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1. 发明授权

US10746982B2 Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof 有权
公开(公告)号：US10746982B2
公开(公告)日：2020-08-18
申请号：US15887557
申请日：2018-02-02
申请人： STMicroelectronics S.r.l. , STMicroelectronics International N.V.
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
IPC分类号： G02B26/08 , H04N9/31 , H02N1/00 , B81B3/00 , B81C1/00 , G02B27/10
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

2. 发明授权

US09321628B2 MEMS device incorporating a fluidic path, and manufacturing process thereof 有权
标题翻译：结合流体路径的MEMS装置及其制造方法
公开(公告)号：US09321628B2
公开(公告)日：2016-04-26
申请号：US14316583
申请日：2014-06-26
申请人： STMicroelectronics S.r.l. , STMicroelectronics International N.V.
发明人： Dino Faralli , Benedetto Vigna , Laura Maria Castoldi
IPC分类号： B81B7/00 , B81C1/00
CPC分类号： B81B7/0061 , B81B2201/0264 , B81B2203/0127 , B81B2207/012 , B81C1/00269 , B81C2203/0118 , H01L2224/32145 , H01L2224/48091 , H01L2224/73265 , H01L2924/10155 , H01L2924/15151 , H01L2924/181 , H01L2924/00014 , H01L2924/00012
摘要： A MEMS device wherein a die of semiconductor material has a first face and a second face. A membrane is formed in or on the die and faces the first surface. A cap is fixed to the first face of the first die and is spaced apart from the membrane by a space. The die is fixed, on its second face, to an ASIC, which integrates a circuit for processing the signals generated by the die. The ASIC is in turn fixed on a support. A packaging region coats the die, the cap, and the ASIC and seals them from the outside environment. A fluidic path is formed through the support, the ASIC, and the first die, and connects the membrane and the first face of the die with the outside, without requiring holes in the cap.
摘要翻译：一种MEMS器件，其中半导体材料的管芯具有第一面和第二面。在模具中或模具上形成膜并面向第一表面。盖子固定在第一模具的第一面上并且与隔膜隔开一个空间。芯片在其第二面被固定到ASIC，其集成了用于处理由芯片产生的信号的电路。 ASIC依次固定在支持上。包装区域涂覆模具，盖子和ASIC，并将它们与外部环境密封。通过支撑件，ASIC和第一模具形成流体路径，并且将膜和模具的第一面与外部连接，而不需要在盖中的孔。

3. 发明授权

US08787600B2 Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof 有权
标题翻译：组装微机电类型的容性声换能器及其包装
公开(公告)号：US08787600B2
公开(公告)日：2014-07-22
申请号：US13861324
申请日：2013-04-11
申请人： STMicroelectronics S.r.l.
发明人： Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
IPC分类号： H04R25/00
CPC分类号： B81C1/00158 , B81B3/0018 , B81B7/0061 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48479 , H01L2924/00014 , H01L2924/16151 , H01L2924/16152 , H04R1/04 , H04R1/06 , H04R1/086 , H04R1/2838 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2224/48471 , H01L2224/4554 , H01L2924/00012
摘要： A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.
摘要翻译：微机电声换能器组件具有：集成具有膜的MEMS感测结构的第一模具，其具有与前室相反流体连通的第一表面和与第一表面相对的第二表面，与第一表面流体连通，微机电声换能器的腔室能够经受作为入射声压波函数的变形，并且面向刚性电极以形成可变电容电容器; 集成了可操作地耦合到MEMS感测结构并且提供作为电容变化的函数的电输出信号的电子阅读电路; 以及包装体，其容纳所述第一模具和所述第二模具，并且具有带有外部电触点的基底基板。第一和第二骰子堆叠在包装中并机械和电气直接连接在一起; 该包装限定前室和后室中的至少一个。

4. 发明申请

US20130168840A1 SEMICONDUCTOR INTEGRATED DEVICE WITH MECHANICALLY DECOUPLED ACTIVE AREA AND RELATED MANUFACTURING PROCESS 有权
标题翻译：具有机械解除活动区域的半导体集成器件及相关制造工艺
公开(公告)号：US20130168840A1
公开(公告)日：2013-07-04
申请号：US13719103
申请日：2012-12-18
申请人： STMicroelectronics (Grenoble 2) SAS , STMicroelectronics S.r.l.
发明人： Angelo Antonio Merassi , Marco Ferrera , Marco Mantovani , Paolo Ferrari , Benedetto Vigna
IPC分类号： H01L23/00 , H01L21/56
CPC分类号： H01L23/562 , H01L21/56 , H01L23/16 , H01L23/3107 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： A semiconductor integrated device is provided with: a die having a body of semiconductor material with a front surface, and an active area arranged at the front surface; and a package having a support element carrying the die at a back surface of the body, and a coating material covering the die. The body includes a mechanical decoupling region, which mechanically decouples the active area from mechanical stresses induced by the package; the mechanical decoupling region is a trench arrangement within the body, which releases the active area from an external frame of the body, designed to absorb the mechanical stresses induced by the package.
摘要翻译：半导体集成器件具有：具有前表面的半导体材料体的主体和配置在前表面的有源区域; 以及具有在主体的背面承载模具的支撑元件和覆盖模具的包覆材料的包装。机体包括机械解耦区域，机械解耦有源区域与由包装引起的机械应力; 机械解耦区域是主体内的沟槽布置，其从主体的外框架释放活动区域，设计成吸收由包装引起的机械应力。

5. 发明申请

US20130134131A1 PROCESS FOR MANUFACTURING AN INTEGRATED MEMBRANE OF NOZZLES IN MEMS TECHNOLOGY FOR A SPRAY DEVICE AND SPRAY DEVICE USING SUCH MEMBRANE 有权
标题翻译：在使用这种膜的喷雾装置和喷射装置的MEMS技术中制造喷嘴的集成膜的方法
公开(公告)号：US20130134131A1
公开(公告)日：2013-05-30
申请号：US13754510
申请日：2013-01-30
申请人： STMicroelectronics S.r.l.
发明人： Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Mauro Mantovani
IPC分类号： B05D7/00
CPC分类号： A61M15/009 , B05B1/14 , B05B17/0638 , B05D7/00 , B81B2201/058 , B81B2203/0127 , B81C1/00087 , Y10T29/49401
摘要： A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
摘要翻译：一种喷雾装置的喷嘴膜的制造方法，其特征在于，包括以下步骤：在所述基材上形成膜层，在所述膜层上形成膜层，在所述膜层中形成多个喷嘴，在所述基材中形成多个供给流路，供应通道在垂直方向上基本上对准多个喷嘴中的相应喷嘴并与相应喷嘴直接连通。

6. 发明申请

US20180157030A1 ELECTROSTATICALLY ACTUATED OSCILLATING STRUCTURE WITH OSCILLATION STARTING PHASE CONTROL, AND MANUFACTURING AND DRIVING METHOD THEREOF 审中-公开
公开(公告)号：US20180157030A1
公开(公告)日：2018-06-07
申请号：US15887557
申请日：2018-02-02
申请人： STMicroelectronics S.r.l. , STMicroelectronics International N.V.
发明人： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
IPC分类号： G02B26/08 , H04N9/31 , B81C1/00 , B81B3/00 , H02N1/00
CPC分类号： G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
摘要： An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

7. 再颁专利

USRE46671E1 Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device 有权
公开(公告)号：USRE46671E1
公开(公告)日：2018-01-16
申请号：US14069136
申请日：2013-10-31
申请人： STMicroelectronics S.r.l.
发明人： Chantal Combi , Benedetto Vigna , Federico Giovanni Ziglioli , Lorenzo Baldo , Manuela Magugliani , Ernesto Lasalandra , Caterina Riva
IPC分类号： H01L29/84 , B81C1/00
CPC分类号： B81B7/0061 , B81B7/02 , B81B2201/0235 , B81B2201/0264 , B81C1/0023 , H01L2224/48091 , H01L2224/73265 , H01L2924/1461 , H01L2924/3025 , H04R1/04 , H04R19/005 , H01L2924/00014 , H01L2924/00
摘要： A substrate-level assembly having a device substrate of semiconductor material with a top face and housing a first integrated device, including a buried cavity formed within the device substrate, and with a membrane suspended over the buried cavity in the proximity of the top face. A capping substrate is coupled to the device substrate above the top face so as to cover the first integrated device in such a manner that a first empty space is provided above the membrane. Electrical-contact elements electrically connect the integrated device with the outside of the substrate-level assembly. In one embodiment, the device substrate integrates at least a further integrated device provided with a respective membrane, and a further empty space, fluidly isolated from the first empty space, is provided over the respective membrane of the further integrated device.

8. 发明授权

US09486593B2 Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane 有权
标题翻译：用于制造用于喷雾装置的MEMS技术中的喷嘴集成膜的方法和使用这种膜的喷涂装置的方法
公开(公告)号：US09486593B2
公开(公告)日：2016-11-08
申请号：US14225285
申请日：2014-03-25
申请人： STMicroelectronics S.r.l.
发明人： Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
IPC分类号： A61M15/00 , B05B1/14 , B05B17/00 , B81C1/00 , B05D7/00
CPC分类号： A61M15/009 , B05B1/14 , B05B17/0638 , B05D7/00 , B81B2201/058 , B81B2203/0127 , B81C1/00087 , Y10T29/49401
摘要： A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
摘要翻译：一种喷雾装置的喷嘴膜的制造方法，其特征在于，包括以下步骤：在所述基材上形成膜层，在所述膜层上形成膜层，在所述膜层中形成多个喷嘴，在所述基材中形成多个供给流路，供应通道在垂直方向上基本上对准多个喷嘴中的相应喷嘴并与相应喷嘴直接连通。

9. 发明授权

US09423474B2 Integrated multilayer magnetoresistive sensor and manufacturing method thereof 有权
标题翻译：集成多层磁阻传感器及其制造方法
公开(公告)号：US09423474B2
公开(公告)日：2016-08-23
申请号：US13929635
申请日：2013-06-27
申请人： STMicroelectronics S.r.l.
发明人： Dario Paci , Sarah Zerbini , Benedetto Vigna
IPC分类号： G01R33/09 , G01R33/00 , G01R33/02
CPC分类号： G01R33/096 , G01R33/0017 , G01R33/0052 , G01R33/0206
摘要： A magnetic-field sensor includes: a chip including a substrate having a first surface and an insulating layer covering the first surface; first and second magnetoresistors each extending into the insulating layer and having a main axis of magnetization and a secondary axis of magnetization; a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor; a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor. The main axes of magnetization extending transversely to each other and the secondary axes of magnetization extending transversely to each other. The first and second magnetoresistors extend into the insulating layer at a first distance and a second distance, respectively, that differ from one another, from the first surface.
摘要翻译：磁场传感器包括：芯片，其包括具有覆盖第一表面的第一表面和绝缘层的基板; 第一和第二磁阻器各自延伸到绝缘层中并且具有主轴的磁化和次级磁化轴; 第一磁场发生器，被配置为产生具有沿着所述第一磁电阻的主磁化轴的场线的第一磁场; 第二磁场发生器被配置为产生具有沿着第二磁阻的主磁化轴的场线的第二磁场。磁化的主轴线彼此横向延伸，磁化的副轴相互横向延伸。第一和第二磁阻器分别从第一表面延伸到彼此不同的第一距离和第二距离处的绝缘层。

10. 发明申请

US20160154067A1 INTEGRATED MULTILAYER MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：集成多层磁阻传感器及其制造方法
公开(公告)号：US20160154067A1
公开(公告)日：2016-06-02
申请号：US15013562
申请日：2016-02-02
申请人： STMicroelectronics S.r.l.
发明人： Dario Paci , Sarah Zerbini , Benedetto Vigna
IPC分类号： G01R33/00 , G01R33/09
CPC分类号： G01R33/096 , G01R33/0017 , G01R33/0052 , G01R33/0206 , G01R33/09 , Y10T29/49034 , Y10T29/49043 , Y10T29/49044
摘要： A magnetic-field sensor includes: a chip including a substrate having a first surface and an insulating layer covering the first surface; first and second magnetoresistors each extending into the insulating layer and having a main axis of magnetization and a secondary axis of magnetization; a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor; a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor. The main axes of magnetization extending transversely to each other and the secondary axes of magnetization extending transversely to each other. The first and second magnetoresistors extend into the insulating layer at a first distance and a second distance, respectively, that differ from one another, from the first surface.
摘要翻译：磁场传感器包括：芯片，其包括具有覆盖第一表面的第一表面和绝缘层的基板; 第一和第二磁阻器各自延伸到绝缘层中并且具有主轴的磁化和次级磁化轴; 第一磁场发生器，被配置为产生具有沿着所述第一磁电阻的主磁化轴的场线的第一磁场; 第二磁场发生器被配置为产生具有沿着第二磁阻的主磁化轴的场线的第二磁场。磁化的主轴线彼此横向延伸，磁化的副轴相互横向延伸。第一和第二磁阻器分别从第一表面延伸到彼此不同的第一距离和第二距离处的绝缘层。

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