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1. 发明授权

US5073208A Method for cryogenic treatment of Coriolis mass flow meter structures 失效
标题翻译：科里奥利质量流量计结构的低温处理方法
公开(公告)号：US5073208A
公开(公告)日：1991-12-17
申请号：US407390
申请日：1989-09-14
申请人： Richard B. Wong , Wayne Pratt
发明人： Richard B. Wong , Wayne Pratt
IPC分类号： C21D6/04 , C21D9/08 , G01F1/84
CPC分类号： G01F1/8409 , C21D6/04 , C21D9/08 , G01F1/8413 , G01F1/844
摘要： A method for increasing stability of a Coriolis mass flow meter by relieving residual and internal stress within the flow tube and related structures of the meter. The method including the steps of bending the flow tube in the desired form, fixing related flow tube structures onto the flow tube, clamping the flow tube so as to maintain the desired form during subsequent processes, annealing the flow tube, and cryogenically cooling the flow tube. An apparatus to be utilized along with the method of the present invention fixes the flow tube during the annealing and cryogenic cooling treatment processes to maintain the desired shape of the flow tube. The invention also contemplates the flow tube made in accordance with the method of the present invention.
摘要翻译：通过减轻流管内的残余和内部应力和仪表的相关结构来提高科里奥利质量流量计的稳定性的方法。该方法包括将流管弯曲成所需形式的步骤，将相关的流管结构固定到流管上，夹紧流管，以便在后续过程中维持所需形状，退火流管，并对流动进行低温冷却管。与本发明的方法一起使用的装置在退火和低温冷却处理过程期间固定流管，以保持流管的期望形状。本发明还考虑了根据本发明的方法制造的流动管。

2. 发明授权

US5857893A Methods and apparatus for measuring and dispensing processing solutions to a CMP machine 失效
标题翻译：用于测量和分配CMP机器处理溶液的方法和设备
公开(公告)号：US5857893A
公开(公告)日：1999-01-12
申请号：US720744
申请日：1996-10-02
申请人： Gregory A. Olsen , Carey R. Smith , Wayne Pratt
发明人： Gregory A. Olsen , Carey R. Smith , Wayne Pratt
IPC分类号： B24B7/22 , B24B37/04 , B24B57/02 , G01F1/84 , B24B49/16
CPC分类号： G01F15/024 , B24B37/04 , B24B57/02 , G01F1/8409 , G01F1/8413 , G01F1/844 , G01F1/8472
摘要： Methods and apparatus for measuring and controlling the flow rates of processing solutions to a CMP machine during the polishing and planarization process. The apparatus comprises a processing solution source, a processing solution dispensing system for applying the solution to the CMP machine, a mechanism for transferring the processing solution from the solution source to the dispensing system, and a metering or sensing system for accurately measuring the amount of processing solution actually dispensed to the CMP machine. Preferably, the metering system comprises a coriolis mass flow meter and a controller for controlling its operation. The metering system may interface with the CMP machine controller in a feed-back loop configuration so that the actual flow rates of the solutions may be controlled in real time.
摘要翻译：用于在抛光和平坦化处理期间测量和控制CMP机器的处理溶液的流速的方法和装置。该设备包括处理溶液源，用于将溶液施加到CMP机器的处理溶液分配系统，用于将处理溶液从溶液源转移到分配系统的机构，以及用于精确测量处理溶液的量的计量或感测系统处理液实际分配给CMP机器。优选地，计量系统包括科里奥利质量流量计和用于控制其操作的控制器。计量系统可以以反馈回路配置与CMP机器控制器接口，以便实时控制溶液的实际流速。

3. 发明授权

US5551307A Mass flow measuring device 失效
标题翻译：质量流量测量装置
公开(公告)号：US5551307A
公开(公告)日：1996-09-03
申请号：US543279
申请日：1990-06-25
申请人： Martin Kane , Wayne Pratt , Jozsef Alesz , Zoltan Biro , Zoltan Varga
发明人： Martin Kane , Wayne Pratt , Jozsef Alesz , Zoltan Biro , Zoltan Varga
IPC分类号： G01F1/84 , G01F1/00
CPC分类号： G01F1/8413 , G01F1/8468 , G01F1/8472 , G01F1/8477 , G01F1/8481 , G01F1/8486
摘要： Apparatus for measuring the mass flow of a fluid within a defined fluid stream including a conduit having two substantially parallel, flexible and continuous flow tubes fixedly mounted at their ends to a centrally positioned housing forming a flow splitter and a flow converger for directing the flow from the inlet and for directing the flow into the outlet between the apparatus and the fluid stream. The ends of each flow tube positioned proximal to one another and to the center of gravity formed by the shape of the flow tube. Each flow tube substantially forming a "B" shape having a first loop, a connecting portion and a second loop. The first and second loops being symmetrical with respect to the connecting portion and extending laterally from the center of gravity at a greater distance than the displacement of the connecting portion to the center of gravity. The flow tubes being oscillated in opposing modes at the connecting portion so as to produce a measurable Coriolis reaction force by the fluid on the flow tubes. The vibration means being capable of selectively oscillating the flow tube at least one discrete resonant frequency higher than the fundamental resonance of the flow tube so as to create waves along the tube length and form nodal points which are substantially stationary with respect to the vibrating flow tube.
摘要翻译：用于测量在限定的流体流中的流体的质量流量的装置，包括具有两个基本上平行的，柔性和连续的流管的导管，所述流管固定地安装在其端部处于中心定位的壳体上，形成分流器和流动收敛器，入口和用于将流引导到设备和流体流之间的出口中。每个流管的端部彼此靠近并且由流管的形状形成的重心。每个流管基本上形成具有第一环的“B”形，连接部和第二环。第一和第二回路相对于连接部分是对称的，并且以比连接部分到重心的位移更大的距离从重心横向延伸。流管在连接部分以相反的模式振荡，以便通过流管上的流体产生可测量的科里奥利反作用力。所述振动装置能够选择性地使所述流管振荡至少一个高于所述流管的基本共振的离散谐振频率，以便沿着所述管的长度产生波浪并形成相对于所述振动流管基本静止的节点。

4. 发明授权

US5115683A Coriolis mass flow meter adapted for low flow rates 失效
标题翻译：适用于低流量的CORIOLIS质量流量计
公开(公告)号：US5115683A
公开(公告)日：1992-05-26
申请号：US404919
申请日：1989-09-08
申请人： Wayne Pratt
发明人： Wayne Pratt
IPC分类号： G01F1/84
CPC分类号： G01F1/8409 , G01F1/8413 , G01F1/8422 , G01F1/8427 , G01F1/8486
摘要： A Coriolis mass flow meter of the type including a continuous flexible flow tube fixedly mounted at its ends and adapted for receiving fluid flow. A driver oscillates the flow tube at a fixed frequency. A drive brace is attached at one end to the flow tube mount and at the opposite end to the flow tube substantially at the position of the applied oscillation of the driver. The brace limits the displacement of the flow tube transverse to the direction of the applied oscillation without substantially restricting the motion of the flow tube due to the Coriolis reaction of the fluid to the driver oscillation. The mounting of the flow tube being made by the engagement of gripping portions having bushings therein. The mount limiting transfer of forces acting on the inlet and outlet ends of the flow tube. Resonant pins are provided at each end of the flow tube adjacent the fixed mounting to resiliently clamp the flow tube and fix the resonant frequency thereof throughout its useful life. The Coriolis reaction of the fluid being measured by sensors so as to determine the mass flow rate of the fluid.

5. 发明授权

US5423221A Mass flow measuring device 失效
标题翻译：质量流量测量装置
公开(公告)号：US5423221A
公开(公告)日：1995-06-13
申请号：US912893
申请日：1986-09-26
申请人： Martin Kane , Andras Kiss , Sandor Kun , Zoltan Biro , Zaltan Varga , Peter Salamon , Wayne Pratt , Lazslo Szabo , Jozsef Alesz
发明人： Martin Kane , Andras Kiss , Sandor Kun , Zoltan Biro , Zaltan Varga , Peter Salamon , Wayne Pratt , Lazslo Szabo , Jozsef Alesz
IPC分类号： G01F1/84
CPC分类号： G01F1/8413 , G01F1/8468 , G01F1/8472 , G01F1/8477 , G01F1/8481 , G01F1/8486
摘要： A conduit having two substantially parallel, flexible and continuous flow tubes fixedly mounted at their ends to a centrally positioned housing The ends of each flow tube positioned proximal to one another and to the center of gravity formed by the shape of the flow tube. Each flow tube substantially forming a "B" shape having a first loop, a connecting portion and a second loop. The first and second loops being symmetrical with respect to the connecting portion and extending laterally from the center of gravity at a greater distance than the displacement of the connecting portion to the center of gravity. The flow tubes being oscillated in opposing modes at the connecting portion so as to produce a measurable Coriolis reaction force by the fluid on the flow tubes. The vibration means being capable of selectively oscillating the flow tube at least one discrete resonant frequency higher than the fundamental resonance of the flow tube so as to create waves along the tube length and form nodal points which are substantially stantionary with respect to the vibrating flow tube. The nodes form free floating flexible joints within the continuous flow tube to separate the oscillation of a portion of the flow tube partially from the fixed mounting points which are typically subject to unwanted vibrational noise.
摘要翻译：具有两个基本上平行的，柔性的和连续的流管的导管，其固定地安装在其端部到中心定位的壳体。每个流管的端部彼此靠近并且由流管的形状形成。每个流管基本上形成具有第一环的“B”形，连接部和第二环。第一和第二回路相对于连接部分是对称的，并且以比连接部分到重心的位移更大的距离从重心横向延伸。流管在连接部分以相反的模式振荡，以便通过流管上的流体产生可测量的科里奥利反作用力。所述振动装置能够选择性地使所述流管振荡至少一个高于所述流动管的基本共振的离散谐振频率，以便沿着所述管的长度产生波浪并形成相对于所述振动流管基本上相对的节点。节点在连续流动管内形成自由浮动柔性接头，以将流动管的一部分的振荡部分地与通常受到不想要的振动噪声的固定安装点分开。

6. 发明授权

US4782711A Method and apparatus for measuring mass flow 失效
标题翻译：测量质量流量的方法和装置
公开(公告)号：US4782711A
公开(公告)日：1988-11-08
申请号：US918404
申请日：1986-10-14
申请人： Wayne Pratt
发明人： Wayne Pratt
IPC分类号： G01F1/84
CPC分类号： G01F1/8413 , G01F1/8427 , G01F1/8431 , G01F1/8436 , G01F1/8468 , G01F1/8477
摘要： A method and apparatus for determining mass flow of fluid flowing within a conduit. The conduit is oscillated periodically transverse to the flow therein, and sensors sense the movement of the conduit at discrete, spaced locations on the conduit. The sensors generate periodic signals representative of the movement of the conduit at said locations. The method of the present invention comprises the steps of determining the instantaneous amplitude difference between the signals at a plurality of discrete adjacent intervals (which may or may not be of equal width), determining the product of the absolute value of the instantaneous amplitude difference and the amplitude of the interval for each said interval, determining the sum of said products for each interval over a cycle of oscillation, and generating from the sum a signal representative of mass flow.An apparatus according to the invention comprises circuitry for determining the instantaneous amplitude difference between the signals from the sensors of the flow meter at a plurality of discrete, adjacent intervals, circuitry for determining the product of the absolute value of the instantaneous amplitude difference and the width of the interval for each said interval, circuitry for determining the sum of the products for each interval over a cycle of oscillation, and circuitry for generating from the sum a signal representative of the mass flow. The circuitry may comprise discrete circuitry or may be subsumed within a microprocessor.
摘要翻译：一种用于确定在管道内流动的流体的质量流量的方法和装置。导管周期性地横向于其中的流动振荡，并且传感器感测导管上离散的间隔位置处的导管的运动。传感器产生代表在所述位置处导管的移动的周期性信号。本发明的方法包括以下步骤：确定在多个离散的相邻间隔（其可能或可以不具有相等宽度）之间的信号之间的瞬时幅度差，确定瞬时幅度差的绝对值的乘积和每个所述间隔的间隔的幅度，在一个振荡周期上确定每个间隔的所述乘积的总和，并且从总和产生表示质量流的信号。根据本发明的装置包括用于在多个离散的相邻间隔处确定来自流量计的传感器的信号之间的瞬时幅度差的电路，用于确定瞬时幅度差的绝对值和宽度的乘积的乘积每个所述间隔的间隔的电路，用于确定在一个振荡周期上的每个间隔的乘积之和的电路，以及用于从总和中产生表示质量流的信号的电路。电路可以包括离散电路或者可以包含在微处理器内。

7. 发明授权

US4733569A Mass flow meter 失效
标题翻译：质量流量计
公开(公告)号：US4733569A
公开(公告)日：1988-03-29
申请号：US809658
申请日：1985-12-16
申请人： Newton D. Kelsey , Martin Kane , Wayne Pratt
发明人： Newton D. Kelsey , Martin Kane , Wayne Pratt
IPC分类号： G01F1/84
CPC分类号： G01F1/8427 , G01F1/8486
摘要： A mass flow meter for placement in line within a pre-existing process line. The flow meter having a conduit forming a substantially free floating spiral or circular loop which is symmetrical about the axis line defined by the process line. A driving transducer extending radially from a bracket on a support beam which is positioned along the axis line and attached to the inlet and outlet end of the conduit. The driver imparting an alternating deflection to the loop which is substantially perpendicular to the fluid flow within the loop and parallel to the axis line. Sensing transducers are positioned along the periphery of the loop, displaced equidistant from the driving transducer along its circumference for determining the deflection signature of the loop. The deflection of the loop in response to the fluid reaction forces is measured without reference to a specific fixed axis or position of the loop. This acceleration signature is correlated to the mass flow rate of the fluid through the conduit.
摘要翻译：一种用于在预先存在的生产线内排放的质量流量计。流量计具有导管，其形成基本上自由的浮动螺旋或圆形回路，其围绕由过程管线限定的轴线对称。驱动换能器，其从支撑梁上的支架径向延伸，所述支撑梁沿着轴线定位并附接到导管的入口端和出口端。驾驶员向环路施加交替偏转，其基本上垂直于环路内的流体流动并且平行于轴线。感测传感器沿着环的周边定位，沿其圆周与驱动换能器等距离移位，以确定回路的偏转特征。测量环路响应于流体反作用力的偏转，而不参考具体的固定轴线或环路的位置。该加速度特征与通过导管的流体的质量流量相关。

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