permits size reduction of humidity-sensitive elements or devices.
    • PCT No.PCT / JP81 / 00166 Sec。 371日期1982年3月18日 102(e)1982年3月18日PCT PCT 1991年7月20日PCT公布。 公开号WO82 / 00362 日本1982年2月4日。本发明的湿度敏感元件由绝缘基板(1),安装在其上的一对电极(2,3)和覆盖电极的湿度敏感材料(8)组成。 湿度敏感材料(8)具有根据大气中的水分含量而改变其电阻的性质,并且由具有疏水性芯和覆盖芯的含亲水性基团的表面层的细颗粒形成。 该湿度敏感元件表现出电阻对数相对湿度和滞后小的近似线性关系,可以精确测量相对湿度。 绝缘基板(1)和电极(2,3)优选分别从其上形成的硅半导体绝缘层和导电单晶硅形成。 这允许湿度敏感元件或器件的尺寸减小。