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    • 5. 发明申请
    • PYROELECTRIC DETECTOR AND METHOD FOR MANUFACTURING SAME, PYROELECTRIC DETECTION DEVICE, AND ELECTRONIC INSTRUMENT
    • 微电子检测器及其制造方法,光电检测装置和电子仪器
    • US20140034832A1
    • 2014-02-06
    • US14051059
    • 2013-10-10
    • SEIKO EPSON CORPORATION
    • Takafumi NODAJun TAKIZAWA
    • G01J5/34
    • G01J5/048G01J5/02G01J5/024G01J5/34H01L37/02
    • A pyroelectric detector includes a pyroelectric detection element, a support member, a fixing part and a first reducing gas barrier layer. A first side of the support member faces a cavity and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface of the support member facing the opening part, and a part of a second surface of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.
    • 热电检测器包括热电检测元件,支撑元件,固定部分和第一还原气体阻挡层。 支撑构件的第一侧面向空腔,并且热电检测元件安装并支撑在与第一侧相对的第二侧上。 与支撑构件连通的开口部分从支撑构件的第二侧在平面图中形成在支撑构件的周边上。 固定部支撑支撑构件。 第一还原气体阻隔层覆盖第一侧上的支撑构件的第一表面,支撑构件的面向开口部的侧表面和第二侧上的支撑构件的第二表面的一部分,以及热电检测 元件从支撑构件的第二侧观察露出。