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1. 发明申请

US20060189282A1 Transmitter 有权
标题翻译：发射机
公开(公告)号：US20060189282A1
公开(公告)日：2006-08-24
申请号：US10532338
申请日：2003-10-20
申请人： Norio Hasegawa , Tetsuhiko Miyatani , Hisashi Kawai , Masami Yoshida , Jun Watanabe
发明人： Norio Hasegawa , Tetsuhiko Miyatani , Hisashi Kawai , Masami Yoshida , Jun Watanabe
IPC分类号： H04B1/04 , H01Q11/12
CPC分类号： H04L27/2614
摘要： A transmitter for averagedly suppressing the variation in input level of an amplifier according to variation in carrier level. The transmitter comprises an input power calculation section (16) for calculating mean input power of each carrier, an output power calculating section (17) for calculating mean output power of each carrier after the carrier band is limited, a monitoring section (18) for identifying a carrier having the maximum mean input power, acquiring the maximum value, acquiring the mean output power of the identified carrier, determining the ratio of the mean input power to the mean output power, and calculating level control information which is the ratio of the ratio determined above to a predetermined expected value, and a signal level adjusting section (15) for adjusting the level of a multicarrier signal by multiplying the level control information outputted from the monitoring section (18).
摘要翻译：一种发射机，用于根据载波电平的变化平均地抑制放大器输入电平的变化。发射机包括用于计算每个载波的平均输入功率的输入功率计算部分（16），用于在载波频带被限制之后计算每个载波的平均输出功率的输出功率计算部分（17），用于识别具有最大平均输入功率的载波，获取最大值，获取所识别的载波的平均输出功率，确定平均输入功率与平均输出功率的比率，以及计算作为平均输入功率的比率的电平控制信息以及用于通过乘以从监视部分（18）输出的电平控制信息来调整多载波信号的电平的信号电平调节部分（15）。

2. 发明授权

US07489907B2 Transmitter for suppressing a variation in input level of a multicarrier signal 有权
标题翻译：用于抑制多载波信号的输入电平变化的发射器
公开(公告)号：US07489907B2
公开(公告)日：2009-02-10
申请号：US10532338
申请日：2003-10-20
申请人： Norio Hasegawa , Tetsuhiko Miyatani , Hisashi Kawai , Masami Yoshida , Jun Watanabe
发明人： Norio Hasegawa , Tetsuhiko Miyatani , Hisashi Kawai , Masami Yoshida , Jun Watanabe
IPC分类号： H04B1/00 , H04B7/00
CPC分类号： H04L27/2614
摘要： A transmitter for averagedly suppressing the variation in input level of an amplifier according to variation in carrier level. The transmitter includes an input power calculation section for calculating mean input power of each carrier, an output power calculating section for calculating mean output power of each carrier after the carrier band is limited, a monitoring section for identifying a carrier having the maximum mean input power, acquiring the maximum value, acquiring the mean output power of the identified carrier, determining the ratio of the mean input power to the mean output power, and calculating level control information which is the ratio of the ratio determined above to a predetermined expected value, and a signal level adjusting section for adjusting the level of a multicarrier signal by multiplying the level control information outputted from the monitoring section.
摘要翻译：一种发射机，用于根据载波电平的变化平均地抑制放大器输入电平的变化。发送机包括用于计算每个载波的平均输入功率的输入功率计算部分，用于在载波频带被限制之后计算每个载波的平均输出功率的输出功率计算部分，用于识别具有最大平均输入功率的载波的监视部分获取所述最大值，获取所识别的载波的平均输出功率，确定所述平均输入功率与所述平均输出功率的比率，以及计算作为上述确定的比率与预定期望值的比率的电平控制信息，以及信号电平调整部分，用于通过将从监视部分输出的电平控制信息相乘来调节多载波信号的电平。

3. 发明申请

US20050063485A1 Transmitter 有权
标题翻译：发射机
公开(公告)号：US20050063485A1
公开(公告)日：2005-03-24
申请号：US10940956
申请日：2004-09-15
申请人： Norio Hasegawa , Tetsuhiko Miyatani , Yoshihiko Akaiwa
发明人： Norio Hasegawa , Tetsuhiko Miyatani , Yoshihiko Akaiwa
IPC分类号： H04B1/04 , H04J13/00 , H04K1/02 , H04L27/26 , H04L27/36
CPC分类号： H04B1/707 , H04B2201/70706 , H04L27/2614
摘要： A transmitter that effectively suppresses the peak level of transmit signals is equipped with peak reduction signal generating means that generates a peak reduction signal having a level based on a transmit signal level threshold for determining a peak of the transmit signal and on a transmit signal peak level and having a phase based on the phase of the transmit signal, peak reduction signal processing means that subjects the peak reduction signal to band restriction and orthogonal modulation, and transmit signal level suppressing means that subtracts the peak reduction signal subjected to band restriction and orthogonal modulation from the transmit signal.
摘要翻译：有效地抑制发射信号的峰值电平的发射机配备有峰值降低信号发生装置，其产生具有基于发射信号电平阈值的电平的峰值降低信号，用于确定发射信号的峰值和发射信号峰值电平并且具有基于发送信号的相位的相位，使峰值降低信号进行频带限制和正交调制的峰值降低信号处理装置，以及减去经受带限制和正交调制的峰值降低信号的发送信号电平抑制装置从发送信号。

4. 发明授权

US07529316B2 Transmitter 有权
标题翻译：发射机
公开(公告)号：US07529316B2
公开(公告)日：2009-05-05
申请号：US10940956
申请日：2004-09-15
申请人： Norio Hasegawa , Tetsuhiko Miyatani , Yoshihiko Akaiwa
发明人： Norio Hasegawa , Tetsuhiko Miyatani , Yoshihiko Akaiwa
IPC分类号： H04K1/02
CPC分类号： H04B1/707 , H04B2201/70706 , H04L27/2614
摘要： A transmitter, that effectively suppresses a peak level of transmit signals, equipped with a peak reduction signal generating means that generates a peak reduction signal. A level of the peak reduction signal is based on a transmit signal level threshold for determining a peak of the transmit signal, and is based on a transmit signal peak level. Further, a phase of the peak reduction signal is based on the phase of the transmit signal. The transmitter is also equipped with a peak reduction signal processing means that subjects the peak reduction signal to band restriction and orthogonal modulation, and is equipped with a transmit signal level suppressing means that subtracts the peak reduction signal subjected to band restriction and orthogonal modulation from the transmit signal.
摘要翻译：发射机，其有效地抑制发射信号的峰值电平，其配备有产生峰值降低信号的峰值降低信号发生装置。峰值降低信号的电平基于用于确定发射信号的峰值的发射信号电平阈值，并且基于发射信号峰值电平。此外，峰值降低信号的相位基于发送信号的相位。发射机还配备有峰值降低信号处理装置，其使峰值降低信号进行频带限制和正交调制，并且配备有发送信号电平抑制装置，其从经过频带限制和正交调制的峰值减少信号中减去发送信号。

5. 发明授权

US08085870B2 Transmitter 有权
标题翻译：发射机
公开(公告)号：US08085870B2
公开(公告)日：2011-12-27
申请号：US12309140
申请日：2007-03-20
申请人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
发明人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
IPC分类号： H04L25/49
CPC分类号： H04B1/707 , H04B2201/70706
摘要： A transmitter suppresses peak power occurring in a transmission signal. The transmitter generates peak suppression signals for suppressing the peak power in the transmission signal respectively, synthesizes the peak suppression signals generated, and subtracts a signal as a synthesis result from the transmission signal.
摘要翻译：发射机抑制发射信号中发生的峰值功率。发射机分别产生用于抑制发送信号中的峰值功率的峰值抑制信号，合成产生的峰值抑制信号，并从发送信号中减去作为合成结果的信号。

6. 发明授权

US07974581B2 Transmitter 有权
标题翻译：发射机
公开(公告)号：US07974581B2
公开(公告)日：2011-07-05
申请号：US12068926
申请日：2008-02-13
申请人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
发明人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
IPC分类号： H04B1/68
CPC分类号： H04B1/707 , H04B2201/70706 , H04L27/2624
摘要： A transmitter suppresses a peak level of a multi-carrier signal produced by synthesizing a plurality of carrier signals. Specifically, a peak level suppression signal for a multi-carrier signal is generated. The generated peak level suppression signal is adjusted in accordance with the levels of respective carriers constituting the multi-carrier signal. And, the adjusted peak level suppression signal for each carrier is subtracted from an input signal, thereby generating a multi-carrier signal whose peak level is suppressed.
摘要翻译：发射机抑制通过合成多个载波信号而产生的多载波信号的峰值电平。具体地，产生用于多载波信号的峰值电平抑制信号。所生成的峰值电平抑制信号根据构成多载波信号的各个载波的电平进行调整。并且，从输入信号中减去每个载波的调整峰值电平抑制信号，从而产生其峰值电平被抑制的多载波信号。

7. 发明申请

US20090245414A1 Transmitter 有权
标题翻译：发射机
公开(公告)号：US20090245414A1
公开(公告)日：2009-10-01
申请号：US12309140
申请日：2007-03-20
申请人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
发明人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
IPC分类号： H04L27/00
CPC分类号： H04B1/707 , H04B2201/70706
摘要： A transmitter, which may suppress peak power in a transmission signal, effectively suppresses peak power occurring in a transmission signal. In a transmitter that may suppress peak power in a transmission signal, a plurality of peak-suppression-signal generating means generate peak suppression signals for suppressing the peak power in the transmission signal respectively, peak-suppression-signal synthesizing means synthesizes peak suppression signals generated by the plurality of peak-suppression-signal generating means, and subtraction means subtracts a signal as a synthesis result given by the peak-suppression-signal synthesizing means from the transmission signal.
摘要翻译：可以抑制发送信号中的峰值功率的发送器有效地抑制发送信号中发生的峰值功率。在可抑制发送信号的峰值功率的发送机中，多个峰值抑制信号生成单元分别产生用于抑制发送信号的峰值功率的峰值抑制信号，峰值抑制信号合成单元合成产生的峰值抑制信号并且减法装置从发送信号中减去由峰值抑制信号合成装置给出的合成结果的信号。

8. 发明申请

US20080200126A1 Transmitter 有权
标题翻译：发射机
公开(公告)号：US20080200126A1
公开(公告)日：2008-08-21
申请号：US12068926
申请日：2008-02-13
申请人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
发明人： Takashi Okada , Jun Watanabe , Takahiro Todate , Norio Hasegawa
IPC分类号： H04B1/68
CPC分类号： H04B1/707 , H04B2201/70706 , H04L27/2624
摘要： In a transmitter that suppresses the peak level of a multi-carrier signal produced by synthesizing a plurality of carrier signals, high signal quality is maintained for any transmission signal pattern, for example. In a peak power suppression means shown in the drawings, suppression signal generation means 7 to 18 generate a peak level suppression signal having a level according to levels of respective carrier signals for frequencies of the respective carrier signals contained in the multi-carrier signal. Suppression signal subtraction means 19, 20 subtract, from the multi-carrier signal, the peak level suppression signal generated by the suppression signal generation means 7 to 18.
摘要翻译：例如，在抑制通过合成多个载波信号而产生的多载波信号的峰值电平的发射机中，保持对于任何传输信号模式的高信号质量。在图中所示的峰值功率抑制装置中，抑制信号产生装置7至18产生具有针对包含在多载波信号中的各个载波信号的频率的各载波信号电平的电平的峰值电平抑制信号。抑制信号减法装置19,20从多载波信号中减去由抑制信号产生装置7至18产生的峰值电平抑制信号。

9. 发明授权

US09297649B2 Pattern dimension measurement method and charged particle beam apparatus 有权
标题翻译：图案尺寸测量方法和带电粒子束装置
公开(公告)号：US09297649B2
公开(公告)日：2016-03-29
申请号：US14001433
申请日：2011-12-12
申请人： Hiroki Kawada , Norio Hasegawa , Toru Ikegami
发明人： Hiroki Kawada , Norio Hasegawa , Toru Ikegami
IPC分类号： G01B15/06 , G01N23/225 , H01J37/28 , H01J37/22 , G01N23/00 , H01J37/244
CPC分类号： G01B15/06 , G01N23/00 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/24578 , H01J2237/2816 , H01J2237/2817
摘要： The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus.In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.
摘要翻译：本发明的目的在于提供一种图形尺寸测量方法，用于精确测量收缩的图案的收缩量和收缩前的原始尺寸值以及带电粒子束装置。为了实现上述目的，提出了一种图案尺寸测量方法和带电粒子束装置，其特征在于：在对包含图案的样品进行束扫描之后，在包含该图案的样品上形成薄膜至第一部分模式; 通过将光束扫描到与其上形成有薄膜的第一部分对应的区域来获取第一测量值; 通过将光束扫描到与设计数据上的第一部分具有相同尺寸的第二部分上来获取第二测量值; 并且基于从第二测量值减去第一测量值的减法处理来找出图案的收缩量。

10. 发明授权

US08671366B2 Estimating shape based on comparison between actual waveform and library in lithography process 有权
标题翻译：基于光刻过程中实际波形与库之间的比较估算形状
公开(公告)号：US08671366B2
公开(公告)日：2014-03-11
申请号：US13390354
申请日：2010-07-15
申请人： Maki Tanaka , Norio Hasegawa , Chie Shishido , Mayuka Osaki
发明人： Maki Tanaka , Norio Hasegawa , Chie Shishido , Mayuka Osaki
IPC分类号： G06F17/50
CPC分类号： G01B15/04 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The present invention aims at proposing a library creation method and a pattern shape estimation method in which it is possible, when estimating a shape based on comparison between an actual waveform and a library, to appropriately estimate the shape.As an illustrative embodiment to achieve the object, there are proposed a method of selecting a pattern by referring to a library, a method of creating a library by use of pattern cross-sectional shapes calculated through an exposure process simulation in advance, and a method for selecting a pattern shape stored in the library.
摘要翻译：本发明旨在提出一种库创建方法和图案形状估计方法，其中当基于实际波形和库之间的比较来估计形状时，可以适当地估计形状。作为实现该目的的说明性实施例，提出了通过参照库来选择图案的方法，通过使用预先通过曝光处理模拟计算的图案横截面形状来创建库的方法，以及方法用于选择存储在库中的图案形状。

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