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1. 发明授权

US5538465A Elastic foamed sheet and wafer-polishing jig using the sheet 失效
公开(公告)号：US5538465A
公开(公告)日：1996-07-23
申请号：US369653
申请日：1995-01-06
申请人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
发明人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
IPC分类号： B24B37/04 , B24B37/30 , H01L21/304 , B24B7/04
CPC分类号： B24B37/30 , Y10T428/249961 , Y10T428/249975 , Y10T428/249979
摘要： An elastic foamed sheet is disclosed which is usable as waxless polishing backing pads for wafers and capable of producing mirror polish wafers excelling in flatness.This elastic foamed sheet possesses at least a foamed layer 2 and is characterized by the fact that a plurality of bubbles 4 in the foamed layer 2 meet the following conditions:(1) that the bubbles are slender discrete bubbles erected parallelly to one another and dispersed at a substantially equal pitch in the direction of width of the foamed layer 2 and the bubbles 4 are substantially equal in size, shape, and position of formation in the direction of thickness of the foamed layer 2,(2) that center lines of the bubbles 4 in the direction of length thereof are parallel to the direction of thickness of the foamed layer 2, and(3) that the diameters of the bubbles 4 are minimized in the terminal part of the foamed layer 2 on one surface side thereof and gradually increased in the direction from the one surface side to the other surface side of foamed layer 2 until the bubbles form openings 6 thereof in the surface of the foamed layer 2.

2. 发明授权

US5409770A Elastic foamed sheet and wafer-polishing jig using the sheet 失效
标题翻译：弹性发泡片和使用该片的晶片抛光夹具
公开(公告)号：US5409770A
公开(公告)日：1995-04-25
申请号：US35608
申请日：1993-03-23
申请人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
发明人： Shigeyoshi Netsu , Kihachiro Watanabe , Makoto Tsukada
IPC分类号： B24B37/04 , B24B37/30 , H01L21/304 , H01L21/00
CPC分类号： B24B37/30 , Y10T428/249961 , Y10T428/249975 , Y10T428/249979
摘要： An elastic foamed sheet is disclosed which is usable as waxless polishing backing pads for wafers and capable of producing mirror polish wafers excelling in flatness.This elastic foamed sheet possesses at least a foamed layer 2 and is characterized by the fact that a plurality of bubbles 4 in the foamed layer 2 meet the following conditions:(1) that the bubbles are slender discrete bubbles erected parallelly to one another and dispersed at a substantially equal pitch in the direction of width of the foamed layer 2 and the bubbles 4 are substantially equal in size, shape, and position of formation in the direction of thickness of the foamed layer 2,(2) that center lines of the bubbles 4 in the direction of length thereof are parallel to the direction of thickness of the foamed layer 2, and(3) that the diameters of the bubbles 4 are minimized in the terminal part of the foamed layer 2 on one surface side thereof and gradually increased in the direction from the one surface side to the other surface side of foamed layer 2 until the bubbles form openings 6 thereof in the surface of the foamed layer 2.
摘要翻译：公开了一种弹性发泡片，其可用作晶片的无蜡抛光衬垫，并且能够生产出优异的平面度的镜面抛光晶片。该弹性发泡片材至少具有发泡层2，其特征在于，泡沫层2中的多个气泡4满足以下条件：（1）气泡是彼此平行并分散的细长的离散气泡在发泡层2的宽度方向上基本相等的间距和气泡4在发泡层2的厚度方向上的尺寸，形状和形成位置基本相等，（2）中心线在其长度方向上的气泡4与发泡层2的厚度方向平行，（3）在发泡层2的一个表面侧的末端部分中气泡4的直径最小化，在发泡层2的一个表面侧到另一个表面侧的方向上增加，直到泡沫在发泡层2的表面中形成开口6。

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