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    • 10. 发明授权
    • Electro-optical modulator and a method for manufacturing the same
    • 电光调制器及其制造方法
    • US07526146B1
    • 2009-04-28
    • US12192139
    • 2008-08-15
    • Shih-Hsiang Hsu
    • Shih-Hsiang Hsu
    • G02F1/035H01L21/00
    • G02F1/025G02F2001/0156G02F2201/066
    • An electro-optical modulator is provided. The electro-optical modulator has a substrate. A first insulator layer, an optical waveguide, a first doped semiconductor layer, a second insulator layer, a second doped semiconductor layer, and a third insulator layer are sequentially disposed over the substrate. The optical waveguide is adapted for transmitting a light wave. The optical waveguide includes a first semiconductor layer, a second semiconductor layer, and a third semiconductor layer. The first semiconductor layer is disposed on the first insulator layer. The first doped semiconductor layer is disposed on the first insulator layer, and positioned at two opposite sides of the optical waveguide for electrically connecting the optical waveguide. The second insulator layer is disposed on the substrate for covering the first doped semiconductor layer. The second doped semiconductor layer is disposed on the second insulator layer and electrically connected to the third semiconductor layer.
    • 提供电光调制器。 电光调制器具有基板。 依次设置第一绝缘体层,光波导,第一掺杂半导体层,第二绝缘体层,第二掺杂半导体层和第三绝缘体层。 光波导适用于发射光波。 光波导包括第一半导体层,第二半导体层和第三半导体层。 第一半导体层设置在第一绝缘体层上。 第一掺杂半导体层设置在第一绝缘体层上,并且位于光波导的两个相对的两侧,用于电连接光波导。 第二绝缘体层设置在衬底上以覆盖第一掺杂半导体层。 第二掺杂半导体层设置在第二绝缘体层上并与第三半导体层电连接。