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1. 发明授权

US5875029A Apparatus and method for surface inspection by specular interferometric and diffuse light detection 失效
标题翻译：通过镜面干涉和漫反射光检测进行表面检测的装置和方法
公开(公告)号：US5875029A
公开(公告)日：1999-02-23
申请号：US908061
申请日：1997-08-11
申请人： Peter C. Jann , Wayne W. Li , Igor Iosilevsky , Kenneth H. Womack , Vlastimil Cejna , George A. Burt, Jr.
发明人： Peter C. Jann , Wayne W. Li , Igor Iosilevsky , Kenneth H. Womack , Vlastimil Cejna , George A. Burt, Jr.
IPC分类号： G01N21/94 , G01N21/956 , G01B9/02
CPC分类号： G01N21/9501 , G01N21/94 , G01N2201/1045
摘要： A simple yet versatile noncontact optical inspection instrument and method are described for the inspection of magnetic disk surfaces for surface defects. This instrument is capable of inspecting the disk surface at any point in the disk manufacturing process. Surface defects such as bumps, pits and scratches can be measured. Surface contaminants such as particles and stains can also be measured. The instrument is also capable of discriminating between surface defects and surface contaminants. The instrument is comprised of two identical optical sensors which are located on opposite sides of the disk. A carriage supports and translates these sensors along the disk radius while a spindle rotates the disk. Both surfaces of the disk are therefore simultaneously scanned in a spiral fashion. The sensor's illumination optics produce a monochromatic focused spot of light which is normally incident upon the disk surface. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. Both the angle and power of the specular reflected light are measured, while just the power of the diffuse scattered light is measured. The output signals from the sensors are processed to estimate the size of the defects and to determine the type of defect.
摘要翻译：描述了一种简单而通用的非接触式光学检测仪器和方法，用于检查表面缺陷的磁盘表面。该仪器能够在磁盘制造过程的任何时刻检查磁盘表面。可以测量诸如凸块，凹坑和划痕的表面缺陷。还可以测量颗粒和污渍等表面污染物。该仪器还能够区分表面缺陷和表面污染物。仪器由两个相同的光学传感器构成，位于光盘的相对两侧。当主轴旋转磁盘时，滑架沿着磁盘半径支撑并平移这些传感器。因此，盘的两个表面都以螺旋方式同时扫描。传感器的照明光学器件产生通常入射在盘表面上的单色聚光光点。该传感器使用两个收集光学通道，其同时检测镜面反射光和由盘表面产生的漫射散射光。测量镜面反射光的角度和功率，同时测量漫射散射光的功率。来自传感器的输出信号被处理以估计缺陷的尺寸并确定缺陷的类型。

2. 发明授权

US5883714A Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light 失效
标题翻译：用于使用对反射光进行干涉分析来检测盘上的缺陷的方法和装置
公开(公告)号：US5883714A
公开(公告)日：1999-03-16
申请号：US726914
申请日：1996-10-07
申请人： Peter C. Jann , George A. Burt, Jr. , Joel Libove
发明人： Peter C. Jann , George A. Burt, Jr. , Joel Libove
IPC分类号： G01N21/88 , G01B9/02
CPC分类号： G01N21/88
摘要： A simple yet versatile non-contact optical inspection instrument and method are described for measuring the height and width of defects and contaminants on a magnetic disk surface. The instrument includes a sensor which produces an illumination beam that is modulated and then focused normally on the disk surface as a spot. The illumination spot is Doppler shifted due to the movement of the disk and the diffusely reflected light is interfered with a reference beam produced by the sensor's illumination optics. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. The phase shift of the specular reflected light and that of the diffusely scattered light are measured. The output signals from the sensors are processed to estimate the size and type of the defects. Another aspect of the present invention includes a demodulator which increases the frequency of an FM signal. Pulses representing the zero-crossings of the signal are generated and filtered to provide a voltage that is proportional to the frequency of the FM signal. Because the pulse train has a frequency that is significantly greater than the input frequency, a low-pass filter with both a high cut-off frequency and a gradual roll-off in frequency response may thus be used to optimize the output or demodulated signal in terms of increased bandwidth or faster response and more linear group delay.
摘要翻译：描述了一种简单而通用的非接触光学检测仪器和方法，用于测量磁盘表面上的缺陷和污染物的高度和宽度。该仪器包括一个传感器，该传感器产生一个照明光束，该照明光束被调制然后正常地聚焦在光盘表面上作为光斑。由于盘的运动，照明点是多普勒频移，并且漫反射光被传感器的照明光学器件产生的参考光束干扰。该传感器使用两个收集光学通道，其同时检测镜面反射光和由盘表面产生的漫射散射光。测量镜面反射光和漫散射光的相移。来自传感器的输出信号被处理以估计缺陷的尺寸和类型。本发明的另一方面包括一种提高FM信号频率的解调器。产生表示信号过零点的脉冲并进行滤波，以提供与FM信号的频率成比例的电压。因为脉冲串具有明显大于输入频率的频率，因此可以使用具有高截止频率和频率响应中的逐渐滚降的低通滤波器来优化输出或解调信号增加带宽的条件或更快的响应和更多的线性组延迟。

3. 发明授权

US5978091A Laser-bump sensor method and apparatus 失效
标题翻译：激光碰撞传感器的方法和装置
公开(公告)号：US5978091A
公开(公告)日：1999-11-02
申请号：US105695
申请日：1998-06-26
申请人： Peter C. Jann , Marco A. Krumbuegel , Reginald Lee , Ming M. Yang
发明人： Peter C. Jann , Marco A. Krumbuegel , Reginald Lee , Ming M. Yang
IPC分类号： G01B11/02 , G11B5/82 , G11B5/84 , G11B33/10 , G01B11/24 , G01B11/30 , G01N21/00 , G01N21/88
CPC分类号： G01B11/02 , G11B5/82 , G11B5/8404 , G11B5/8408 , G11B33/10
摘要： An apparatus for measuring the height and diameter of laser-zone texture bumps on a rigid magnetic disk substrate is disclosed. The apparatus has a disk holder for supporting and rotating the substrate, and an optical beam-source assembly for directing a focused laser beam on the substrate, and for shifting the position of the beam's illumination spot on the substrate in a tracking (radial) direction. An optical detection assembly in the apparatus measures the deflection of the laser beam due to specular reflection of the beam by laser-zone texture bumps, as a function of time, in both scanning (circumferential) and tracking directions. A computational device in the apparatus functions to (i) calculate scanning and tracking deflection values which characterize beam deflections in the scanning and tracking directions, respectively, for a texture bump passing through the illumination spot produced by the beam on the substrate, (ii) select for bump-height analysis, those texture bumps whose scanning deflection values are above a selected threshold value and whose tracking deflection values are below a selected threshold value, indicative of a condition in which the selected textured bumps are each in focus and centered within said illumination spot, and (iii) determine the texture bump heights and diameters of the selected bumps from the beam deflections in the scanning direction. Also disclosed is a method by which the apparatus measures the light power which is scattered by the of laser-zone texture bumps on a rigid magnetic disk substrate.
摘要翻译：公开了一种用于测量刚性磁盘基板上的激光区纹理凸块的高度和直径的装置。该装置具有用于支撑和旋转衬底的盘保持器，以及用于将聚焦的激光束引导到衬底上的光束组件，以及用于沿跟踪（径向）方向移动光束照射点在衬底上的位置。该装置中的光学检测组件通过激光区域纹理凸起作为时间的函数，在扫描（周向）和跟踪方向两者中，由于光束的镜面反射而测量激光束的偏转。该装置中的计算装置用于（i）分别计算扫描和跟踪偏转值，该偏移值表示扫描和跟踪方向上的光束偏转，其中纹理凸块通过由衬底上的光束产生的照明点，（ii）选择凸起高度分析，其扫描偏转值高于所选择的阈值并且其跟踪偏转值低于所选择的阈值的那些纹理凸块，其指示所选择的纹理凸块各自处于焦点并且位于所述中心位置的状态照明点，以及（iii）从扫描方向上的光束偏转确定所选择的凸起的纹理凸起高度和直径。还公开了一种方法，其通过该装置测量由刚性磁盘基板上的激光区域纹理凸块散射的光功率。

4. 发明授权

US5719840A Optical sensor with an elliptical illumination spot 失效
标题翻译：具有椭圆形照明点的光学传感器
公开(公告)号：US5719840A
公开(公告)日：1998-02-17
申请号：US777490
申请日：1996-12-30
申请人： Peter C. Jann
发明人： Peter C. Jann
IPC分类号： G11B7/0037 , G11B7/135 , G11B7/00
CPC分类号： G11B7/1398 , G11B7/00375 , G11B7/1378
摘要： An optical sensor which provides a focused elliptical illumination spot. The instrument includes a light source which provides a light beam that is directed through a cylindrical lens. The cylindrical lens focuses the light beam normally on a disk surface as an elliptical illumination spot with a major axis along a tracking direction and a minor axis along a scanning direction. Light scattered by the disk is then detected by a detector and processed to detect defects on the disk surface.
摘要翻译：提供聚焦椭圆照明光点的光学传感器。该仪器包括一个光源，该光源提供通过柱面透镜引导的光束。圆柱透镜将光束通常沿着沿着跟踪方向的长轴和沿着扫描方向的短轴的椭圆照明点作为椭圆照明点聚焦在盘表面上。然后通过检测器检测由盘散射的光，并进行处理以检测盘表面上的缺陷。

5. 发明申请

US20070165504A1 Surface inspection by amplitude modulated specular light detection 有权
标题翻译：通过幅度调制镜面光检测进行表面检测
公开(公告)号：US20070165504A1
公开(公告)日：2007-07-19
申请号：US11654438
申请日：2007-01-17
申请人： Peter C. Jann , Wafaa Abdalla
发明人： Peter C. Jann , Wafaa Abdalla
IPC分类号： G11B7/00
CPC分类号： G11B7/268 , G01B11/306 , G11B5/4555 , G11B7/00375 , G11B20/1816
摘要： An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. The first light beam portion illuminates the surface of the disk and produces a reflected light beam. An acoustic-optic deflector deflects the reflected light beam and the second light beam portion producing a deflected output beam having a deflection angle. A detector detects an incident beam translation signal corresponding to reflected light beam angular deflection and acoustic-optic deflector beam angular deflection from the deflected output beam.
摘要翻译：用于检测盘表面上的缺陷的装置包括产生光束的光源和将光束分成第一光束部分和第二光束部分的分束器。第一光束部分照射盘的表面并产生反射光束。声光偏转器使反射的光束和第二光束部分偏转，产生具有偏转角的偏转的输出光束。检测器检测对应于来自偏转的输出光束的反射光束角偏转和声光偏转器光束角度偏转的入射光束平移信号。

6. 发明授权

US06881312B2 Ultra high throughput microfluidic analytical systems and methods 有权
公开(公告)号：US06881312B2
公开(公告)日：2005-04-19
申请号：US10319045
申请日：2002-12-13
申请人： Anne R. Kopf-Sill , Andrea W. Chow , Peter C. Jann , Morten J. Jensen , Michael Spaid , Colin B. Kennedy , Michael J. Kennedy
发明人： Anne R. Kopf-Sill , Andrea W. Chow , Peter C. Jann , Morten J. Jensen , Michael Spaid , Colin B. Kennedy , Michael J. Kennedy
IPC分类号： B01L3/00 , B01L7/00 , B01L9/00 , G01N21/05 , G01N21/64 , G01N27/447 , G01N35/00 , G01N37/00 , G01N27/26
CPC分类号： G01N21/6452 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00621 , B01J2219/00628 , B01J2219/0063 , B01J2219/00659 , B01J2219/00707 , B01L3/5025 , B01L3/5027 , B01L3/502715 , B01L3/50273 , B01L7/54 , B01L9/527 , B01L2200/023 , B01L2200/027 , B01L2200/028 , B01L2200/147 , B01L2300/0654 , B01L2300/0816 , B01L2300/0829 , B01L2300/0867 , B01L2300/1822 , B01L2400/0406 , B01L2400/0415 , B01L2400/0487 , G01N21/05 , G01N21/6428 , G01N21/645 , G01N27/44721 , G01N27/44782 , G01N35/0099 , G01N2021/0346 , G01N2021/6419 , G01N2021/6421
摘要： Analytical systems and methods that use a modular interface structure for providing an interface between a sample substrate and an analytical unit, where the analytical unit typically has a particular interface arrangement for implementing various analytical and control functions. Using a number of variants for each module of the modular interface structure advantageously provides cost effective and efficient ways to perform numerous tests using a particular substrate or class of substrates with a particular analytical and control systems interface arrangement. Improved optical illumination and detection system for simultaneously analyzing reactions or conditions in multiple parallel microchannels are also provided. Increased throughput and improved emissions detection is provided by the present invention by simultaneously illuminating multiple parallel microchannels at a non-normal incidence using an excitation beam including multiple excitation frequencies, and simultaneously detecting emissions from the substances in the microchannels in a direction normal to the substrate using a detection module with multiple detectors.

7. 发明授权

US06547941B2 Ultra high throughput microfluidic analytical systems and methods 有权
公开(公告)号：US06547941B2
公开(公告)日：2003-04-15
申请号：US09920090
申请日：2001-07-31
申请人： Anne R. Kopf-Sill , Andrea W. Chow , Peter C. Jann , Morten J. Jensen , Michael Spaid , Colin B. Kennedy , Michael J. Kennedy
发明人： Anne R. Kopf-Sill , Andrea W. Chow , Peter C. Jann , Morten J. Jensen , Michael Spaid , Colin B. Kennedy , Michael J. Kennedy
IPC分类号： G01N2726
CPC分类号： G01N21/6452 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00621 , B01J2219/00628 , B01J2219/0063 , B01J2219/00659 , B01J2219/00707 , B01L3/5025 , B01L3/5027 , B01L3/502715 , B01L3/50273 , B01L7/54 , B01L9/527 , B01L2200/023 , B01L2200/027 , B01L2200/028 , B01L2200/147 , B01L2300/0654 , B01L2300/0816 , B01L2300/0829 , B01L2300/0867 , B01L2300/1822 , B01L2400/0406 , B01L2400/0415 , B01L2400/0487 , G01N21/05 , G01N21/6428 , G01N21/645 , G01N27/44721 , G01N27/44782 , G01N35/0099 , G01N2021/0346 , G01N2021/6419 , G01N2021/6421
摘要： Analytical systems and methods that use a modular interface structure for providing an interface between a sample substrate and an analytical unit, where the analytical unit typically has a particular interface arrangement for implementing various analytical and control functions. Using a number of variants for each module of the modular interface structure advantageously provides cost effective and efficient ways to perform numerous tests using a particular substrate or class of substrates with a particular analytical and control systems interface arrangement. Improved optical illumination and detection system for simultaneously analyzing reactions or conditions in multiple parallel microchannels are also provided. Increased throughput and improved emissions detection is provided by the present invention by simultaneously illuminating multiple parallel microchannels at a non-normal incidence using an excitation beam including multiple excitation frequencies, and simultaneously detecting emissions from the substances in the microchannels in a direction normal to the substrate using a detection module with multiple detectors.

8. 发明授权

US06358387B1 Ultra high throughput microfluidic analytical systems and methods 有权
标题翻译：超高通量微流体分析系统和方法
公开(公告)号：US06358387B1
公开(公告)日：2002-03-19
申请号：US09536274
申请日：2000-03-27
申请人： Anne R. Kopf-Sill , Andrea W. Chow , Peter C. Jann , Morten J. Jensen , Michael Spaid , Colin B. Kennedy , Michael J. Kennedy
发明人： Anne R. Kopf-Sill , Andrea W. Chow , Peter C. Jann , Morten J. Jensen , Michael Spaid , Colin B. Kennedy , Michael J. Kennedy
IPC分类号： C02F140
CPC分类号： G01N21/6452 , B01J2219/00605 , B01J2219/0061 , B01J2219/00612 , B01J2219/00621 , B01J2219/00628 , B01J2219/0063 , B01J2219/00659 , B01J2219/00707 , B01L3/5025 , B01L3/5027 , B01L3/502715 , B01L3/50273 , B01L7/54 , B01L9/527 , B01L2200/023 , B01L2200/027 , B01L2200/028 , B01L2200/147 , B01L2300/0654 , B01L2300/0816 , B01L2300/0829 , B01L2300/0867 , B01L2300/1822 , B01L2400/0406 , B01L2400/0415 , B01L2400/0487 , G01N21/05 , G01N21/6428 , G01N21/645 , G01N27/44721 , G01N27/44782 , G01N35/0099 , G01N2021/0346 , G01N2021/6419 , G01N2021/6421
摘要： Analytical systems and methods that use a modular interface structure for providing an interface between a sample substrate and an analytical unit, where the analytical unit typically has a particular interface arrangement for implementing various analytical and control functions. Using a number of variants for each module of the modular interface structure advantageously provides cost effective and efficient ways to perform numerous tests using a particular substrate or class of substrates with a particular analytical and control systems interface arrangement. Improved optical illumination and detection system for simultaneously analyzing reactions or conditions in multiple parallel microchannels are also provided. Increased throughput and improved emissions detection is provided by the present invention by simultaneously illuminating multiple parallel microchannels at a non-normal incidence using an excitation beam including multiple excitation frequencies, and simultaneously detecting emissions from the substances in the microchannels in a direction normal to the substrate using a detection module with multiple detectors.
摘要翻译：分析系统和方法使用模块化接口结构来提供样品基底和分析单元之间的界面，其中分析单元通常具有用于实现各种分析和控制功能的特定界面布置。使用模块化接口结构的每个模块的许多变体有利地提供了使用具有特定分析和控制系统接口布置的特定基板或类别的基板执行大量测试的成本有效和有效的方式。还提供了用于同时分析多个并行微通道中的反应或条件的改进的光学照明和检测系统。通过使用包括多个激发频率的激发束同时照射非法线入射的多个平行微通道并且同时在垂直于衬底的方向上检测来自微通道中的物质的发射，本发明提供了增加的吞吐量和改进的排放物检测使用具有多个检测器的检测模块。

9. 发明授权

US07554670B2 Surface inspection by double pass laser doppler vibrometry 有权
标题翻译：双面激光多普勒振动波表面检查
公开(公告)号：US07554670B2
公开(公告)日：2009-06-30
申请号：US11654929
申请日：2007-01-17
申请人： Peter C. Jann , Wafaa Abdalla
发明人： Peter C. Jann , Wafaa Abdalla
IPC分类号： G01B9/02
CPC分类号： G01B11/306 , G01N21/45 , G01N21/95
摘要： A double pass apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. A modulator is provided that modulates the second light beam portion into a frequency shifted modulated light beam for illuminating the surface of the disk. The frequency shifted modulated light beam is twice reflected from the surface of the disk, thus doubling the frequency shift of the reflected light beam. A polarizing beamsplitter combines the first light beam portion with the reflected light beam portion providing an interference signal.
摘要翻译：用于检测盘表面上的缺陷的双通道装置包括产生光束的光源和将光束分成第一光束部分和第二光束部分的分束器。提供一种调制器，其将第二光束部分调制成用于照亮盘的表面的频移调制光束。频移调制光束从盘的表面反射两次，从而使反射光束的频移倍增。偏振分束器将第一光束部分与提供干涉信号的反射光束部分相结合。

10. 发明申请

US20070165239A1 Surface inspection by double pass laser doppler vibrometry 有权
标题翻译：双面激光多普勒振动波表面检查
公开(公告)号：US20070165239A1
公开(公告)日：2007-07-19
申请号：US11654929
申请日：2007-01-17
申请人： Peter C. Jann , Wafaa Abdalla
发明人： Peter C. Jann , Wafaa Abdalla
IPC分类号： G01B9/02
CPC分类号： G01B11/306 , G01N21/45 , G01N21/95
摘要： A double pass apparatus for detecting defects on a disk surface includes a light source that generates a light beam and a beamsplitter that splits the light beam into a first light beam portion and a second light beam portion. A modulator is provided that modulates the second light beam portion into a frequency shifted modulated light beam for illuminating the surface of the disk. The frequency shifted modulated light beam is twice reflected from the surface of the disk, thus doubling the frequency shift of the reflected light beam. A polarizing beamsplitter combines the first light beam portion with the reflected light beam portion providing an interference signal.
摘要翻译：用于检测盘表面上的缺陷的双通道装置包括产生光束的光源和将光束分成第一光束部分和第二光束部分的分束器。提供一种调制器，其将第二光束部分调制成用于照亮盘的表面的频移调制光束。频移调制光束从盘的表面反射两次，从而使反射光束的频移倍增。偏振分束器将第一光束部分与提供干涉信号的反射光束部分相结合。

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