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    • 2. 发明申请
    • METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE
    • 制造有机EL器件的方法和装置
    • US20150104564A1
    • 2015-04-16
    • US14382461
    • 2013-03-07
    • NITTO DENKO CORPORATION
    • Ryohei KakiuchiSatoru Yamamoto
    • H05B33/10H01L51/56C23C14/06C23C14/04C23C14/22
    • H05B33/10C23C14/042C23C14/06C23C14/22C23C14/50C23C14/562H01L51/0011H01L51/56
    • The invention allows evaporation materials discharged from evaporation sources to deposit on a substrate with a desired pattern, while eliminating the need for the conventional strip-shaped shadow mask, and enables correction of the effects due to the substrate being displaced during conveyance. In the apparatus for manufacturing an organic EL device, a first drive section rotates a roller at a specific rotational speed, thereby conveying the substrate that is in contact with the roller. This apparatus performs deposition of evaporation materials discharged from evaporation sources on the substrate with such conveyance. In this apparatus, a shielding section is driven by a second drive section so as to pivot around an axis of the roller at a specific pivot speed, thereby shielding and unshielding the substrate. The second drive section changes the pivot speed of the shielding section so that it is different from the rotational speed of the roller.
    • 本发明允许从蒸发源排出的蒸发材料以期望的图案沉积在基板上,而不需要传统的带状荫罩,并且能够校正由于基板在输送过程中移动而产生的影响。 在有机EL器件的制造装置中,第一驱动部以特定的转速旋转辊,从而输送与辊接触的基板。 该装置通过这种输送将从蒸发源排放的蒸发材料沉积在基板上。 在该装置中,屏蔽部由第二驱动部驱动,以便以特定的转速绕轴的轴线转动,从而屏蔽和非屏蔽基板。 第二驱动部分改变屏蔽部分的转动速度,使其不同于辊的旋转速度。
    • 3. 发明申请
    • METHOD AND APPARATUS FOR MAUFACTURING ORGANIC EL DEVICE
    • 用于制造有机EL器件的方法和装置
    • US20140186985A1
    • 2014-07-03
    • US14235353
    • 2012-10-17
    • NITTO DENKO CORPORATION
    • Ryohei KakiuchiSatoru YamamotoKanako Hida
    • H01L51/56
    • H01L51/56B65H23/32B65H2301/5114C23C14/12C23C14/562H01L51/0008
    • Provided is a method and an apparatus for manufacturing an organic EL device which make it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed over a substrate in the form of a strip by deposition, while the substrate is being moved in the longitudinal direction, includes: a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in an upward deposition unit and a lateral deposition unit provided along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes an upward deposition step, a laterally deposition step, and a direction changing step.
    • 提供一种制造有机EL器件的方法和装置,其可以制造能够抑制质量劣化的有机EL器件。 有机EL元件的制造方法,其中有机EL元件的构成层在基板沿长度方向移动的同时通过沉积形成在带状形式的基板上,包括:构成层形成 在基板沿纵向移动的同时,在沿着基板的移动方向设置的向上沉积单元和横向沉积单元中顺序地在基板的一个表面上进行沉积的步骤,通过从蒸发源排出蒸发的材料 。 构成层形成步骤包括向上沉积步骤,横向沉积步骤和方向改变步骤。
    • 4. 发明申请
    • METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE
    • 制造有机EL器件的方法和装置
    • US20140134762A1
    • 2014-05-15
    • US14115778
    • 2012-12-10
    • NITTO DENKO CORPORATION
    • Ryohei KakiuchiSatoru YamamotoKanako Hida
    • H01L33/00
    • H01L33/005C23C14/042C23C14/562H01L51/001H01L51/56
    • Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portion is configured to be switchable between a shield position where the shielding portion is arranged between an evaporation source and a substrate so as to shield the substrate and a shield release position where the shielding portion is withdrawn from between the evaporation source and the substrate so as to release the shielding of the substrate. The shielding portion is moved in a transportation direction at the same speed as the substrate when the shielding portion is located at the shield position, whereas the shielding portion is moved in a direction opposite to the transportation direction when the shielding portion is located at the shield release position.
    • 提供一种用于制造有机EL器件的方法和装置,其能够以期望的图案将蒸发的材料沉积到衬底上,同时不需要常规的带状阴影掩模。 屏蔽部分被配置为可以在遮蔽部分​​布置在蒸发源和基板之间的屏蔽位置之间切换以屏蔽基板和遮蔽部分从蒸发源和基板之间撤出的屏蔽释放位置 以便释放衬底的屏蔽。 当屏蔽部位于屏蔽位置时,屏蔽部分以与衬底相同的速度在传输方向上移动,而当屏蔽部分位于屏蔽位置时,屏蔽部分沿与输送方向相反的方向移动 释放位置。
    • 10. 发明申请
    • METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENCE DEVICE
    • 用于生产有机电致发光器件的方法
    • US20150357605A1
    • 2015-12-10
    • US14760555
    • 2014-03-11
    • NITTO DENKO CORPORATION
    • Yoshinori OsakiSatoru YamamotoYusuke KomotoMasatsugu Soga
    • H01L51/56H01L51/52
    • H01L51/56B65H23/1825B65H23/185B65H2513/11B65H2515/31H01L51/5253B65H2220/01B65H2220/02
    • A method for producing an organic electroluminescence device using a roll-to-roll method includes the step of sticking a belt-shaped sealing substrate 5 transported while being applied with tension on a belt-shaped supporting substrate 21 on which an organic electroluminescence element is formed, wherein either one substrate of the supporting substrate 21 or the sealing substrate 5 has a tensile modulus of elasticity larger than that of another substrate, in the step, the sticking is performed in the middle of transporting the belt-shaped supporting substrate 21 in the long-side direction while being applied with tension, and in the step, the substrate having a smaller tensile modulus of elasticity is applied with tension less than or equal to 170 N/m and the substrate having a larger tensile modulus of elasticity is applied with tension greater than the tension applied to the substrate having a smaller tensile modulus of elasticity.
    • 使用卷对卷方法制造有机电致发光器件的方法包括将被施加张力的带状密封基板5粘贴在其上形成有机电致发光元件的带状支撑基板21上的步骤 其中,支撑基板21的一个基板或密封基板5的拉伸弹性模量大于另一个基板的弹性模量,在该步骤中,在将带状支撑基板21输送到 长边方向施加张力,并且在该步骤中,以小于或等于170N / m的张力施加具有较小拉伸弹性模量的基材,并且将具有较大拉伸弹性模量的基材施加于 张力大于施加到具有较小拉伸弹性模量的基底的张力。