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1. 发明授权

US4823607A Released film structures and method of measuring film properties 失效
标题翻译：发布膜结构和测量膜性质的方法
公开(公告)号：US4823607A
公开(公告)日：1989-04-25
申请号：US51526
申请日：1987-05-18
申请人： Roger T. Howe , Mehran Mehregany , Stephen D. Senturia
发明人： Roger T. Howe , Mehran Mehregany , Stephen D. Senturia
IPC分类号： G01N3/00 , G01N19/06
CPC分类号： G01N3/00 , G01N1/32 , G01N2033/0096 , G01N2203/0053 , G01N2203/0075 , G01N2203/008 , G01N2203/0254 , G01N2203/0282 , G01N2203/0647
摘要： Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.
摘要翻译：释放的膜结构用于测量膜材料的机械性能。通过测量在固有拉伸应力下保持的薄膜结构的变形然后释放，可以精确地测量这些机械性能。

2. 发明授权

US5043043A Method for fabricating side drive electrostatic micromotor 失效
标题翻译：制造侧驱静电微电机的方法
公开(公告)号：US5043043A
公开(公告)日：1991-08-27
申请号：US542435
申请日：1990-06-22
申请人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
发明人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia , Mehran Mehregany , Lee S. Tavrow
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.
摘要翻译：静电微电机采用侧驱设计。定子在一个减法器上方的平面中工作，并且可移动构件位于定子的平面内并移动。产生并维持操作强度的静电场，而不会在定子和可移动构件的边缘之间的平面内发生故障。三个制造工艺使得能够在定子的操作平面中形成可移动构件并且与定子隔开微米量。一个制造工艺沉积和图案化结构层，以在牺牲层上形成定子和可移动构件。第二制造工艺蚀刻第一结构层中的通道以勾勒定子，可移动构件，并且如果需要，轮廓轴承。衬底连接到结构层的侧面，通道通过该侧被蚀刻并且相对侧被研磨到通道的端部，以形成凸出的定子，转子以及如果需要的话承载结构。第三制造工艺通过在衬底的蚀刻腔中的局部氧化来生长牺牲层。然后在衬底和牺牲层上沉积和图案化结构层，以在公共平面中形成定子和可移动构件。还通过制造工艺提供了谐波侧驱动微电机。

3. 发明授权

US4943750A Electrostatic micromotor 失效
标题翻译：静电微电机
公开(公告)号：US4943750A
公开(公告)日：1990-07-24
申请号：US376208
申请日：1989-07-03
申请人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia
发明人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element with the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
摘要翻译：静电驱动微致动器在单片工艺中被微加工。牺牲层被放置在移动元件和定子结构层之间。牺牲层的移除在定子内留下自由站立的移动元件和微米宽的气隙。大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。在牺牲层在移动元件结构层的边缘上层叠期间，轴承与具有定子的移动元件对齐。轴承和定子横向稳定移动元件。垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。

4. 发明授权

US4896098A Turbulent shear force microsensor 失效
标题翻译：湍流剪切力微传感器
公开(公告)号：US4896098A
公开(公告)日：1990-01-23
申请号：US273106
申请日：1988-11-16
申请人： Joseph H. Haritonidis , Roger T. Howe , Martin A. Schmidt , Stephen D. Senturia
发明人： Joseph H. Haritonidis , Roger T. Howe , Martin A. Schmidt , Stephen D. Senturia
IPC分类号： G01N13/00
CPC分类号： G01N13/00
摘要： A microbridge is used for the accurate measuring of time varying shear forces in the presence of fluctuating pressure. A microdimensioned plate is suspended by arms to form a microbridge. The microdimensions enable the smallest turbulence scales of interest to be sensed uniformally throughout the entire surface of the plate. The cavity beneath the microbridge is so small that a viscous drag is created in the air within the cavity and dampens normal movement of the plate. The microdimensions in conjunction with the damping effect of the cavity enable the sensor to be substantially insensitive to pressure and thus sense lateral forces independent of normal forces. The microbridge sensor is fabricated by surface micromachining. A sacrificial layer is deposited over a substrate. A structural layer is deposited and patterned to form the plate and support arms over the sacrificial layer. The cavity is formed by a selective etchant removing the sacrificial layer and leaving the rest of the microbridge structure suspended above the substrate. In a differential capacitance readout scheme, a conducting layer in the plate of the microbridge is capacitively coupled with conductors in the substrate. A sensed change in capacitive coupling generates an indication of plate deflection and thereby shear stress independent of vertical movement. Optic readout schemes may also be employed and are readily incorporated in the fabrication process. A mounting member presses the microbridge sensor into a holding plate which fits in a matching slot flush with the target wall.
摘要翻译：在存在波动压力的情况下，使用微桥来精确测量时变剪切力。通过臂悬挂微尺寸板以形成微桥。微尺寸使得能够在板的整个表面均匀地感测到感兴趣的最小湍流尺度。微桥下面的空腔很小，使得在空腔内的空气中产生粘性阻力并阻尼板的正常运动。结合腔的阻尼效应的微尺寸使得传感器对压力基本上不敏感，并因此感测与法向力无关的侧向力。微桥传感器通过表面微加工制造。牺牲层沉积在衬底上。沉积并图案化结构层以在牺牲层上形成板和支撑臂。通过选择性蚀刻剂除去该牺牲层并使悬浮在衬底上方的微桥结构的其余部分形成空腔。在差分电容读出方案中，微桥板中的导电层与衬底中的导体电容耦合。感测到的电容耦合变化产生板偏转的指示，从而产生与垂直运动无关的剪切应力。也可以采用光学读出方案，并且容易地结合在制造过程中。安装构件将微桥传感器压入保持板，该保持板适合与目标壁齐平的匹配槽。

5. 发明授权

US4997521A Electrostatic micromotor 失效
标题翻译：静电微电机
公开(公告)号：US4997521A
公开(公告)日：1991-03-05
申请号：US342952
申请日：1989-04-25
申请人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia
发明人： Roger T. Howe , Jeffrey H. Lang , Martin F. Schlecht , Martin A. Schmidt , Stephen D. Senturia
IPC分类号： H02N1/00
CPC分类号： H02N1/004
摘要： An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field of about 100 Mv/m and higher is supported across the micron wide gap without breakdown and enables high energy torque densities to be produced between the stator and the moving element. One electrostatic drive scheme involves a series of stator electrodes attached to the stator and a series of electrodes attached to the moving element charged in sequence to attract each other in a direction of movement and to oppose each other in a direction normal to movement. A bearing is aligned with the moving element within the stator during the layering of a sacrificial layer over an edge of the moving element structural layer. The bearing and stator laterally stabilize the moving element. Vertical stability is through aerodynamic shaping of the moving element, electronic circuits, or bushings. Applications of the microactuator include a linearly sliding shutter, an optical modulator, a gyroscope and an air pump.
摘要翻译：静电驱动微致动器在单片工艺中被微加工。牺牲层被放置在移动元件和定子结构层之间。牺牲层的移除在定子内留下自由站立的移动元件和微米宽的气隙。大约100Mv / m以上的电场被支撑在微米宽的间隙上而不会发生故障，并且能够在定子和移动元件之间产生高能量的转矩密度。一个静电驱动方案涉及一系列连接到定子的定子电极和一系列连接到移动元件上的电极，该电极按顺序充电以在运动方向上彼此吸引并且在垂直于运动的方向上彼此相对。在牺牲层在移动元件结构层的边缘上层叠期间，轴承与定子内的移动元件对齐。轴承和定子横向稳定移动元件。垂直稳定性是通过移动元件，电子电路或衬套的空气动力学成形。微致动器的应用包括线性滑动快门，光学调制器，陀螺仪和空气泵。

6. 发明授权

US08329559B2 Damascene process for use in fabricating semiconductor structures having micro/nano gaps 有权
标题翻译：用于制造具有微/纳米间隙的半导体结构的镶嵌工艺
公开(公告)号：US08329559B2
公开(公告)日：2012-12-11
申请号：US11737545
申请日：2007-04-19
申请人： Hideki Takeuchi , Emmanuel P. Quevy , Tsu-Jae King , Roger T. Howe
发明人： Hideki Takeuchi , Emmanuel P. Quevy , Tsu-Jae King , Roger T. Howe
IPC分类号： H01L21/46 , H01L21/78 , H01L21/301
CPC分类号： B81C1/00142 , B81B2201/0271 , B81C2201/0109 , Y10S438/933
摘要： In fabricating a microelectromechanical structure (MEMS), a method of forming a narrow gap in the MEMS includes a) depositing a layer of sacrificial material on the surface of a supporting substrate, b) photoresist masking and at least partially etching the sacrificial material to form at least one blade of sacrificial material, c) depositing a structural layer over the sacrificial layer, and d) removing the sacrificial layer including the blade of the sacrificial material with a narrow gap remaining in the structural layer where the blade of sacrificial material was removed.
摘要翻译：在制造微机电结构（MEMS）中，在MEMS中形成窄间隙的方法包括：a）在支撑衬底的表面上沉积牺牲材料层，b）光致抗蚀剂掩模并且至少部分蚀刻牺牲材料以形成至少一个牺牲材料刀片，c）在所述牺牲层上沉积结构层，以及d）去除包括所述牺牲材料刀片的所述牺牲层，其中所述牺牲材料刀片被去除的所述结构层中残留有窄间隙。

7. 发明申请

US20100327874A1 ELECTRO-DIFFUSION ENHANCED BIO-MOLECULE CHARGE DETECTION USING ELECTROSTATIC INTERACTION 有权
标题翻译：使用静电相互作用的电扩散增强的生物分子电荷检测
公开(公告)号：US20100327874A1
公开(公告)日：2010-12-30
申请号：US12822971
申请日：2010-06-24
申请人： Yang Liu , Robert W. Dutton , Roger T. Howe
发明人： Yang Liu , Robert W. Dutton , Roger T. Howe
IPC分类号： G01N27/62
CPC分类号： G01N33/48721 , C12Q1/68 , G01N27/04 , G01N27/4145 , G01N27/44791 , G01N33/68
摘要： According to one aspect, the disclosure is directed to an example embodiment in which a circuit-based arrangement includes a circuit-based substrate securing a channel, with an effective width that is not limited by the Debye screening length, along a surface of the substrate. A pair of reservoirs are included in or on the substrate and configured for containing and presenting a sample having bio-molecules for delivery in the channel. A pair of electrodes electrically couple a charge in the sample to enhance ionic current flow therein (e.g., to overcome the electrolyte screening), and a sense electrode is located along the channel for sensing a characteristic of the biological sample by using the electrostatic interaction between the enhanced ionic current flow of the sample and the sense electrode. Actual detection occurs by using a charge-signal processing circuit to process the sensed charge signal and, therefrom, provide an output indicative of a signature for the bio-molecules delivered in the channel.
摘要翻译：根据一个方面，本发明涉及一个示例性实施例，其中基于电路的布置包括基于电路的基板，其沿着基板的表面固定具有不受德拜屏蔽长度限制的有效宽度的通道。一对储存器包含在基底中或基底上，并且被配置为容纳和呈现具有用于在通道中递送的生物分子的样品。一对电极将样品中的电荷电耦合以增强其中的离子电流（例如，以克服电解质屏蔽），并且感测电极沿着通道定位，以通过使用样品和感应电极的增强的离子电流流动。通过使用电荷信号处理电路来处理所感测的电荷信号，从而提供指示在通道中递送的生物分子的签名的输出，发生实际检测。

8. 发明授权

US6114044A Method of drying passivated micromachines by dewetting from a liquid-based process 失效
标题翻译：通过从基于液体的方法脱水干燥钝化微机械的方法
公开(公告)号：US6114044A
公开(公告)日：2000-09-05
申请号：US866833
申请日：1997-05-30
申请人： Michael R. Houston , Roger T. Howe , Roya Maboudian , Uthara Srinivasan
发明人： Michael R. Houston , Roger T. Howe , Roya Maboudian , Uthara Srinivasan
IPC分类号： B81B3/00 , B32B9/04
CPC分类号： B81B3/0005 , B81C1/00928 , B81C2201/112 , B82Y30/00
摘要： A method of fabricating a micromachine includes the step of constructing a low surface energy film on the micromachine. The micromachine is then rinsed with a rinse liquid that has a high surface energy, relative to the low surface energy film, to produce a contact angle of greater than 90.degree. between the low surface energy film and the rinse liquid. This relatively large contact angle causes any rinse liquid on the micromachine to be displaced from the micromachine when the micromachine is removed from the rinse liquid. In other words, the micromachine is dried by dewetting from a liquid-based process. Thus, a separate evaporative drying step is not required, as the micromachine is removed from the liquid-based process in a dry state. The relatively large contact angle also operates to prevent attractive capillary forces between micromachine components, thereby preventing contact and adhesion between adjacent microstructure surfaces. The low surface energy film may be constructed with a fluorinated self-assembled monolayer film. The processing of the invention avoids the use of environmentally harmful, health-hazardous chemicals.
摘要翻译：制造微机械的方法包括在微机械上构造低表面能膜的步骤。然后用相对于低表面能膜的表面能高的漂洗液冲洗微机械，在低表面能膜和冲洗液之间产生大于90°的接触角。当微冲洗液从冲洗液中移出时，这种相对大的接触角使微机械上的任何漂洗液体从微机械移位。换句话说，微机器通过从基于液体的方法去除而被干燥。因此，不需要单独的蒸发干燥步骤，因为微机器在干燥状态下从基于液体的方法中去除。相对较大的接触角也用于防止微机械部件之间的有吸引力的毛细作用力，从而防止相邻微结构表面之间的接触和粘附。低表面能膜可以由氟化的自组装单层膜构成。本发明的加工避免使用对环境有害的健康危害的化学品。

9. 再颁专利

USRE36498E Sensor with separate actuator and sense fingers 有权
标题翻译：传感器带有独立的执行器和感应指
公开(公告)号：USRE36498E
公开(公告)日：2000-01-18
申请号：US172541
申请日：1998-10-14
申请人： Roger T. Howe , Stephen Bart
发明人： Roger T. Howe , Stephen Bart
IPC分类号： G01L1/14 , G01P15/125 , G01P15/13 , G01P15/08
CPC分类号： G01P15/125 , G01L1/148 , G01P15/131 , H01G5/14 , G01P2015/0814
摘要： A micromachined force sensor containing separate sensing and actuator structures. A member is suspended above the substrate so that it is movable along an axis in response to a force. The member includes a set of parallel sense fingers and a separate set of parallel force fingers. The sense fingers are positioned between fingers of two sense plates, to form a first differential capacitor, whose capacitance changes when the member moves in response to a force along the axis. The change in capacitance induces a sense signal on the member, which permits the measurement of the magnitude and duration of the force. The force fingers are positioned between fingers of two actuator plates, to form a second differential capacitor. The sense signal can be used to provide feedback to the second differential capacitor to generate different electrostatic forces between the force fingers and the two actuator plates, to offset the force applied along the preferred axis. Limit stops limit the movement of the member to less than the distance between the electrodes of the differential capacitors, to prevent contact between the electrodes. Additional fingers be positioned around the differential capacitors to minimize parasitic capacitances.
摘要翻译：包含单独的传感和致动器结构的微加工力传感器。构件悬挂在基板上方，使得其可以响应于力而沿轴线移动。该构件包括一组平行的手指和一组单独的平行的手指。感测指状物定位在两个感测板的指状物之间，以形成第一差分电容器，当构件响应于沿着轴的力移动时，其电容发生变化。电容的变化会引起元件上的感应信号，这样可以测量力的大小和持续时间。力指定位于两个致动器板的指状物之间，以形成第二差分电容器。感测信号可以用于向第二差分电容器提供反馈以在力指和两个致动器板之间产生不同的静电力，以抵消沿着优选轴施加的力。限制停止将构件的移动限制为小于差分电容器的电极之间的距离，以防止电极之间的接触。附加指状物位于差分电容器周围，以最小化寄生电容。

10. 发明授权

US5858809A Conductive plane beneath suspended microstructure 失效
标题翻译：悬浮微结构下面的导电平面
公开(公告)号：US5858809A
公开(公告)日：1999-01-12
申请号：US820316
申请日：1997-03-18
申请人： Kevin Hin-Leung Chau , Roger T. Howe , Richard S. Payne , Yang Zhao , Theresa A. Core , Steven J. Sherman
发明人： Kevin Hin-Leung Chau , Roger T. Howe , Richard S. Payne , Yang Zhao , Theresa A. Core , Steven J. Sherman
IPC分类号： G01P15/08 , G01P15/125 , H01L21/465
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0814
摘要： A method and apparatus for providing a conductive plane beneath a suspended microstructure. A conductive region is diffused into a substrate. A dielectric layer is added, covering the substrate, and then removed from a portion of the conductive region. A spacer layer is deposited over the dielectric and exposed conductive region. A polysilicon layer is deposited over the spacer layer, and formed into the shape of the suspended microstructure. After removal of the spacer layer, the suspended microstructure is left free to move above an exposed conductive plane. The conductive plane is driven to the same potential as the microstructure.
摘要翻译：一种用于在悬浮微结构下方提供导电平面的方法和装置。导电区域扩散到衬底中。添加介电层，覆盖基板，然后从导电区域的一部分去除。间隔层沉积在电介质和暴露的导电区域上。多晶硅层沉积在间隔层上，并形成悬浮微结构的形状。在去除间隔层之后，使悬浮的微结构自由地在暴露的导电平面上移动。导电平面被驱动到与微结构相同的电位。

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