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    • 4. 发明授权
    • Field effect transistor semiconductor and method for manufacturing the same
    • 场效应晶体管半导体及其制造方法
    • US06617660B2
    • 2003-09-09
    • US09391507
    • 1999-09-08
    • Shigeyuki MuraiEmi FujiiShigeharu MatsushitaHisaaki Tominaga
    • Shigeyuki MuraiEmi FujiiShigeharu MatsushitaHisaaki Tominaga
    • H01L29095
    • H01L29/66871H01L21/28587H01L29/42316H01L29/812
    • This invention has an objective to provide a field effect transistor semiconductor which has great adhesiveness between a gate metal and an insulating film defining a gate electrode end and to improve production yield thereof. The field effect transistor semiconductor of this invention comprises a source/drain electrode 6 positioned in a predetermined position in a GaAs substrate 1, a channel region provided in the GaAs substrate 1 and between the source/drain electrodes 6, a gate electrode 11 which is in schottky contact with a part of a channel region and is positioned between the source/drain electrodes 6, and an insulating film 7 which electrically insulates a surface of the GaAs substrate and the gate electrode 11 at both side surfaces of the gate electrode 11. The gate electrode 11 covers a part of the insulating film 7 and the surface of the GaAs substrate serving as the channel region, and a bottom metallic layer 8 contained in the gate electrode 11 is covered with a second metallic layer 9 which is highly adhesive to the insulating film 7.
    • 本发明的目的是提供一种场效应晶体管半导体,其在栅极金属和限定栅电极端的绝缘膜之间具有很大的粘合性,并提高其生产成品率。本发明的场效应晶体管半导体包括源极/漏极 6位于GaAs衬底1中的预定位置,设置在GaAs衬底1中并在源/漏电极6之间的沟道区,与沟道区的一部分肖特基接触并位于 源极/漏极6以及绝缘膜7,其将栅极电极11的两个侧表面处的GaAs衬底的表面和栅极电极11电绝缘。栅电极11覆盖绝缘膜7的一部分,并且 作为沟道区的GaAs衬底的表面和包含在栅极11中的底部金属层8被第二个元件覆盖 与绝缘膜7高度粘合的层9。
    • 7. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07399999B2
    • 2008-07-15
    • US10958640
    • 2004-10-06
    • Tetsuya YoshidaTetsuya OkadaHiroaki SaitoShigeyuki MuraiKikuo Okada
    • Tetsuya YoshidaTetsuya OkadaHiroaki SaitoShigeyuki MuraiKikuo Okada
    • H01L29/06
    • H01L29/7397H01L29/0619
    • In a conventional semiconductor device, there was a problem that, in a guard ring region, a shape of a depletion layer is distorted and stable withstand voltage characteristics cannot be obtained. In a semiconductor device of the present invention, a thermal oxide film in an actual operation region and a thermal oxide film in a guard ring region are formed in the same process. Thereafter, the thermal oxide film is once removed and is formed again. Thus, a film thickness of the thermal oxide film on the upper surface of the guard ring region is set to, for example, about 8000 to 10000 Å. Accordingly, a CVD oxide film including moving ions is formed in a position distant from a surface of an epitaxial layer. Consequently, distortion of a depletion layer, which is influenced by the moving ions, is suppressed and desired withstand voltage characteristics can be maintained.
    • 在传统的半导体器件中,存在在保护环区域中耗尽层的形状变形而不能得到稳定的耐电压特性的问题。 在本发明的半导体装置中,以相同的工序形成实际工作区域中的热氧化膜和防护环区域的热氧化膜。 此后,热氧化膜被一次除去并再次形成。 因此,保护​​环区域的上表面上的热氧化膜的膜厚设定为例如约8000〜10000。 因此,包含移动离子的CVD氧化膜形成在远离外延层的表面的位置。 因此,受到移动离子影响的耗尽层的失真被抑制,并且可以保持期望的耐受电压特性。
    • 10. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050133814A1
    • 2005-06-23
    • US10958640
    • 2004-10-06
    • Tetsuya YoshidaTetsuya OkadaHiroaki SaitoShigeyuki MuraiKikuo Okada
    • Tetsuya YoshidaTetsuya OkadaHiroaki SaitoShigeyuki MuraiKikuo Okada
    • H01L29/70H01L29/06H01L29/73H01L29/739H01L29/78H01L29/80H01L29/423
    • H01L29/7397H01L29/0619
    • In a conventional semiconductor device, there was a problem that, in a guard ring region, a shape of a depletion layer is distorted and stable withstand voltage characteristics cannot be obtained. In a semiconductor device of the present invention, a thermal oxide film in an actual operation region and a thermal oxide film in a guard ring region are formed in the same process. Thereafter, the thermal oxide film is once removed and is formed again. Thus, a film thickness of the thermal oxide film on the upper surface of the guard ring region is set to, for example, about 8000 to 10000 Å. Accordingly, a CVD oxide film including moving ions is formed in a position distant from a surface of an epitaxial layer. Consequently, distortion of a depletion layer, which is influenced by the moving ions, is suppressed and desired withstand voltage characteristics can be maintained.
    • 在传统的半导体器件中,存在在保护环区域中耗尽层的形状变形而不能得到稳定的耐电压特性的问题。 在本发明的半导体装置中,以相同的工序形成实际工作区域中的热氧化膜和防护环区域的热氧化膜。 此后,热氧化膜被一次除去并再次形成。 因此,保护​​环区域的上表面上的热氧化膜的膜厚设定为例如约8000〜10000。 因此,包含移动离子的CVD氧化膜形成在远离外延层的表面的位置。 因此,受到移动离子影响的耗尽层的失真被抑制,并且可以保持期望的耐受电压特性。