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    • 5. 发明授权
    • Electron microscopy coating apparatus and methods
    • 电子显微镜涂层装置及方法
    • US4096055A
    • 1978-06-20
    • US755356
    • 1976-12-29
    • Andrew G. Johnson
    • Andrew G. Johnson
    • C23C14/32C23C14/35C23C14/50C23C15/00
    • C23C14/32C23C14/35C23C14/505
    • An electron microscopy coating apparatus and coating methods incorporate a specimen mounting arrangement which is used both for coating specimens which are to be viewed by scanning electron microscopy (SEM) and for coating specimens which are to be viewed by transmitted electron microscopy (TEM) and for coating specimens for the recently developed scanning-transmitted electron microscopy (STEM).The coating apparatus and method includes a hood and a mixer disc for coating by cold cathode sputtering and can also be used (with arc type electrodes in place of the hood and mixer disc) for coating by either charged ion evaporation or straight film evaporation.A biasing direct current provides a differential charge for cold cathode sputtering and charged ion evaporation.For charged ion evaporation the negative lead of the direct current is connected to one electrode of the evaporator and the positive lead of the direct current is connected to the base to provide a differential charge (a negative charge on the evaporated ion and a positive charge on the specimen) to attract the evaporated ions to the specimen.
    • 电子显微镜涂布装置和涂布方法包括样品安装装置,其用于通过扫描电子显微镜(SEM)观察的涂层样品和用于通过透射电子显微镜(TEM)观察的涂层样品,以及用于 最近开发的扫描透射电子显微镜(STEM)的涂层样品。