会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Structure and method of forming an enlarged head on a plug to eliminate the enclosure requirement
    • 在塞子上形成放大头部以消除外壳要求的结构和方法
    • US06794757B1
    • 2004-09-21
    • US08866456
    • 1997-05-30
    • Gregory C. Smith
    • Gregory C. Smith
    • H01L2348
    • H01L23/5226H01L21/76804H01L23/485H01L2924/0002Y10S438/97H01L2924/00
    • The contact opening through an insulating layer is formed having a straight sidewall portion and a bowl shaped sidewall portion. The bowl shaped sidewall portion is near the top of the insulation layer to provide an enlarged diameter of the contact opening at the top relative to the bottom. A conductive material is then formed in the contact opening in electrical contact with a lower conductive layer. The conductive material forms a plug having an enlarged head, such as a nail head or a flat heat screw shape. The enlarged head protects the silicon and a barrier layer, if present, within the contact from being etched by any subsequent anisotropic etches. Thus, when an electrical interconnection layer such as aluminum is formed overlying the contact plug, the plug acts as an etch stop to prevent etching of a barrier layer of the barrier layer within the contact opening.
    • 通过绝缘层的接触开口形成为具有直的侧壁部分和碗形的侧壁部分。 碗状侧壁部分靠近绝缘层的顶部,以在顶部相对于底部提供接触开口的扩大直径。 然后在接触开口中形成与下导电层电接触的导电材料。 导电材料形成具有扩大的头部的塞子,例如钉头或平的热螺丝形状。 扩大的头部保护硅和阻挡层(如果存在)在接触件内被任何随后的各向异性蚀刻腐蚀。 因此,当诸如铝的电互连层形成在接触插塞上方时,插塞充当蚀刻停止件,以防止在接触开口内蚀刻阻挡层的阻挡层。
    • 8. 发明授权
    • Workpiece holding device
    • 工件夹持装置
    • US6158728A
    • 2000-12-12
    • US452426
    • 1999-12-01
    • Gregory C. Smith
    • Gregory C. Smith
    • B25B5/00B25B5/10B23Q3/02
    • B25B5/006B25B5/104B25B5/105
    • A workpiece holding device for a T-slotted machine table includes a locator block having a planar bottom surface, a mounting hole that intersects the bottom surface to define a center point, at least one workpiece locating surface disposed a predetermined distance from the center point, and a key protruding from the bottom surface at a second point offset a predetermined distance from the center point. The protruding portion of the key has a width substantially the same as the T-slot opening so as to slidably mount in the T-slot. A fastener extends through the mounting hole and secures the locator block to a T-nut slidably mounted in the T-slot. A clamp secured to the locator block clamps the workpiece to the locating surface of the locator block. A method of using the device is also disclosed.
    • 一种用于T型开槽机床的工件保持装置包括:具有平坦底面的定位块,与底面相交以限定中心点的安装孔,设置在离中心点一定距离的至少一个工件定位面, 以及在距离中心点偏移预定距离的第二点处从底表面突出的键。 键的突出部分具有与T形槽开口基本相同的宽度,从而可滑动地安装在T形槽中。 紧固件延伸穿过安装孔并将定位块固定到可滑动地安装在T形槽中的T形螺母。 固定到定位块的夹具将工件夹紧到定位块的定位表面。 还公开了使用该装置的方法。