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    • 10. 发明申请
    • Piezoelectirc device
    • 压电元件
    • US20060192462A1
    • 2006-08-31
    • US10564220
    • 2005-06-17
    • Takashi IwamotoYoshihiro Koshido
    • Takashi IwamotoYoshihiro Koshido
    • H01L41/053
    • H03H9/059H01L2224/16225H01L2924/16235H01L2924/181H03H9/1092H01L2924/00012
    • A piezoelectric device includes an element substrate having a piezoelectric element and an electrically conductive pattern connected to the piezoelectric element, a supporting layer arranged within the periphery of the piezoelectric element, a cover extending so as to provide a groove inside the external periphery of the element substrate, the groove ranging over the entire external periphery of the element substrate by removing a portion of the cover and/or supporting layer inside the external periphery of the element substrate after the cover is arranged on the supporting layer, an insulating reinforcing material that entirely covers portions of the element substrate ranging from the cover to the periphery of a principal surface of the element substrate, and an electrically conductive member electrically connected to the electrically conductive pattern so as to pass through the cover and the reinforcing material.
    • 一种压电装置,包括具有压电元件的元件基板和连接到压电元件的导电图案,配置在压电元件的周围的支撑层,延伸以在元件的外周内提供凹槽的盖 基板,通过在将盖布置在支撑层上之后,通过移除元件基板的外周中的盖和/或支撑层的一部分,覆盖元件基板的整个外周上的凹槽,完全 覆盖从元件基板的主表面的盖到周边的元件基板的部分,以及电连接到导电图案以便穿过盖和增强材料的导电构件。