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    • 1. 发明授权
    • Strain-engineered direct-gap Ge/SnxGe1-x heterodiode and multi-quantum-well photodetectors, laser, emitters and modulators grown on SnySizGe1-y-z-buffered silicon
    • 应变工程直通Ge / SnxGe1-x异质二极管和多量子阱光电探测器,在SnySizGe1-y-z缓冲硅上生长的激光器,发射器和调制器
    • US06897471B1
    • 2005-05-24
    • US10722611
    • 2003-11-28
    • Richard A. SorefJose MenendezJohn Kouvetakis
    • Richard A. SorefJose MenendezJohn Kouvetakis
    • H01L31/0328
    • H01L31/035254B82Y20/00H01L29/155H01L31/105H01L33/12H01L33/34H01S5/3427
    • This invention teaches two new families of Si-based Ge/SnxGe1-x heterodiode and multiple quantum well (MQW) photonic devices: (1) band-to-band photodetectors, lasers, emitters, amplifiers and modulators for the 1.5 to 12 μm wavelength range; (2) intersubband photodetectors, lasers, emitters and modulators for 12 to 100 μm operation. The bipolar band-to-band devices have applications within the 1.5-2.2, 3-5 and 8-to-12 μm bands. The unipolar intersubband group has longwave infrared and terahertz applications. All strained-layer devices are grown a relaxed SnySizGe1-y-z buffer layer—a virtual substrate (VS) grown directly upon a silicon wafer by unique LT UHV-CVD. The VS provides a low-defect atomic template for subsequent heteroepitaxy and is an essential enabling technique for engineering tensile and compressive strain within the Ge/SnxGe1-x MQW by selecting the VS lattice parameter to be approx midway between the layer lattices.
    • 本发明教导了两个新的基于Si的Ge / Sn x Ge 1-x N异质二极管和多量子阱(MQW)光子器件的新族:(1)带 - 波段光电探测器,激光器,发射器,放大器和调制器,用于1.5至12 mum波长范围; (2)子带间光电检测器,激光器,发射器和调制器,用于12至100个操作。 双极性带对频带器件具有1.5-2.2,3-5和8到12个母带的应用。 单极子带组具有长波红外和太赫兹应用。 所有的应变层器件都生长在一个松弛的Sn>> Ge 1 1> buffer buffer layer upon upon upon upon upon upon upon upon upon upon upon upon upon upon 通过独特的LT UHV-CVD的硅晶片。 VS提供了用于随后的异质外延的低缺陷原子模板,并且是用于通过以下方式在Ge / Sn x Ge 1-x MQW内设计拉伸和压缩应变的必需的使能技术: 选择VS晶格参数在层格之间大约中间。
    • 2. 发明授权
    • Electrically pumped Group IV semiconductor micro-ring laser
    • 电泵IV组半导体微环激光器
    • US07391801B1
    • 2008-06-24
    • US11286010
    • 2005-11-25
    • Richard A. SorefStephen J. Emelett
    • Richard A. SorefStephen J. Emelett
    • H01S3/08H01S5/00
    • H01S5/1071H01S5/021H01S5/026H01S5/0425H01S5/1032H01S5/2231H01S5/3223H01S5/3224
    • An electrically pumped semiconductor laser is provided as including a waveguide structure disposed on the substrate. An optical coupling layer is disposed on the substrate and the waveguide. A resonator layer is disposed on the optical coupling layer and may be adapted to include a photonic crystal lattice having a plurality of substantially cylindrical pores extending downwardly into the resonator layer. An insulating cap layer may be disposed on the resonator layer which operatives to seal the photonic crystal lattice. A first plug filled vias is formed on a central region of the cap layer, which extends downwardly to permit a bottom portion of the first plug to communicate with the photonic crystal lattice. Further, a second plug filled vias is formed on an edge region of the cap layer and extends downwardly to permit a bottom portion of the second plug to communicate with the photonic crystal lattice.
    • 提供电泵浦的半导体激光器,其包括设置在基板上的波导结构。 光耦合层设置在基板和波导上。 谐振器层设置在光学耦合层上,并且可以适于包括具有向下延伸到谐振器层中的多个基本圆柱形孔的光子晶格。 绝缘盖层可以设置在谐振器层上,操作者可以密封光子晶格。 在盖层的中心区域上形成第一插塞填充的通孔,其向下延伸以允许第一插头的底部与光子晶格格栅连通。 此外,第二插头填充的通孔形成在盖层的边缘区域上并且向下延伸以允许第二插头的底部与光子晶格连接。
    • 8. 发明授权
    • Phonon-pumped semiconductor lasers
    • 声子泵浦半导体激光器
    • US06621841B1
    • 2003-09-16
    • US10132328
    • 2002-04-23
    • Richard A. SorefGregory Sun
    • Richard A. SorefGregory Sun
    • H01S500
    • B82Y20/00H01S1/00H01S5/04H01S5/0612H01S5/3022H01S5/3401H01S5/3402H01S5/3425
    • The first phonon-pumped semiconductor laser. The active region is an unbiased boron-doped Si0.94Ge0.06/Si superlattice with Si0.97Ge0.03 buffer layers embedded in a surface-plasmon strip waveguide. Warm and cool heat sinks create a temperature gradient across the waveguide. A heat buffer layer adjacent to the cool sink reflects optical phonons and transmits acoustic phonons. Within the resonator, the difference in effective temperatures of optical and acoustic phonons provides hole pumping for the lasing transition between the heavy-hole 2 (HH2) and heavy-hole 1(HH1) minibands. A gain of 280/cm at the 5THz emission frequency is predicted for 6×1017/cm3 doping at temperatures of 300K and 77K for optical and acoustic phonons, respectively.
    • 第一个声子泵浦半导体激光器。 有源区是一个无偏硼掺杂的Si0.94Ge0.06 / Si超晶格,Si0.97Ge0.03缓冲层埋在表面等离子体激元条波导中。 温暖和凉爽的散热器在波导上产生温度梯度。 与冷却水槽相邻的热缓冲层反射光学声子并传输声学声子。 在谐振器内,光学和声学声子的有效温度差异为重孔2(HH2)和重孔1(HH1)迷你型之间的激光过渡提供了空穴泵浦。 在5THz发射频率下,对于光学和声学声子,在300K和77K的温度下分别预测6×10 17 / cm 3的掺杂增益为280 / cm。
    • 10. 发明授权
    • Low loss semiconductor directional coupler switches including gain
method of switching light using same
    • 低损耗半导体定向耦合器开关包括使用相同的开关灯的增益方法
    • US5004447A
    • 1991-04-02
    • US403636
    • 1989-09-06
    • Richard A. Soref
    • Richard A. Soref
    • G02F1/313H01S5/062H01S5/10
    • H01S5/1032G02F1/3133H01S5/06213H01S5/10
    • In multiple quantum well directional couplers, non-centralized input and output legs, occupying major portions of the switches, are continuously forward biased, to produce sufficient gain in light intensity therein to overcome losses in the centralized portions, to in turn provide a transparent (ODB loss) two-by-two coupler switch. Short segments of the centralized coupling portion occupying minor portions of the switches, are switched between forward bias states and zero bias states to provide light beam switching. Thus these switches employ both carrier gain and carrier refraction. The large changes in the index of refraction enable extremely short, low loss, switches to be fabricated and cascaded if desired. A second group of less preferred switches employ solely the carrier refraction effect, by injecting carriers into the waveguides at high levels, preferably equal to or greater than 1.times.10.sup.18 /cm.sup.3.
    • 在多个量子阱定向耦合器中,占用开关主要部分的非集中输入和输出支路被连续正向偏置,以在其中产生足够的光强增益,以克服集中部分中的损耗,从而提供透明( ODB损耗)二位二联合开关。 占用开关的小部分的集中耦合部分的短段在正向偏置状态和零偏置状态之间切换以提供光束切换。 因此,这些开关采用载波增益和载波折射。 如果需要,折射率的大的变化使得极短,低损耗,开关被制造和级联。 第二组较不优选的开关仅采用载流子折射效应,通过将载流子以高水平注入到波导中,优选等于或大于1×10 18 / cm 3。