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    • 6. 发明授权
    • Methods of fabricating nanoscale-to-microscale structures
    • 制造纳米级至微结构的方法
    • US07615206B2
    • 2009-11-10
    • US11838211
    • 2007-08-13
    • Kenneth Henry SandhageZhihao Bao
    • Kenneth Henry SandhageZhihao Bao
    • C01B13/14
    • B81C99/0095B33Y80/00Y10T428/24479Y10T428/256Y10T428/2998Y10T428/31551Y10T428/31663
    • Methods for the production of shaped nanoscale-to-microscale structures, wherein a nanoscale-to-microscale template is provided having an original chemical composition and an original shape, and the nanoscale-to-microscale template subjected to a chemical reaction, so as to partially or completely convert the nanoscale-to-microscale template into the shaped nanoscale-to-microscale structure having a chemical composition different than the original chemical composition and having substantially the same shape as the original shape, being a scaled version of the original shape. The shaped nanoscale-to-microscale structure formed comprises an element (such as silicon), a metallic alloy (such as a silicon alloy), or a non-oxide compound (such as silicon carbide or silicon nitride).
    • 制备成形纳米级至微尺度结构的方法,其中提供具有原始化学组成和原始形状的纳米级至微量级模板,以及经受化学反应的纳米级至微量级模板,以便 部分或完全地将纳米级至微米级模板转化成具有不同于原始化学成分的化学组成并具有与原始形状基本相同的形状的成形纳米级至微尺度结构,其为原始形状的缩放版本。 形成的成形的纳米级至微细结构包括元素(例如硅),金属合金(例如硅合金)或非氧化物(例如碳化硅或氮化硅)。