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    • 2. 发明申请
    • VERTICAL STRUCTURE LED DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 垂直结构LED器件及其制造方法
    • US20100200867A1
    • 2010-08-12
    • US12767324
    • 2010-04-26
    • Myong Soo CHOKi Yeol PARKSang Yeob SONGSi Hyuk LEEPun Jae CHOI
    • Myong Soo CHOKi Yeol PARKSang Yeob SONGSi Hyuk LEEPun Jae CHOI
    • H01L33/30
    • H01L33/0079
    • A method of manufacturing a vertical structure light emitting diode device, the method including: sequentially forming a first conductivity type III-V group compound semiconductor layer, an active layer, and a second conductivity type III-V group compound semiconductor layer on a substrate for growth; bonding a conductive substrate to the second conductivity type III-V group compound semiconductor layer; removing the substrate for growth from the first conductivity type III-V group compound semiconductor layer; and forming an electrode on an exposed portion of the first conductive III-V group compound semiconductor layer due to the removing the substrate for growth, wherein the bonding a conductive substrate comprises partially heating a metal bonding layer by applying microwaves to a bonding interface while bringing the metal bonding layer into contact with the bonding interface.
    • 一种制造垂直结构发光二极管装置的方法,所述方法包括:在基板上依次形成第一导电型III-V族化合物半导体层,有源层和第二导电型III-V族化合物半导体层 成长 将导电基板键合到第二导电型III-V族化合物半导体层; 从第一导电型III-V族化合物半导体层去除用于生长的衬底; 以及由于去除所述用于生长的衬底而在所述第一导电III-V族化合物半导体层的暴露部分上形成电极,其中所述接合导电衬底包括通过向接合界面施加微波而部分地加热金属接合层,同时带来 金属接合层与接合界面接触。