专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07872239B2 Electrostatic lens assembly 有权
标题翻译：静电透镜组件
公开(公告)号：US07872239B2
公开(公告)日：2011-01-18
申请号：US12181171
申请日：2008-07-28
申请人： Pavel Adamec , Carlo Salvesen , Ivo Liska
发明人： Pavel Adamec , Carlo Salvesen , Ivo Liska
IPC分类号： H01J37/28 , H01J37/244 , G01R31/305
CPC分类号： H01J37/12 , H01J37/145 , H01J2237/032 , H01J2237/038 , H01J2237/121 , H01J2237/1405 , H01J2237/28
摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
摘要翻译：提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

2. 发明授权

US07928405B2 Magnetic lens assembly 有权
标题翻译：磁性透镜组件
公开(公告)号：US07928405B2
公开(公告)日：2011-04-19
申请号：US12181199
申请日：2008-07-28
申请人： Pavel Adamec , Carlo Salvesen , Ivo Liska
发明人： Pavel Adamec , Carlo Salvesen , Ivo Liska
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/1405 , Y10T29/4902
摘要： A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.
摘要翻译：提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

3. 发明授权

US08164067B2 Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimen 有权
标题翻译：用于检查样本的带电粒子束装置的对比度改善的布置和方法
公开(公告)号：US08164067B2
公开(公告)日：2012-04-24
申请号：US12701463
申请日：2010-02-05
申请人： Pavel Adamec , Helmut Banzhof , Ivo Liska
发明人： Pavel Adamec , Helmut Banzhof , Ivo Liska
IPC分类号： G01N23/22 , G01N23/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2446
摘要： It is provided a charged particle beam device for inspecting a specimen, comprising a charged particle beam source adapted to generate a primary charged particle beam; an objective lens device adapted to direct the primary charged particle beam onto the specimen; and a detector device comprising one or more charged particle detectors adapted to detect a secondary charged particle beam generated by the primary charged particle beam at the specimen and passing through the objective lens device, the secondary charged particle beam comprising a first group of secondary charged particles starting from the specimen with high starting angles and a second group of secondary charged particles starting from the specimen with low starting angles; wherein at least one of the charged particle detectors is adapted to detect depending on the starting angles one group of the first and the second groups of secondary charged particles.
摘要翻译：提供了一种用于检查样本的带电粒子束装置，包括适于产生初级带电粒子束的带电粒子束源; 适于将初级带电粒子束引导到样本上的物镜装置; 以及检测器装置，其包括一个或多个带电粒子检测器，其适于检测在所述样本处由所述初级带电粒子束产生的并通过所述物镜装置的次级带电粒子束，所述次级带电粒子束包括第一组次级带电粒子从具有较高起始角度的样品开始，第二组二次带电粒子从起始角低的样品开始; 其中所述带电粒子检测器中的至少一个适于根据起始角度检测一组第一和第二组次级带电粒子。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式