专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07348556B2 Method of measuring three-dimensional surface roughness of a structure 有权
标题翻译：测量结构三维表面粗糙度的方法
公开(公告)号：US07348556B2
公开(公告)日：2008-03-25
申请号：US11252115
申请日：2005-10-17
申请人： Prasanna Chitturi , Liang Hong , Craig Henry , John Notte
发明人： Prasanna Chitturi , Liang Hong , Craig Henry , John Notte
IPC分类号： H01J37/30
CPC分类号： G03F7/70625 , G01B15/08 , G01N23/2251
摘要： An improved method of measuring the three-dimensional surface roughness of a structure. A focused ion beam is used to mill a succession of cross-sections or “slices” of the feature of interest at pre-selected intervals over a pre-selected measurement distance. As each cross-section is exposed, a scanning electron microscope is used to measure the relevant dimensions of the feature. Data from these successive “slices” is then used to determine the three-dimensional surface roughness for the feature.
摘要翻译：一种测量结构的三维表面粗糙度的改进方法。聚焦离子束用于在预先选择的测量距离上以预先选择的间隔研磨一系列感兴趣特征的横截面或“切片”。当每个横截面暴露时，使用扫描电子显微镜来测量特征的相关尺寸。然后使用来自这些连续“切片”的数据来确定特征的三维表面粗糙度。

2. 发明申请

US20070018099A1 Method of measuring three-dimensional surface roughness of a structure 有权
标题翻译：测量结构三维表面粗糙度的方法
公开(公告)号：US20070018099A1
公开(公告)日：2007-01-25
申请号：US11252115
申请日：2005-10-17
申请人： Prasanna Chitturi , Liang Hong , Craig Henry , John Notte
发明人： Prasanna Chitturi , Liang Hong , Craig Henry , John Notte
IPC分类号： G21K7/00
CPC分类号： G03F7/70625 , G01B15/08 , G01N23/2251
摘要： An improved method of measuring the three-dimensional surface roughness of a structure. A focused ion beam is used to mill a succession of cross-sections or “slices” of the feature of interest at pre-selected intervals over a pre-selected measurement distance. As each cross-section is exposed, a scanning electron microscope is used to measure the relevant dimensions of the feature. Data from these successive “slices” is then used to determine the three-dimensional surface roughness for the feature.
摘要翻译：一种测量结构的三维表面粗糙度的改进方法。聚焦离子束用于在预先选择的测量距离上以预先选择的间隔研磨一系列感兴趣特征的横截面或“切片”。当每个横截面暴露时，使用扫描电子显微镜来测量特征的相关尺寸。然后使用来自这些连续“切片”的数据来确定特征的三维表面粗糙度。

3. 发明授权

US07511282B2 Sample preparation 有权
标题翻译：样品制备
公开(公告)号：US07511282B2
公开(公告)日：2009-03-31
申请号：US11440799
申请日：2006-05-25
申请人： Enrique Agorio , Michael Tanguay , Christophe Roudin , Liang Hong , Jay Jordan , Craig Henry , Mark Darus
发明人： Enrique Agorio , Michael Tanguay , Christophe Roudin , Liang Hong , Jay Jordan , Craig Henry , Mark Darus
IPC分类号： G21K5/10
CPC分类号： G01N1/286 , G01N1/32 , G01N2001/2833 , G01N2001/2886 , G02B21/32 , H01J2237/31745 , Y10T428/24355
摘要： Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.
摘要翻译：从基材提取TEM样品的方法包括在样品上研磨孔并将探针插入孔中。样品粘附到探头上，并且可以在探头上进行处理。在另一个实施方案中，样品从基底中释放出来并通过静电吸附粘附到探针上。将样品置于真空室中的TEM样品架上。

4. 发明授权

US07423263B2 Planar view sample preparation 有权
公开(公告)号：US07423263B2
公开(公告)日：2008-09-09
申请号：US11474519
申请日：2006-06-23
申请人： Liang Hong , Craig Henry , Jay Jordan , Young-Chung Wang
发明人： Liang Hong , Craig Henry , Jay Jordan , Young-Chung Wang
IPC分类号： G01N1/28 , H01J37/20
CPC分类号： G01N1/32 , H01J2237/208 , H01J2237/31745
摘要： A method and apparatus is described for orienting samples for charged particle beam operations. A sample is attached to a probe with a major surface of the sample at a non-normal angle to the probe shaft, and the probe shaft is rotated to reorient the sample. The invention is particularly useful for preparing planar view TEM samples. The invention allows for a sample to be mounted to a TEM grid and thinning by an ion beam without removing the grid from the vacuum chamber for reorienting. In one embodiment, a probe oriented at an angle, such as 45 degrees, to the sample stage has a probe tip with a flat area oriented parallel at 45 degrees to the probe axis, that is, the flat area is parallel to the sample stage. The flat area of the probe tip is attached to the sample, and when the probe is rotated 180 degrees, the orientation of the sample changes by 90 degrees, from horizontal to vertical. The sample can then be attached to a vertically oriented TEM grid on a sample stage. The sample stage is rotated and tilted to present the backside of the sample to the ion beam for thinning.

5. 发明申请

US20080073535A1 Planar view sample preparation 有权
标题翻译：平面图样品准备
公开(公告)号：US20080073535A1
公开(公告)日：2008-03-27
申请号：US11474519
申请日：2006-06-23
申请人： Liang Hong , Craig Henry , Jay Jordan , Young-Chung Wang
发明人： Liang Hong , Craig Henry , Jay Jordan , Young-Chung Wang
IPC分类号： G21K7/00
CPC分类号： G01N1/32 , H01J2237/208 , H01J2237/31745
摘要： A method and apparatus is described for orienting samples for charged particle beam operations. A sample is attached to a probe with a major surface of the sample at a non-normal angle to the probe shaft, and the probe shaft is rotated to reorient the sample. The invention is particularly useful for preparing planar view TEM samples. The invention allows for a sample to be mounted to a TEM grid and thinning by an ion beam without removing the grid from the vacuum chamber for reorienting. In one embodiment, a probe oriented at an angle, such as 45 degrees, to the sample stage has a probe tip with a flat area oriented parallel at 45 degrees to the probe axis, that is, the flat area is parallel to the sample stage. The flat area of the probe tip is attached to the sample, and when the probe is rotated 180 degrees, the orientation of the sample changes by 90 degrees, from horizontal to vertical. The sample can then be attached to a vertically oriented TEM grid on a sample stage. The sample stage is rotated and tilted to present the backside of the sample to the ion beam for thinning.
摘要翻译：描述了用于定向带电粒子束操作的样本的方法和装置。将样品连接到具有与探针轴成非正常角度的样品主表面的探针上，并且探针轴旋转以重新取向样品。本发明特别可用于制备平面视图TEM样品。本发明允许将样品安装到TEM网格并通过离子束减薄而不从真空室移除网格以进行重新定向。在一个实施例中，以一定角度（例如45度）到达样品台的探针具有探针尖端，其具有平行于与探针轴成45度的平坦区域，即平坦区域平行于样品台。探针尖端的平坦区域连接到样品上，当探头旋转180度时，样品的取向从水平向垂直方向变化90度。然后将样品连接到样品台上的垂直取向的TEM网格。样品台旋转并倾斜以将样品的背面呈现到离子束以进行稀释。

6. 发明申请

US20070272854A1 Sample Preparation 有权
标题翻译：样品制备
公开(公告)号：US20070272854A1
公开(公告)日：2007-11-29
申请号：US11440799
申请日：2006-05-25
申请人： Enrique Agorio , Michael Tanguay , Christophe Roudin , Liang Hong , Jay Jordan , Craig Henry , Mark Darus
发明人： Enrique Agorio , Michael Tanguay , Christophe Roudin , Liang Hong , Jay Jordan , Craig Henry , Mark Darus
IPC分类号： G01N1/08
CPC分类号： G01N1/286 , G01N1/32 , G01N2001/2833 , G01N2001/2886 , G02B21/32 , H01J2237/31745 , Y10T428/24355
摘要： Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.
摘要翻译：从基材提取TEM样品的方法包括在样品上研磨孔并将探针插入孔中。样品粘附到探头上，并且可以在探头上进行处理。在另一个实施方案中，样品从基底中释放出来并通过静电吸附粘附到探针上。将样品置于真空室中的TEM样品架上。

7. 发明申请

US20070293950A1 Web Content Extraction 审中-公开
标题翻译：网页内容提取
公开(公告)号：US20070293950A1
公开(公告)日：2007-12-20
申请号：US11424214
申请日：2006-06-14
申请人： Todd Haugen , Suzan M. Andrew , John E. Knapp , Melinda E. Nascimbeni , Craig Henry
发明人： Todd Haugen , Suzan M. Andrew , John E. Knapp , Melinda E. Nascimbeni , Craig Henry
IPC分类号： G05B15/00
CPC分类号： G06Q10/10
摘要： A system for extracting and saving web content for future reference, the system comprising an identifying means for allowing a user to identify the web content to be extracted and saved, a manipulation means for allowing the user to manipulate the identified web content such that it is extracted and saved, an extracting means for extracting operable elements of the identified web content, and a saving means for saving the extracted operable elements of the identified web content. The system further comprising a rendering means for rendering the saved operable elements of the identified web content on a local device, the rendering means not requiring access to the web content.
摘要翻译：一种用于提取和保存网页内容以供将来参考的系统，所述系统包括用于允许用户识别要提取和保存的网页内容的识别装置，用于允许用户操纵所识别的网页内容使其为提取和保存的提取装置，用于提取所识别的web内容的可操作元素;以及保存装置，用于保存所提取的所识别的web内容的可操作元素。所述系统还包括呈现装置，用于将所识别的网页内容的所保存的可操作元素呈现在本地设备上，所述呈现装置不需要访问所述网页内容。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式