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1. 发明授权

US06738506B2 Image processing system for multi-beam inspection 有权
标题翻译：多光束检测图像处理系统
公开(公告)号：US06738506B2
公开(公告)日：2004-05-18
申请号：US10125054
申请日：2002-04-17
申请人： S. Daniel Miller , N. William Parker , Steven B. Hobmann
发明人： S. Daniel Miller , N. William Parker , Steven B. Hobmann
IPC分类号： G06K900
CPC分类号： G06T7/001 , G06T2207/30148
摘要： An image processing system for use in semiconductor wafer inspection comprises a multiplicity of self-contained image processors for independently performing image cross-correlation and defect detection. The system may also comprise an image normalization engine for performing image brightness and contrast normalization. The self-contained image processors and image normalization engine access image data from a memory array; the array is fed data from a multiplicity of imaging modules operating in parallel. The memory array is configured to allow simultaneous access for data input, normalization, and cross-correlation and defect detection. Multiple image processing systems can be configured in parallel as a single image processing computer, all sending defect data to a common display module.
摘要翻译：用于半导体晶片检查的图像处理系统包括用于独立执行图像互相关和缺陷检测的多个自包含图像处理器。该系统还可以包括用于执行图像亮度和对比度归一化的图像归一化引擎。独立的图像处理器和图像归一化引擎从存储器阵列访问图像数据; 该阵列从并行操作的多个成像模块馈送数据。存储器阵列被配置为允许同时访问数据输入，归一化和互相关和缺陷检测。多个图像处理系统可以并行配置为单个图像处理计算机，全部将缺陷数据发送到公共显示模块。

2. 发明授权

US06734428B2 Multi-beam multi-column electron beam inspection system 有权
标题翻译：多光束多列电子束检测系统
公开(公告)号：US06734428B2
公开(公告)日：2004-05-11
申请号：US10222759
申请日：2002-08-15
申请人： N. William Parker , S. Daniel Miller
发明人： N. William Parker , S. Daniel Miller
IPC分类号： G01N2300
CPC分类号： G21K1/087 , G21K5/10 , H01J37/04 , H01J37/28 , H01J2237/04924 , H01J2237/2817
摘要： An electron optics assembly for a multi-column electron beam inspection tool comprises a single accelerator structure and a single focus electrode mounting plate for all columns; the other electron optical components are one per column and are independently alignable. The accelerator structure comprises first and final accelerator electrodes with a set of accelerator plates in between; the first and final accelerator plates have an aperture for each column and the accelerator plates have a single aperture such that the electron optical axes for all columns pass through the single aperture. Independently alignable focus electrodes are attached to the focus electrode mounting plate, allowing each electrode to be aligned to the electron optical axis of its corresponding column. There is one electron gun per column, mounted on the top of the single accelerator structure. In other embodiments, the electron guns are mounted to a single gun mounting plate positioned above the accelerator structure.
摘要翻译：用于多列电子束检查工具的电子光学组件包括用于所有柱的单个加速器结构和单个聚焦电极安装板; 其他电子光学元件是每列一个，并且可独立对准。加速器结构包括在其间具有一组加速器板的第一和最终加速器电极; 第一和最终的加速器板具有用于每一列的孔，并且加速板具有单个孔，使得所有列的电子光轴通过单个孔。独立地对准的聚焦电极附着到聚焦电极安装板上，允许每个电极与其相应列的电子光轴对准。每列有一个电子枪，安装在单个加速器结构的顶部。在其他实施例中，电子枪安装到位于加速器结构上方的单个枪安装板。

3. 发明授权

US07456402B2 Detector optics for multiple electron beam test system 有权
标题翻译：用于多电子束测试系统的检测器光学器件
公开(公告)号：US07456402B2
公开(公告)日：2008-11-25
申请号：US11355256
申请日：2006-02-14
申请人： N. William Parker , S. Daniel Miller
发明人： N. William Parker , S. Daniel Miller
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J9/42 , H01J37/256 , H01J37/28 , H01J2237/24495 , H01J2237/24592 , H01J2237/2485 , H01J2237/2817
摘要： A detector optics system for collecting secondary electrons (SEs) and/or backscattered electrons (BSEs) in a multiple charged particle beam test system is disclosed. Aspects of the detector optics system include: the ability to image and/or electrically test a number of locations simultaneously across the full width of a large substrate with high throughput and uniform collection efficiency while avoiding crosstalk between signals generated by neighboring beams. In one embodiment, a linear array of N electron beams causes SEs to be emitted from the substrate, which are then collected by one or more linear arrays of ≧2N detectors. Each linear array is connected to a signal combiner circuit which dynamically determines which detectors are collecting SEs generated by each electron beam as it scans across the substrate surface and then combines the signals from these detectors to form N simultaneous output signals (one per charged particle beam) for each detector array.
摘要翻译：公开了一种用于在多重带电粒子束测试系统中收集二次电子（SE）和/或反向散射电子（BSE）的检测器光学系统。检测器光学系统的方面包括：在具有高吞吐量和均匀采集效率的同时在大型衬底的整个宽度上同时跨多个位置进行成像和/或电测试的能力，同时避免由相邻光束产生的信号之间的串扰。在一个实施例中，N个电子束的线性阵列导致从衬底发射SE，然后由一个或多个≥2N个检测器的线性阵列收集。每个线性阵列连接到信号组合器电路，其在动态地确定哪些检测器正在收集由每个电子束产生的SE，因为它扫描基板表面，然后组合来自这些检测器的信号以形成N个同时输出信号（每个带电粒子束一个）。

4. 发明授权

US06872958B2 Platform positioning system 失效
标题翻译：平台定位系统
公开(公告)号：US06872958B2
公开(公告)日：2005-03-29
申请号：US10059048
申请日：2002-01-28
申请人： Gerry B. Andeen , Martin E. Lee , N. William Parker , S. Daniel Miller
发明人： Gerry B. Andeen , Martin E. Lee , N. William Parker , S. Daniel Miller
IPC分类号： F16D3/56 , G01Q10/00 , G01Q20/00 , G01Q30/16 , G03F7/20 , H01J37/20 , H01L21/00 , H01L21/027 , H01L21/68 , F16B1/00
CPC分类号： G03F7/70716 , G03F7/70841 , G03F7/709 , H01J37/20 , H01L21/67259 , H01L21/682 , Y10T403/45
摘要： A system for precisely positioning and moving a platform relative to a support structure is disclosed herein. The platform is particularly suitable for carrying wafers. Charged particle optics can be attached to the support structure. The platform positioning system comprises a stage, comprising a base, a platform and stage actuators, the stage actuators being coupled to the platform and the platform being coupled to the base; a frame attached to the base; a support structure mechanically coupled to the frame; stage sensors attached to the support structure, for sensing the position of the platform relative to the support structure; and a current control system coupled to the stage sensors and the stage actuators. The current control system may include a predictor for generating an ouptut signal anticipating the actual position of the platform relative to the support structure in real time.
摘要翻译：本文公开了一种用于相对于支撑结构精确地定位和移动平台的系统。该平台特别适用于承载晶圆。带电粒子光学元件可以附着在支撑结构上。该平台定位系统包括一个台，包括基座，平台和平台致动器，平台致动器联接到平台并且平台联接到基座; 一个连接到基座的框架; 机架地连接到所述框架的支撑结构; 附接到支撑结构的级传感器，用于感测平台相对于支撑结构的位置; 以及耦合到载物台传感器和载物台致动器的电流控制系统。当前控制系统可以包括用于生成预测平台相对于支撑结构的实际位置的实时发射信号的预测器。

5. 发明授权

US07941237B2 Flat panel display substrate testing system 有权
标题翻译：平板显示基板测试系统
公开(公告)号：US07941237B2
公开(公告)日：2011-05-10
申请号：US10589097
申请日：2006-04-19
申请人： N. William Parker , S. Daniel Miller , Tirunelveli S. Ravi
发明人： N. William Parker , S. Daniel Miller , Tirunelveli S. Ravi
IPC分类号： G06F19/00
CPC分类号： G02F1/1309 , G01R31/2808 , G01R31/305 , G01R31/312
摘要： A flat panel display substrate (FPDS) testing system configured such that prior to testing, the FPDS is loaded into a pallet to prevent breakage, and to provide electrical connections to test pads on the FPDS. The system achieves high throughput by testing FPDSs using one or more charged particle beams simultaneously with the following operations: unloading of already-tested substrates, loading of substrates ready for testing, assembly of pallets, and alignment of electrical contactors to a large number of FPDS test pads. The system design eliminates a prior art X-Y stage, and all moving electrical connections to the FPDS during testing, reducing costs and improving reliability. In one embodiment, the FPDS testing system has three subsystems: a process chamber, loadlock assembly, and pallet elevator; in another embodiment, the functions of loadlock and pallet elevator are combined to reduce system footprint.
摘要翻译：平板显示器基板（FPDS）测试系统被配置为使得在测试之前，将FPDS加载到托盘中以防止断裂，并提供与FPDS上的测试焊盘的电连接。该系统通过以下操作同时测试使用一个或多个带电粒子束的FPDS来实现高吞吐量：已经测试的基板的卸载，准备进行测试的基板的装载，托盘的组装以及电接触器对大量FPDS的对准测试垫。该系统设计消除了现有技术的X-Y平台，以及在测试过程中与FPDS的所有移动电气连接，降低了成本并提高了可靠性。在一个实施例中，FPDS测试系统具有三个子系统：处理室，负载锁组件和托盘电梯; 在另一个实施例中，组合负载锁和托盘升降机的功能以减少系统占用空间。

6. 发明申请

US20080232939A1 Flat Panel Display Substrate Testing System 有权
标题翻译：平板显示基板测试系统
公开(公告)号：US20080232939A1
公开(公告)日：2008-09-25
申请号：US10589097
申请日：2006-04-19
申请人： N. William Parker , S. Daniel Miller , Tiruneveli S. Ravi
发明人： N. William Parker , S. Daniel Miller , Tiruneveli S. Ravi
IPC分类号： H01L21/67
CPC分类号： G02F1/1309 , G01R31/2808 , G01R31/305 , G01R31/312
摘要： A flat panel display substrate (FPDS) testing system configured such that prior to testing, the FPDS is loaded into a pallet to prevent breakage, and to provide electrical connections to test pads on the FPDS. The system achieves high throughput by testing FPDSs using one or more charged particle beams simultaneously with the following operations: unloading of already-tested substrates, loading of substrates ready for testing, assembly of pallets, and alignment of electrical contactors to a large number of FPDS test pads. The system design eliminates a prior art X-Y stage, and all moving electrical connections to the FPDS during testing, reducing costs and improving reliability. In one embodiment, the FPDS testing system has three subsystems: a process chamber, loadlock assembly, and pallet elevator; in another embodiment, the functions of loadlock and pallet elevator are combined to reduce system footprint.
摘要翻译：平板显示器基板（FPDS）测试系统被配置为使得在测试之前，将FPDS加载到托盘中以防止断裂，并提供与FPDS上的测试焊盘的电连接。该系统通过以下操作同时测试使用一个或多个带电粒子束的FPDS来实现高吞吐量：已经测试的基板的卸载，准备进行测试的基板的装载，托盘的组装以及电接触器对大量FPDS的对准测试垫。该系统设计消除了现有技术的X-Y平台，以及在测试过程中与FPDS的所有移动电气连接，降低了成本并提高了可靠性。在一个实施例中，FPDS测试系统具有三个子系统：处理室，负载锁组件和托盘电梯; 在另一个实施例中，组合负载锁和托盘升降机的功能以减少系统占用空间。

7. 发明授权

US06943351B2 Multi-column charged particle optics assembly 失效
公开(公告)号：US06943351B2
公开(公告)日：2005-09-13
申请号：US10842849
申请日：2004-05-10
申请人： N. William Parker , S. Daniel Miller , Victor A. Galande
发明人： N. William Parker , S. Daniel Miller , Victor A. Galande
IPC分类号： G01N23/00 , G01Q20/02 , G01Q30/02 , G21K5/10 , G21K7/00 , H01J37/065 , H01J37/08 , H01J37/30
CPC分类号： H01J37/065 , H01J37/32862 , H01J2237/0635 , H01J2237/1501 , H01J2237/2817
摘要： A multi-column charged particle optics assembly comprises: a first optical component which is continuous through all columns of the charged particle optics assembly; and a multiplicity of independently alignable second optical components coupled to the first optical component, such that there is one second component for each column in the charged particles optics assembly. The first component provides mechanical integrity to the charged particle optics assembly and each second optical component is independently alignable to the optic axis of its corresponding column. In a further embodiment, the charged particle optics assembly comprises: first and second continuous optical components; and a multiplicity of independently alignable electrodes coupled to the second optical component, such that there is a corresponding independently alignable electrode for each column.

8. 发明授权

US08928210B2 System for attachment of an electrode into an inductively coupled plasma source 有权
公开(公告)号：US08928210B2
公开(公告)日：2015-01-06
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
IPC分类号： H01J1/02
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

9. 发明授权

US08759764B2 On-axis detector for charged particle beam system 有权
标题翻译：用于带电粒子束系统的轴上探测器
公开(公告)号：US08759764B2
公开(公告)日：2014-06-24
申请号：US13538851
申请日：2012-06-29
申请人： Anthony Graupera , N. William Parker , Mark W. Utlaut
发明人： Anthony Graupera , N. William Parker , Mark W. Utlaut
IPC分类号： H01J37/256
CPC分类号： H01J37/256 , H01J37/244 , H01J37/28 , H01J2237/2448
摘要： A split grid multi-channel secondary particle detector for a charged particle beam system includes a first grid segment and a second grid segment, each having independent bias voltages creating an electric field such that the on-axis secondary particles that are emitted from the target are directed to one of the grids. The bias voltages of the grids can be changed or reversed so that each grid can be used to detect the secondary particles and the multi-channel particle detector as a whole can extend its lifetime.
摘要翻译：用于带电粒子束系统的分裂网格多通道二次粒子检测器包括第一栅格区段和第二栅极区段，每个区段具有独立的偏置电压，从而产生电场，使得从靶发射的轴上二次颗粒为指向其中一个网格。网格的偏置电压可以改变或反转，以便每个网格可以用于检测次级粒子，并且多通道粒子检测器作为一个整体可以延长其寿命。

10. 发明授权

US07462848B2 Optics for generation of high current density patterned charged particle beams 失效
标题翻译：用于产生高电流密度图案化带电粒子束的光学
公开(公告)号：US07462848B2
公开(公告)日：2008-12-09
申请号：US10962049
申请日：2004-10-07
申请人： N. William Parker
发明人： N. William Parker
IPC分类号： H01J1/50
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/043 , H01J2237/1534
摘要： A direct-write electron beam lithography system employing a patterned beam-defining aperture to enable the generation of high current-density shaped beams without the need for multiple beam-shaping apertures, lenses and deflectors is disclosed. Beam blanking is accomplished without the need for an intermediate crossover between the electron source and the wafer being patterned by means of a double-deflection blanker, which also facilitates proximity effect correction. A simple type of “moving lens” is utilized to eliminate off-axis aberrations in the shaped beam. A method for designing the patterned beam-defining aperture is also disclosed.
摘要翻译：公开了一种使用图案化的光束限定孔径以便能够产生高电流密度成形光束而不需要多个光束成形孔，透镜和偏转器的直写式电子束光刻系统。实现光束消隐，而不需要通过双偏转消隐器对电子源和晶片进行图案化之间的中间交叉，这也有助于邻近效应校正。使用简单类型的“移动透镜”来消除成形光束中的离轴像差。还公开了一种用于设计图案化光束限定孔的方法。

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