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    • 7. 发明授权
    • Optoelectonic devices having arrays of quantum-dot compound semiconductor superlattices therein
    • 具有量子点化合物半导体超晶格阵列的光电器件
    • US07265375B2
    • 2007-09-04
    • US11065085
    • 2005-02-24
    • Zhibo ZhangVeena MisraSalah M. A. BedairMehmet Ozturk
    • Zhibo ZhangVeena MisraSalah M. A. BedairMehmet Ozturk
    • H01L29/12
    • H01L29/0665B82Y10/00H01L21/02381H01L21/02395H01L21/02463H01L21/02488H01L21/02546H01L21/0262H01L21/02642H01L29/0673H01L29/0676H01L29/068H01L29/125H01L29/127Y10S977/762
    • Methods of forming a nano-scale electronic and optoelectronic devices include forming a substrate having a semiconductor layer therein and a substrate insulating layer on the semiconductor layer. An etching template having a first array of non-photolithographically defined nano-channels extending therethrough, is formed on the substrate insulating layer. This etching template may comprise an anodized metal oxide, such as an anodized aluminum oxide (AAO) thin film. The substrate insulating layer is then selectively etched to define a second array of nano-channels therein. This selective etching step preferably uses the etching template as an etching mask to transfer the first array of nano-channels to the underlying substrate insulating layer, which may be thinner than the etching template. An array of semiconductor nano-pillars is then formed in the second array of nano-channels. The semiconductor nano-pillars in the array may have an average diameter in a range between about 8 nm and about 50 nm. The semiconductor nano-pillars are also preferably homoepitaxial or heteroepitaxial with the semiconductor layer.
    • 形成纳米级电子和光电子器件的方法包括在其中形成其中具有半导体层的衬底和在半导体层上的衬底绝缘层。 在衬底绝缘层上形成具有非光刻限定的纳米通道的第一阵列的蚀刻模板。 该蚀刻模板可以包括阳极氧化的金属氧化物,例如阳极氧化的氧化铝(AAO)薄膜。 然后选择性地蚀刻衬底绝缘层以在其中限定纳米通道的第二阵列。 该选择蚀刻步骤优选使用蚀刻模板作为蚀刻掩模,将第一纳米通道阵列转移到下面的衬底绝缘层,其可以比蚀刻模板更薄。 然后在第二纳米通道阵列中形成半导体纳米柱阵列。 阵列中的半导体纳米柱可以具有在约8nm和约50nm之间的范围内的平均直径。 半导体纳米柱也优选与半导体层同质外延或异质外延。