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1. 发明授权

US08920596B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US08920596B2
公开(公告)日：2014-12-30
申请号：US12862915
申请日：2010-08-25
申请人： Naoki Mihara , Naoki Matsumoto , Jun Yoshikawa , Kazuo Murakami
发明人： Naoki Mihara , Naoki Matsumoto , Jun Yoshikawa , Kazuo Murakami
IPC分类号： H01L21/3065 , H01J37/32
CPC分类号： H01J37/32192 , C23C16/513 , H01J37/3244 , H01J37/32449
摘要： In a plasma processing apparatus for processing a substrate by plasmatizing a process gas introduced into a processing container, an introducing unit which introduces the process gas is formed on a ceiling surface of the processing container; a gas retention portion which gathers the process gas supplied from the outside of the processing container through a supply passage, and a plurality of gas ejection holes which allow communication between the gas retention portion and the inside of the processing container are formed in the introducing unit; a gas ejection hole is not formed in a location of the gas retention portion that faces an opening of the supply passage; and a cross section of each of the gas ejection holes has a flat shape.
摘要翻译：在通过对引入到处理容器中的处理气体进行等离子体处理衬底的等离子体处理装置中，在处理容器的顶表面上形成引入处理气体的引入单元; 气体保持部，其通过供给通路收集从处理容器的外部供给的处理气体，并且在导入单元中形成有能够使气体保持部与处理容器内部连通的多个气体喷出孔 ; 在气体保持部的与供给通道的开口相对的位置处不形成气体喷出孔; 并且每个气体喷射孔的横截面具有扁平形状。

2. 发明申请

US20110308733A1 PLASMA PROCESSING APPARATUS AND GAS SUPPLY MEMBER SUPPORT DEVICE 有权
标题翻译：等离子体处理装置和气体供应部件支持装置
公开(公告)号：US20110308733A1
公开(公告)日：2011-12-22
申请号：US13115289
申请日：2011-05-25
申请人： Naoki Mihara , Kenji Sudou , Kazuo Murakami , Satoshi Furukawa
发明人： Naoki Mihara , Kenji Sudou , Kazuo Murakami , Satoshi Furukawa
IPC分类号： C23F1/08 , H05H1/24
CPC分类号： H01J37/3244 , H01J37/32449 , H01J37/32807
摘要： There is provided a plasma processing apparatus capable of performing a plasma process while surely supplying a gas. The plasma processing apparatus includes an outer gas supply member having gas supply openings for supplying a plasma processing gas and a jacket configured to support the outer gas supply member within a processing chamber and serving as a gas supply member supporting device. The jacket includes three supporting members installed so as to connect the outer gas supply member and a sidewall and arranged at a certain distance in a direction in which the outer gas supply member extends and mounts fixed to the sidewall so as to mount the supporting members therein. The supporting members include a first supporting member fixed to a first mount and a second supporting member movably supported in a second mount.
摘要翻译：提供了能够在确保供给气体的同时进行等离子体处理的等离子体处理装置。等离子体处理装置包括外部气体供给构件，其具有用于供给等离子体处理气体的气体供给开口和构造成在处理室内支撑外部气体供给构件并用作气体供给构件支撑装置的护套。夹套包括三个支撑构件，其安装成连接外部气体供给构件和侧壁，并且在外部气体供给构件延伸并安装固定到侧壁的方向上以一定距离布置，以便将支撑构件安装在其中。支撑构件包括固定到第一安装件的第一支撑构件和可移动地支撑在第二安装件中的第二支撑构件。

3. 发明授权

US08663424B2 Plasma processing apparatus and gas supply member support device 有权
标题翻译：等离子体处理装置和气体供应构件支撑装置
公开(公告)号：US08663424B2
公开(公告)日：2014-03-04
申请号：US13115289
申请日：2011-05-25
申请人： Naoki Mihara , Kenji Sudou , Kazuo Murakami , Satoshi Furukawa
发明人： Naoki Mihara , Kenji Sudou , Kazuo Murakami , Satoshi Furukawa
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01J37/3244 , H01J37/32449 , H01J37/32807
摘要： There is provided a plasma processing apparatus capable of performing a plasma process while surely supplying a gas. The plasma processing apparatus includes an outer gas supply member having gas supply openings for supplying a plasma processing gas and a jacket configured to support the outer gas supply member within a processing chamber and serving as a gas supply member supporting device. The jacket includes three supporting members installed so as to connect the outer gas supply member and a sidewall and arranged at a certain distance in a direction in which the outer gas supply member extends and mounts fixed to the sidewall so as to mount the supporting members therein. The supporting members include a first supporting member fixed to a first mount and a second supporting member movably supported in a second mount.
摘要翻译：提供了能够在确保供给气体的同时进行等离子体处理的等离子体处理装置。等离子体处理装置包括外部气体供给构件，其具有用于供给等离子体处理气体的气体供给开口和构造成在处理室内支撑外部气体供给构件并用作气体供给构件支撑装置的护套。夹套包括三个支撑构件，其安装成连接外部气体供给构件和侧壁，并且在外部气体供给构件延伸并安装固定到侧壁的方向上以一定距离布置，以便将支撑构件安装在其中。支撑构件包括固定到第一安装件的第一支撑构件和可移动地支撑在第二安装件中的第二支撑构件。

4. 发明申请

US20140242299A1 CORROSION INHIBITOR INJECTING METHOD 有权
标题翻译：腐蚀抑制剂注射方法
公开(公告)号：US20140242299A1
公开(公告)日：2014-08-28
申请号：US14345148
申请日：2012-09-13
申请人： Masato Okamura , Tetsuo Oosato , Kazuo Murakami , Seiji Yamamoto , Hiroyuki Arai , Hidehiro Urata , Hajime Hirasawa , Osamu Shibasaki , Koji Negishi
发明人： Masato Okamura , Tetsuo Oosato , Kazuo Murakami , Seiji Yamamoto , Hiroyuki Arai , Hidehiro Urata , Hajime Hirasawa , Osamu Shibasaki , Koji Negishi
IPC分类号： C23F11/08 , C23F11/18
CPC分类号： C23F11/08 , C23F11/18 , C23F11/185 , C23F15/00 , G21C17/0225 , G21D3/08 , Y02E30/40
摘要： A method for injecting a corrosion inhibitor injecting an oxidant and an anticorrosive agent-pH adjusting agent complex including an anticorrosive agent and a pH adjusting agent adsorbed on a surface of the anticorrosive agent into high temperature water in contact with a surface of a metal structural material and irradiating the high temperature water with a radioactive ray or an ultraviolet ray, wherein the anticorrosive agent of the anticorrosive agent-pH adjusting agent complex has, on the surface of the anticorrosive agent, an active site where the pH adjusting agent reacts with the oxidant, and the pH adjusting agent present on the surface of the anticorrosive agent of the anticorrosive agent-pH adjusting agent complex and/or in the high temperature water is oxidized with the oxidant by the irradiation with the radioactive ray or the ultraviolet ray to change pH adjusting ability of the pH adjusting agent and shift a pH of the high temperature water to a neutral side, and thereby deposition of the anticorrosive agent 11 to the metal structural material 65 is accelerated.
摘要翻译：一种将注入氧化剂的腐蚀抑制剂和防腐蚀剂 - pH调节剂复合物的方法，所述防腐蚀剂 - pH调节剂复合物包括吸附在防腐剂表面上的耐腐蚀剂和pH调节剂，所述抗腐蚀剂和pH调节剂与金属结构材料表面接触的高温水中并用放射线或紫外线照射高温水，其中防腐剂 - pH调节剂复合物的防腐剂在防腐剂的表面上具有pH调节剂与氧化剂反应的活性位点，并且在抗腐蚀剂 - pH调节剂配合物的防腐剂的表面上和/或在高温水中存在的pH调节剂用氧化剂通过用放射线或紫外线照射而被氧化以改变pH 调节pH调节剂的能力并将高温水的pH值转移到中性侧，从而进行加速了防锈剂11向金属结构材料65的沉积。

5. 发明授权

US08757989B2 Motor-driven compressor 有权
标题翻译：电动压缩机
公开(公告)号：US08757989B2
公开(公告)日：2014-06-24
申请号：US12547759
申请日：2009-08-26
申请人： Kazuo Murakami
发明人： Kazuo Murakami
IPC分类号： F04B35/04
CPC分类号： F04C23/008 , F04C18/0215 , F04C29/0085 , F04C2240/803 , F04C2240/808 , H02K5/225 , H02K11/33
摘要： A motor-driven compressor includes a compression mechanism for compressing refrigerant, an electric motor for driving the compression mechanism, an inverter for controlling the operation of the electric motor, and a motor harness for electrically connecting the electric motor to the inverter. The compression mechanism and the electric motor are mechanically connected each other. The electric motor has first and second coil ends. The first coil end is located on the side of the compression mechanism and the inverter is located on the side of the second coil end. The motor harness is led out from the first coil end.
摘要翻译：电动压缩机包括用于压缩制冷剂的压缩机构，用于驱动压缩机构的电动机，用于控制电动机的操作的逆变器和用于将电动机电连接到逆变器的电动机线束。压缩机构和电动机彼此机械连接。电动机具有第一和第二线圈端部。第一线圈端位于压缩机构的一侧，并且逆变器位于第二线圈端的一侧。电动机线束从第一个线圈端引出。

6. 发明授权

US08162626B2 Motor-driven compressor 有权
标题翻译：电动压缩机
公开(公告)号：US08162626B2
公开(公告)日：2012-04-24
申请号：US12333982
申请日：2008-12-12
申请人： Hiroshi Fukasaku , Tatsushi Mori , Kazuo Murakami , Masao Iguchi , Masahiro Kawaguchi , Ken Suitou
发明人： Hiroshi Fukasaku , Tatsushi Mori , Kazuo Murakami , Masao Iguchi , Masahiro Kawaguchi , Ken Suitou
IPC分类号： F04B17/00 , F04B35/04
CPC分类号： H02K5/10 , F04C18/0215 , F04C23/008 , F04C27/00 , H02K5/12 , H02K7/14 , H02K11/33
摘要： A motor-driven compressor has a compression mechanism, a rotary shaft, an electric motor, a motor drive circuit, a connecting terminal and a housing assembly. The compression mechanism, the electric motor, and the motor drive circuit are disposed along the axial direction of the rotary shaft in the housing assembly having first through third housings. The first housing is used for mounting the electric motor and the compression mechanism. The second housing has a terminal mounting portion for fixing the connecting terminal. The first and second housings have fastening portions at the radially peripheral portion thereof. The third housing is joined to the second housing to form an accommodation space for accommodating the motor drive circuit. The closed casing is formed by fastening the fastening portions of the first and second housings by means of a first bolt and connecting the second housing to the open end of the first housing.
摘要翻译：电动压缩机具有压缩机构，旋转轴，电动马达，马达驱动电路，连接端子和壳体组件。压缩机构，电动马达和马达驱动电路沿着具有第一至第三壳体的壳体组件中的旋转轴的轴向设置。第一壳体用于安装电动机和压缩机构。第二壳体具有用于固定连接端子的端子安装部。第一和第二壳体在其径向周向部分处具有紧固部分。第三壳体连接到第二壳体以形成用于容纳马达驱动电路的容置空间。封闭的壳体通过借助于第一螺栓紧固第一和第二壳体的紧固部分并将第二壳体连接到第一壳体的开口端而形成。

7. 发明申请

US20110054171A1 PROCESS FOR PRODUCTION OF OPTICALLY ACTIVE AMINES 审中-公开
标题翻译：生产光活性胺的方法
公开(公告)号：US20110054171A1
公开(公告)日：2011-03-03
申请号：US12863146
申请日：2009-01-14
申请人： Erick M. Carreira , Shoji Fukuyo , Hiroshi Kadono , Kazuo Murakami
发明人： Erick M. Carreira , Shoji Fukuyo , Hiroshi Kadono , Kazuo Murakami
IPC分类号： C07D237/34
CPC分类号： C07F9/650947 , C07B57/00
摘要： Salts of optically active [4-(2-diphenylphosphanylnaphthalen-1-yl)phthalazin-1-yl]-(1-phenylethyl)amines represented by the formulas (1) to (4) with an optically active organic sulfonic acid, and a production method thereof.
摘要翻译：由式（1）〜（4）表示的光学活性的[4-（2-二苯基膦基萘-1-基）二氮杂萘-1-基] - （1-苯基乙基）胺与光学活性的有机磺酸的盐，生产方法。

8. 发明申请

US20110016345A1 SEMICONDUCTOR DEVICE AND DATA PROCESSOR 有权
标题翻译：半导体器件和数据处理器
公开(公告)号：US20110016345A1
公开(公告)日：2011-01-20
申请号：US12889607
申请日：2010-09-24
申请人： Toru Hayashi , Motoo Suwa , Kazuo Murakami
发明人： Toru Hayashi , Motoo Suwa , Kazuo Murakami
IPC分类号： G06F1/04 , G06F1/06
CPC分类号： H05K1/181 , H01L2224/48091 , H01L2224/48227 , H01L2924/15311 , H01L2924/181 , H05K1/0237 , H05K1/0298 , H05K2201/09254 , H05K2201/10159 , Y02P70/611 , H01L2924/00014 , H01L2924/00012
摘要： Synchronization between command and address signals commonly coupled to a plurality of memory devices to be operated in parallel and a clock signal coupled to the memory devices is achieved, while suppressing an increase in the clock wiring length. A semiconductor device has a data processing device mounted on a wiring substrate and a plurality of memory devices accessed in parallel by the data processing device. The data processing device outputs the command and address signals as a first frequency from command and address terminals, and outputs a clock signal as a second frequency from a clock terminal. The second frequency is set to multiple times of the first frequency, and an output timing equal to or earlier than a cycle starting phase of the clock signal output from the clock terminal can be selected to the command and address signals output from the command and address terminals.
摘要翻译：在抑制时钟布线长度的增加的同时，实现了共同耦合到要并行操作的多个存储器件的命令和地址信号与耦合到存储器件的时钟信号之间的同步。半导体器件具有安装在布线基板上的数据处理装置和由数据处理装置并行访问的多个存储器件。数据处理装置从命令和地址端子输出作为第一频率的命令和地址信号，并从时钟端子输出作为第二频率的时钟信号。第二频率被设置为第一频率的多倍，并且可以选择等于或早于从时钟端子输出的时钟信号的周期开始相位的输出定时到从命令和地址输出的命令和地址信号终端。

9. 发明申请

US20090155101A1 MOTOR-DRIVEN COMPRESSOR 有权
标题翻译：电机驱动压缩机
公开(公告)号：US20090155101A1
公开(公告)日：2009-06-18
申请号：US12333982
申请日：2008-12-12
申请人： Hiroshi Fukasaku , Tatsushi Mori , Kazuo Murakami , Masao Iguchi , Masahiro Kawaguchi , Ken Suitou
发明人： Hiroshi Fukasaku , Tatsushi Mori , Kazuo Murakami , Masao Iguchi , Masahiro Kawaguchi , Ken Suitou
IPC分类号： F04B35/04
CPC分类号： H02K5/10 , F04C18/0215 , F04C23/008 , F04C27/00 , H02K5/12 , H02K7/14 , H02K11/33
摘要： A motor-driven compressor has a compression mechanism, a rotary shaft, an electric motor, a motor drive circuit, a connecting terminal and a housing assembly. The compression mechanism, the electric motor, and the motor drive circuit are disposed along the axial direction of the rotary shaft in the housing assembly having first through third housings. The first housing is used for mounting the electric motor and the compression mechanism. The second housing has a terminal mounting portion for fixing the connecting terminal. The first and second housings have fastening portions at the radially peripheral portion thereof. The third housing is joined to the second housing to form an accommodation space for accommodating the motor drive circuit. The closed casing is formed by fastening the fastening portions of the first and second housings by means of a first bolt and connecting the second housing to the open end of the first housing.
摘要翻译：电动压缩机具有压缩机构，旋转轴，电动马达，马达驱动电路，连接端子和壳体组件。压缩机构，电动马达和马达驱动电路沿着具有第一至第三壳体的壳体组件中的旋转轴的轴向设置。第一壳体用于安装电动机和压缩机构。第二壳体具有用于固定连接端子的端子安装部。第一和第二壳体在其径向周向部分处具有紧固部分。第三壳体连接到第二壳体以形成用于容纳马达驱动电路的容置空间。封闭的壳体通过借助于第一螺栓紧固第一和第二壳体的紧固部分并将第二壳体连接到第一壳体的开口端而形成。

10. 发明申请

US20090041594A1 VARIABLE DISPLACEMENT TYPE GEAR PUMP 审中-公开
标题翻译：可变位移型齿轮泵
公开(公告)号：US20090041594A1
公开(公告)日：2009-02-12
申请号：US12186792
申请日：2008-08-06
申请人： Hironao Yokoi , Shigeru Suzuki , Katsumi Yamashita , Toshiro Fujii , Masaki Ota , Kazuo Murakami
发明人： Hironao Yokoi , Shigeru Suzuki , Katsumi Yamashita , Toshiro Fujii , Masaki Ota , Kazuo Murakami
IPC分类号： F04B49/24 , F04C2/14
CPC分类号： F04C2/14 , F04C11/001 , F04C14/065
摘要： In a variable displacement type gear pump, each of a main gear pump portion and a sub gear pump portion has a drive gear, a driven gear engaging with the drive gear, and an urging portion applying radial load to the drive and driven gears. A bypass passage returns fluid in a discharge-side space of the sub gear pump portion to a suction passage. An opening and closing valve opens the bypass passage in a small displacement operational state. A drive shaft supports the main drive gear and the sub drive gear. A driven shaft supports the main driven gear and the sub driven gear. The drive gears and the driven gears are rotated in accordance with a rotation of the drive shaft. The drive and driven shafts transmit the radial load in the main gear pump portion to the sub gear pump portion in the small displacement operational state.
摘要翻译：在可变排量型齿轮泵中，主齿轮泵部分和副齿轮泵部分中的每一个具有驱动齿轮，与驱动齿轮啮合的从动齿轮和向驱动齿轮和从动齿轮施加径向载荷的推动部分。旁通通路将副齿轮泵部的排出侧空间的流体返回到吸入通路。打开和关闭阀在小排量操作状态下打开旁通通道。驱动轴支撑主驱动齿轮和副驱动齿轮。从动轴支撑主从动齿轮和副从动齿轮。驱动齿轮和从动齿轮根据驱动轴的旋转而旋转。驱动轴和从动轴在小排量操作状态下将主齿轮泵部分中的径向载荷传递到副齿轮泵部分。

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