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1. 发明授权

US09551621B2 Pressure sensor having cantilever and displacement measurement unit 有权
标题翻译：具有悬臂和位移测量单元的压力传感器
公开(公告)号：US09551621B2
公开(公告)日：2017-01-24
申请号：US14394647
申请日：2013-03-19
申请人： SEIKO INSTRUMENTS INC. , THE UNIVERSITY OF TOKYO
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Hidetoshi Takahashi , Minh-Dung Nguyen , Yoko Shinohara , Takeshi Uchiyama , Manabu Oumi , Masataka Shinogi
IPC分类号： G01L11/00 , G01L7/08 , G01L13/02 , G01L15/00 , G01L9/00 , G01L9/16 , G01L1/16 , G01L13/06 , G01L1/10 , G01L23/04
CPC分类号： G01L1/16 , G01L1/10 , G01L9/0002 , G01L9/0045 , G01L9/008 , G01L13/06 , G01L23/04
摘要： A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency fLOW (Hz) defined by Expression (1), where a width (μm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k. fLOW=k·(G2/V) (1)
摘要翻译：压力传感器包括传感器主体，其具有第一表面和在第一表面中具有开口的空腔，悬臂，其具有支撑在第一表面上的基端部分，以及远端部分，其设置成与周边边缘形成间隙在开口内的开口内部，根据空腔的内部和外部之间的压力差而弯曲变形，并且由半导体材料形成;位移测量单元，其根据压力测量悬臂振动的位移由式（1）定义的频率大于下限频率f LOW（Hz）的频率的差，其中间隙的宽度（μm）由G表示，空腔的体积（ml）由V表示，比例常数由k表示。 f LOW = k

2. 发明申请

US20150096388A1 PRESSURE SENSOR 有权
标题翻译：压力传感器
公开(公告)号：US20150096388A1
公开(公告)日：2015-04-09
申请号：US14394647
申请日：2013-03-19
申请人： SEIKO INSTRUMENTS INC. , THE UNIVERSITY OF TOKYO
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Hidetoshi Takahashi , Minh-Dung Nguyen , Yoko Shinohara , Takeshi Uchiyama , Manabu Oumi , Masataka Shinogi
IPC分类号： G01L1/16 , G01L1/10
CPC分类号： G01L1/16 , G01L1/10 , G01L9/0002 , G01L9/0045 , G01L9/008 , G01L13/06 , G01L23/04
摘要： A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency fLOW (Hz) defined by Expression (1), where a width (μm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k. fLOW=k·(G2/V) (1)
摘要翻译：压力传感器包括传感器主体，其具有第一表面和在第一表面中具有开口的空腔，悬臂，其具有支撑在第一表面上的基端部分，以及远端部分，其设置成与周边边缘形成间隙在开口内的开口内部，根据空腔的内部和外部之间的压力差而弯曲变形，并且由半导体材料形成;位移测量单元，其根据压力测量悬臂振动的位移由式（1）定义的频率大于下限频率fLOW（Hz）的频率的差异，其中间隙的宽度（μm）由G表示，空腔的体积（ml）由V表示，并且a 比例常数由k表示。 fLOW = k·（G2 / V）（1）

3. 发明授权

US10094724B2 Pressure sensor 有权
公开(公告)号：US10094724B2
公开(公告)日：2018-10-09
申请号：US15117272
申请日：2015-02-27
申请人： SEIKO INSTRUMENTS INC. , THE UNIVERSITY OF TOKYO
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Hidetoshi Takahashi , Minh-Dung Nguyen , Takeshi Uchiyama , Manabu Oumi , Yoko Shinohara , Masayuki Suda
IPC分类号： G01L9/00 , G01L23/18
摘要： A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

4. 发明授权

US10012557B2 Pressure sensor 有权
公开(公告)号：US10012557B2
公开(公告)日：2018-07-03
申请号：US15116967
申请日：2015-02-27
申请人： SEIKO INSTRUMENTS INC. , THE UNIVERSITY OF TOKYO
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Hidetoshi Takahashi , Minh-Dung Nguyen , Takeshi Uchiyama , Manabu Oumi , Yoko Shinohara
IPC分类号： G01L1/22 , G01L9/00
CPC分类号： G01L9/0054 , G01L9/0002 , G01L9/0023 , G01L9/0042
摘要： A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.

5. 发明授权

US09995642B2 Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element 有权
公开(公告)号：US09995642B2
公开(公告)日：2018-06-12
申请号：US15512701
申请日：2015-09-28
申请人： THE UNIVERSITY OF TOKYO , SEIKO INSTRUMENTS INC.
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Hidetoshi Takahashi , Minh-Dung Nguyen , Takeshi Uchiyama , Manabu Oumi , Yoko Shinohara , Masayuki Suda
IPC分类号： G01L1/18 , G01L1/22
CPC分类号： G01L1/18 , G01L1/2206 , G01L1/2262 , G01L9/00 , G01L9/0002 , G01L9/0022 , G01L23/10 , H01L29/84
摘要： A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion. The first resistance portion of the lever support-portion electrically connected to the detection-electrode via a parallel path of a first path passing through the main body-resistance portion and second path passing through the second resistance portion.

6. 发明授权

US11761837B2 Multi-axial tactile sensor 有权
公开(公告)号：US11761837B2
公开(公告)日：2023-09-19
申请号：US17295267
申请日：2018-11-26
申请人： The University of Tokyo
发明人： Isao Shimoyama , Akihito Nakai
IPC分类号： G01L5/162
CPC分类号： G01L5/162
摘要： A multi-axial tactile sensor for detecting forces in directions of three axes and a moment about at least one axis includes at least four sensor elements including at least three shearing force detecting elements having beam structures provided with a first resistive layer and a second resistive layer at specific portions, and at least one pressing force detecting element having a beam structure provided with a third resistive layer and a fourth resistive layer at specific portions, the beam structures of the four sensor elements being arranged on a sensor substrate so that their respective longitudinal directions are radially arranged, and the moment about at least one axis is detected based on outputs of two or more sensor elements being arranged at positions of rotational symmetry around the center of the radial arrangement of the plurality of sensor elements.

7. 发明授权

US10290823B2 Photodetector 有权
公开(公告)号：US10290823B2
公开(公告)日：2019-05-14
申请号：US14936244
申请日：2015-11-09
申请人： OLYMPUS CORPORATION , The University of Tokyo , KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
发明人： Yoshiharu Ajiki , Isao Shimoyama , Kiyoshi Matsumoto , Tetsuo Kan , Koichi Karaki , Yasuo Sasaki , Masayuki Yahiro , Akiko Hamada , Chihaya Adachi
IPC分类号： H01L51/44 , H01L51/00 , H01L51/42 , G01J1/42
摘要： Provided is a photodetector including: an organic semiconductor (20) having protrusions; a metal layer (30) added onto the organic semiconductor (20), for promoting at least one of localized plasmon resonance and surface plasmon resonance in which electrons are excited through irradiation of detection light; and a semiconductor (40) forming a junction with the metal layer (30), for allowing electrons excited through the plasmon resonance to pass through the junction (40a) with the metal layer (30).

8. 发明申请

US20150362394A1 PRESSURE-SENSITIVE SENSOR 有权
标题翻译：压敏传感器
公开(公告)号：US20150362394A1
公开(公告)日：2015-12-17
申请号：US14655831
申请日：2013-12-26
申请人： THE UNIVERSITY OF TOKYO
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Binh-Khiem Nguyen , Minh-Dung Nguyen , Hoang-Phuong Phan
IPC分类号： G01L19/04 , G01V1/18
CPC分类号： G01L19/04 , B81B3/0027 , B81B2203/0118 , G01L1/18 , G01L9/0001 , G01L9/065 , G01L19/0046 , G01V1/186 , H04R1/38 , H04R1/42 , H04R1/44 , H04R7/20 , H04R17/00 , H04R2201/003 , H04R2217/01
摘要： The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever (22); a frame (23) which is provided around the cantilever (22) and holds a base end of the cantilever (22); a gap (24) formed between the cantilever (22) and the frame (23); and a liquid (28) which seals the gap (24).
摘要翻译：本发明实现了能够高灵敏度地检测关于压力，声压，加速度，气体等的信息的压敏传感器。压敏传感器包括：悬臂（22）; 设置在悬臂（22）周围并保持悬臂（22）的基端的框架（23）; 形成在悬臂（22）和框架（23）之间的间隙（24）; 和密封间隙（24）的液体（28）。

9. 发明申请

US20150323482A1 GAS SENSOR AND GAS SENSOR STRUCTURAL BODY 审中-公开
标题翻译：气体传感器和气体传感器结构体
公开(公告)号：US20150323482A1
公开(公告)日：2015-11-12
申请号：US14655414
申请日：2013-12-26
申请人： THE UNIVERSITY OF TOKYO , OMRON Corporation
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Yusuke Takei , Akira Inaba , Kwanghyun Yoo , Masahito Honda , Hiroshi Imamoto
IPC分类号： G01N27/12 , G01N33/00
CPC分类号： G01N27/125 , B82Y10/00 , G01N27/4146 , G01N33/004
摘要： To propose a gas sensor and a gas sensor structural body that can improve detection sensitivity of gas more than in the conventional gas sensors with a simple configuration. A graphene (8) between a source electrode (3) and a drain electrode (4) is provided in an ion liquid (L), whereby a state change of charges in the ion liquid (L) caused by absorption of gas is directly reflected on a source-drain current (Isd) that flows in the graphene (8). Therefore, it is possible to improve detection sensitivity of the gas more than in the conventional gas sensors. The graphene (8) only has to be provided to be disposed in the ion liquid (L). Therefore, unlike in the conventional gas sensors, a configuration in which carbon nanotubes are surface-chemically modified by a plurality of polymers is unnecessary. Therefore, it is possible to simplify a configuration.
摘要翻译：提出一种气体传感器和气体传感器结构体，能够以简单的结构比常规气体传感器提高气体的检测灵敏度。在离子液体（L）中设置有源电极（3）和漏电极（4）之间的石墨烯（8），由此吸收气体引起的离子液体（L）中的电荷状态变化被直接反映在石墨烯中流动的源极 - 漏极电流（Isd）（8）。因此，与以往的气体传感器相比，能够提高气体的检测灵敏度。仅需要将石墨烯（8）设置在离子液体（L）中。因此，与传统的气体传感器不同，不需要通过多种聚合物对碳纳米管进行表面化学改性的构造。因此，可以简化配置。

10. 发明授权

US10234429B2 Sensor 有权
公开(公告)号：US10234429B2
公开(公告)日：2019-03-19
申请号：US15217436
申请日：2016-07-22
申请人： THE UNIVERSITY OF TOKYO , KABUSHIKI KAISHA TOSHIBA
发明人： Isao Shimoyama , Kiyoshi Matsumoto , Binh Khiem Nguyen , Hidetoshi Takahashi , Minh Dung Nguyen , Hiroto Tamura , Quang Khang Pham , Takahiro Omori , Osamu Nishimura , Akihiro Kasahara
IPC分类号： G01N29/14 , G01H3/00 , H04R23/02 , G01H11/08 , G01H17/00 , G01N29/24 , H04R17/02 , H04R7/06
摘要： According to embodiments, a sensor includes a structure body, a container, a liquid and a sensing unit. The structure body includes a supporter, and a film unit. The film unit includes a first region. The first region includes a first end portion supported by the supporter, and a first portion being displaceable. The film unit includes an opening. The container is connected to the structure body. A first space is defined between the film unit and the container. The liquid is provided inside the first space. The sensing unit senses a displacement of the first portion accompanying a displacement of the liquid.

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