会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Diamond-ZnO surface acoustic wave device
    • 金刚石 - ZnO表面声波装置
    • US5814918A
    • 1998-09-29
    • US689296
    • 1996-08-07
    • Hideaki NakahataKenjiro HigakiSatoshi FujiiHiroyuki KitabayashiShinichi Shikata
    • Hideaki NakahataKenjiro HigakiSatoshi FujiiHiroyuki KitabayashiShinichi Shikata
    • H03H9/145H03H9/02H03H9/25H01L41/08
    • H03H9/02582
    • The present invention directed to a SAW device comprising a diamond layer a ZnO layer and an SiO.sub.2 layer, which can be operated at the frequency of 2 GHz or higher, with superior durability and less energy loss. The SAW device for 2nd mode surface acoustic wave of a wavelength .lambda. (.mu.m) according to the present invention comprises: (i) a diamond layer, (ii) a ZnO layer formed on the diamond layer, the ZnO layer having a thickness t.sub.z, (iii) an interdigital transducer (IDT) formed over the ZnO layer, and (iv) a SiO.sub.2 layer formed over the interdigital transducer onto the ZnO layer, the SiO.sub.2 layer having a thickness of t.sub.s ; wherein parameters kh.sub.z =(2.pi./.lambda.)t.sub.z and kh.sub.s =(2.pi./.lambda.)t.sub.s are given within a region A-B-C-D-E-F-G-H-I-J-K-L-M-N-O-P-Q-R-A in a two-dimensional Cartesian coordinate graph having abscissa axis of kh.sub.z and ordinate axis of kh.sub.s, the outer edge of the region A-B-C-D-E-F-G-H-I-J-K-L-M-N-O-P-Q-R-A being given by a closed chain in the Cartesian coordinate, consisting of points A, B, C, D, E, F, G, H, I, J, K, L, M, N, O, P, Q and R and lines A-B, B-C, C-D, D-E, E-F, F-G, G-H, H-I, I-J, J-K, K-L, L-M, M-N, N-O, O-P, P-Q, Q-R and R-A, as shown in FIG. 1.
    • 本发明涉及一种SAW器件,其包括金刚石层,ZnO层和SiO 2层,其可以以2GHz或更高的频率工作,具有优异的耐久性和较少的能量损失。 根据本发明的波长λ(μm)的第二模式表面声波的SAW器件包括:(i)金刚石层,(ii)在金刚石层上形成的ZnO层,ZnO层具有厚度tz ,(iii)在ZnO层上形成的叉指式换能器(IDT),以及(iv)在叉状换能器上形成在ZnO层上的SiO 2层,SiO 2层的厚度为ts; 其中参数khz =(2π/λ)tz和khs =(2π/λ)ts在具有khz的纵轴和khs的纵坐标轴的二维笛卡尔坐标图中的区域ABCDEFGHIJKLMNOPQRA内给出, 区域ABCDEFGHIJKLMNOPQRA由笛卡尔坐标中的闭环提供,由点A,B,C,D,E,F,G,H,I,J,K,L,M,N,O,P,Q组成 以及R和线AB,BC,CD,DE,EF,FG,GH,HI,IJ,JK,KL,LM,MN,NO,OP,PQ,QR和RA。 1。