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1. 发明授权

US5604581A Film thickness and free carrier concentration analysis method and apparatus 失效
标题翻译：膜厚度和自由载流子浓度分析方法和装置
公开(公告)号：US5604581A
公开(公告)日：1997-02-18
申请号：US319749
申请日：1994-10-07
申请人： Shaohua Liu , Peter R. Solomon , Peter A. Rosenthal , Stuart Farquharson
发明人： Shaohua Liu , Peter R. Solomon , Peter A. Rosenthal , Stuart Farquharson
IPC分类号： G01B11/06 , G01N21/41
CPC分类号： G01B11/0625
摘要： The method determines the thickness and the free carrier concentration of at least one layer of a structure. An exposed surface of the structure is irradiated using spectral radiation, and the measured reflectance spectrum is compared to a calculated spectrum. Using algorithms that include terms representative of complex refractive indices, layer thickness, dielectric constants, and free carrier concentrations, values are iteratively assigned to the thickness and free carrier concentration parameters so as to produce a best fit relationship between the compared spectra, and to thereby determine those parameters.
摘要翻译：该方法确定至少一层结构的厚度和自由载流子浓度。使用光谱辐射照射结构的暴露表面，并将测量的反射光谱与计算的光谱进行比较。使用包括代表复折射率，层厚度，介电常数和自由载流子浓度的术语的算法被迭代地分配给厚度和自由载流子浓度参数，以便产生比较光谱之间的最佳拟合关系，从而确定这些参数。

2. 发明授权

US5900633A Spectrometric method for analysis of film thickness and composition on a patterned sample 失效
标题翻译：用于分析图案样品上的膜厚度和组成的光谱测定方法
公开(公告)号：US5900633A
公开(公告)日：1999-05-04
申请号：US990834
申请日：1997-12-15
申请人： Peter R. Solomon , Peter A. Rosenthal
发明人： Peter R. Solomon , Peter A. Rosenthal
IPC分类号： G01B11/06 , G01N21/35
CPC分类号： G01B11/0625
摘要： A fast and practical method for the analysis of patterned samples of semiconductor integrated circuits, and other materials, determines the thickness and composition of layers fabricated during manufacture. The method employs a measurement spot that is sufficiently large to irradiate areas of two or more different regions of the sample that result from its patterned features, generally at replicable locations. In carrying out the method, one or more of reflectance, transmittance, and radiance spectrance is measured, and the various parameters characterizing the thickness and composition in the patterned areas are obtained using, for example, a model-based analysis of the polarization and amplitude of the emanating radiation, the model parameters being iteratively adjusted to achieve a match with measured values. The method can be made fast and practical by using measurements that are taken both before and also after treatment steps are effected, and/or by using measurements from the same location on designated samples undergoing the same process, to reduce the number of unknown parameters in a reference model.
摘要翻译：用于分析半导体集成电路和其他材料的图案样品的快速和实用的方法确定了在制造期间制造的层的厚度和组成。该方法采用足够大的测量点，以照射通常在可复制位置由其图案化特征产生的样品的两个或更多个不同区域的区域。在实施该方法时，测量反射率，透射率和辐射度观察中的一种或多种，并且使用例如基于模型的极化和振幅分析来获得表征图案区域中的厚度和组成的各种参数的发射辐射，模型参数被迭代地调整以实现与测量值的匹配。通过使用在治疗步骤之前和之后进行的测量，和/或通过使用经历相同过程的指定样品上的相同位置的测量，可以使方法快速和实用，以减少未知参数的数量参考模型。

3. 发明授权

US06192287B1 Method and apparatus for fault detection and control 有权
标题翻译：用于故障检测和控制的方法和装置
公开(公告)号：US06192287B1
公开(公告)日：2001-02-20
申请号：US09158380
申请日：1998-09-22
申请人： Peter R. Solomon , Peter A. Rosenthal , Martin L. Spartz , Chad M. Nelson
发明人： Peter R. Solomon , Peter A. Rosenthal , Martin L. Spartz , Chad M. Nelson
IPC分类号： G06F1900
CPC分类号： H01L22/20 , H01J37/32935
摘要： A fault detection and classification system for wafer etching, tool cleaning, and other fabrication processes employs exhaust gas composition data from a Fourier transform infrared spectrometer in addition to machine-state and other process-state data. Process control may be initiated based upon the classification of a fault.
摘要翻译：用于晶片蚀刻，工具清洁和其它制造工艺的故障检测和分类系统除了机器状态和其他过程状态数据之外还使用来自傅里叶变换红外光谱仪的废气组成数据。可以基于故障的分类来启动过程控制。

4. 发明授权

US6161054A Cell control method and apparatus 有权
标题翻译：电池控制方法和装置
公开(公告)号：US6161054A
公开(公告)日：2000-12-12
申请号：US156277
申请日：1998-09-17
申请人： Peter A. Rosenthal , Peter R. Solomon , Anthony S. Bonanno , William J. Eikleberry
发明人： Peter A. Rosenthal , Peter R. Solomon , Anthony S. Bonanno , William J. Eikleberry
IPC分类号： C23C14/54 , C23C16/52 , H01L21/00 , G06F19/00
CPC分类号： H01L21/67276 , C23C14/547 , C23C16/52
摘要： An implementation of sensor-driven run-to-run process control for semiconductor wafer fabrication integrates a robust, automated Fourier transform infrared reflectometer onto a wafer fabrication cluster tool. Cell controller software integrates an adaptive run-to-run controller, process tool recipe upload and download through a SECS port, sensor control, data archiving, and a graphical user interface.
摘要翻译：用于半导体晶片制造的传感器驱动的运行中运行过程控制的实现将坚固的自动傅立叶变换红外反射计集成到晶片制造集群工具上。电池控制器软件通过SECS端口，传感器控制，数据归档和图形用户界面集成了一个自适应的运行到运行的控制器，流程工具配方上传和下载。

5. 发明授权

US4824790A System and method for thermogravimetric analysis 失效
标题翻译：用于热重分析的系统和方法
公开(公告)号：US4824790A
公开(公告)日：1989-04-25
申请号：US920846
申请日：1986-10-17
申请人： Robert M. Carangelo , Peter R. Solomon
发明人： Robert M. Carangelo , Peter R. Solomon
IPC分类号： G01N31/12 , G01N5/04 , G01N21/35 , G01N21/75 , G01N25/00
CPC分类号： G01N21/35 , G01N5/04 , G01N2021/3595 , G01N21/3504
摘要： An instrument for the chemical analysis of coal and other hydrocarbons combines TGA and FT-IR principles, and utilizes helium to carry the volatiles evolved by pyrolysis of the sample into the optical cell of the FT-IR spectrometer. The connection between the TGA furnace and the optical cell is substantially direct and non-impeding to fluid flow, and the carrier gas is preheated to the same temperature as the sample, preferably using a common heating element.
摘要翻译：煤和其他碳氢化合物的化学分析仪器结合了TGA和FT-IR原理，并利用氦气将样品热解产生的挥发物携带到FT-IR光谱仪的光学单元中。 TGA炉和光电池之间的连接基本上是直接且不阻碍流体流动，并且载体气体被预热至与样品相同的温度，优选使用共同的加热元件。

6. 发明授权

US5588632A Dynamic support structure 失效
标题翻译：动态支持结构
公开(公告)号：US5588632A
公开(公告)日：1996-12-31
申请号：US567085
申请日：1995-12-04
申请人： Peter R. Solomon
发明人： Peter R. Solomon
IPC分类号： G01B9/02
CPC分类号： G01B9/02041 , G01J3/4532 , G01J3/4535
摘要： The structure of the invention serves to support mirrors defining a reflective channel, which can dynamically be reciprocally widened and narrowed, as in a two-beam interferometer. It is effectively divided, by pivot points on an intermedial axis, into two opposite portions of equal mass, thus affording to the structure immunization against translational forces transmitted through those points. The opposite portions also have their centers of gravity remotely located, so as to generate a counteracting torque in response to moments of rotational inertia transmitted through the pivot points. In the structure, integrally formed planar pieces are assembled to provide contiguous elongate elements and an interposed connecting web element, a plurality of which web elements produce a flexure joint.
摘要翻译：本发明的结构用于支持限定反射通道的反射镜，其可以在双光束干涉仪中动态地相互加宽和变窄。它通过中间轴上的枢轴点被有效地分成两个相等质量的相对部分，从而为通过这些点传递的平移力提供结构免疫。相对部分还具有远离其重心的位置，以响应于通过枢转点传递的旋转惯性力矩而产生抵消力矩。在该结构中，整体形成的平面件被组装以提供连续的细长元件和插入的连接腹板元件，多个腹板元件产生弯曲接头。

7. 发明授权

US5513828A Vibration immunizing dynamic support structure 失效
标题翻译：振动免疫动态支撑结构
公开(公告)号：US5513828A
公开(公告)日：1996-05-07
申请号：US285116
申请日：1994-08-03
申请人： Peter R. Solomon
发明人： Peter R. Solomon
IPC分类号： G01B9/02
CPC分类号： G01J3/45 , G01J3/0202
摘要： The structure serves to support any of various elements and objects, normally for translational movement. It is effectively divided, by pivot points on an intermedial axis, into two opposite portions of equal mass, thus affording to the structure immunization against translational forces transmitted through those points. The opposite portions also have their centers of gravity remotely located, so as to generate a counteracting torque in response to moments of rotational inertia transmitted through the pivot points. Integrally formed planar pieces are assembled to provide contiguous elongate elements and an interposed connecting web element, a plurality of which web elements produce a flexure joint in the structure.
摘要翻译：该结构用于支撑通常用于平移运动的各种元件和物体中的任何一种。它通过中间轴上的枢轴点被有效地分成两个相等质量的相对部分，从而为通过这些点传递的平移力提供结构免疫。相对部分还具有远离其重心的位置，以响应于通过枢转点传递的旋转惯性力矩而产生抵消力矩。整体形成的平面件被组装以提供连续的细长元件和插入的连接腹板元件，多个网状元件在结构中产生挠曲接头。

8. 发明授权

US5486917A Flexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the same 失效
标题翻译：挠曲板运动传递机构，分束器组件以及包括其的干涉仪
公开(公告)号：US5486917A
公开(公告)日：1996-01-23
申请号：US201757
申请日：1994-02-25
申请人： Robert M. Carangelo , Mark D. Dettori , Lawrence J. Grigely , Terence C. Murray , Peter R. Solomon , C. Peter Van Dine , David D. Wright
发明人： Robert M. Carangelo , Mark D. Dettori , Lawrence J. Grigely , Terence C. Murray , Peter R. Solomon , C. Peter Van Dine , David D. Wright
IPC分类号： G01B9/02
CPC分类号： G01J3/4535
摘要： A multiplicity of one-piece flexure plates are assembled in pairs to provide a support system on which a retroreflector may be mounted for reciprocal motion. Combined with balance bodies, the flexure plates provide a support system having portions that are dynamically and statically balanced with one another, irrespective of orientation, so as to thereby immunize the unit against extraneous forces. The motion transfer assembly is especially adapted for use to support a moving retroreflector in a two-arm interferometer that may further include a beamsplitter assembly constructed from a one-piece, integrally formed body, the body having convergent, optically flat planar surfaces of specular reflectance, and means for adjustably mounting a beamsplitter therein. The spectrometer is of modular construction, and employs an integrated clocking sub-assembly as well as a light-weight voice-coil motor.
摘要翻译：多个单件弯曲板成对组装以提供支撑系统，在该支撑系统上可安装回射器以便往复运动。与平衡体结合，挠曲板提供了具有彼此动态和静态平衡的部分的支撑系统，而不管取向如何，从而免受单元的抵抗外力。运动传递组件特别适于用于支撑双臂干涉仪中的移动后向反射器，其可进一步包括由单件整体形成的主体构成的分束器组件，该主体具有会聚的光学平面的镜面反射面，以及用于在其中可调节地安装分束器的装置。光谱仪采用模块化结构，采用集成时钟子组件以及轻巧的音圈电机。

9. 发明授权

US5239488A Apparatus and method for determining high temperature surface emissivity through reflectance and radiance measurements 失效
标题翻译：通过反射和辐射测量确定高温表面发射率的装置和方法
公开(公告)号：US5239488A
公开(公告)日：1993-08-24
申请号：US512422
申请日：1990-04-23
申请人： James R. Markham , Philip W. Morrison, Jr. , Peter R. Solomon , Philip E. Best
发明人： James R. Markham , Philip W. Morrison, Jr. , Peter R. Solomon , Philip E. Best
IPC分类号： G01J3/453 , G01J5/00
CPC分类号： G01J5/0003 , G01J3/453
摘要： The apparatus and method permit simultaneous and precise determination of the temperature and spectral emittance, over a wide spectral region, of a hot sample. Radiance, and hemispherical reflectance and transmittance measurements are employed, and FT-IR technology is advantageously applied. Reflectance and (where necessary) transmittance measurements are utilized to determine the fraction of incident radiation, of selected wavelength, that is absorbed by the sample, in turn establishing a spectral emittance value. Taken with the measured radiance at the same wavelength, the spectral emittance value will provide a quantity that can be matched with the spectral radiance of a theoretical black body, again at the selected wavelength, to thereby derive the temperature of the hot sample; this in turn enables determination of the spectral emittance of the sample over a desired spectral range.
摘要翻译：该装置和方法允许在热样品的宽光谱区域上同时且精确地确定温度和光谱发射率。采用辐射度和半球形反射率和透射率测量，有利地应用FT-IR技术。利用透射率测量和（如果需要）透射率测量来确定由样品吸收的所选波长的入射辐射的分数，从而建立光谱发射值。采用相同波长的测量辐射度，光谱发射值将提供可以与理想黑体的光谱辐射度相匹配的量，再次以选定的波长，从而导出热样品的温度; 这又使得能够在期望的光谱范围内确定样品的光谱发射率。

10. 发明授权

US4985858A Method and apparatus for temperature determination 失效
标题翻译：温度测定方法和装置
公开(公告)号：US4985858A
公开(公告)日：1991-01-15
申请号：US356078
申请日：1989-05-23
申请人： Philip W. Morrison, Jr. , Peter R. Solomon , David G. Hamblen
发明人： Philip W. Morrison, Jr. , Peter R. Solomon , David G. Hamblen
IPC分类号： G01J3/453 , G01J5/00 , G01J5/60 , G01N21/55
CPC分类号： G01J5/601 , G01J2005/0074 , G01J3/453 , G01N21/55
摘要： An optical technique for determining surface temperature utilizes the Christiansen effect that is exhibited by dielectric materials; i.e., strong absorption bands at certain wavenumber values, causing the radiance of the material to be that which would characterize a theoretical black body at that wavenumber value.
摘要翻译：用于确定表面温度的光学技术利用由介电材料表现出的Christiansen效应; 即在某些波数值处的强吸收带，导致材料的辐射度是在该波数值下表征理论黑体的材料的辐射度。

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