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    • 3. 发明授权
    • High resolution scanning magnetic microscope operable at high temperature
    • 高分辨率扫描磁显微镜在高温下可操作
    • US06930479B2
    • 2005-08-16
    • US10493841
    • 2003-03-07
    • Gang XiaoBenaiah D. Schrag
    • Gang XiaoBenaiah D. Schrag
    • G01R33/09G01N27/72G01N27/82G01Q30/04G01Q60/50G01Q60/54G01R33/038H01L21/66H01L43/02H01L43/04H01L43/06H01L43/08G01N27/00
    • G01Q60/50G01N27/82G01Q30/04G01Q60/54G01R33/0385
    • A scanning magnetic microscope (SMM) (20) includes a current source (27) for imposing an excitation current to a conductor-under-test (CUT) (70) and, if applicable, a reference current to a proximally located reference conductor (72). During accelerated testing, the SMM (20) corrects thermal drift of the CUT (70) via the reference conductor (72). A sensor (21) may be cooled by a heat sink (31) such as a pump (33) directing an airstream or a coldfinger (80). The sensor may switch from a contact to a non-contact mode of scanning the CUT (70). The SMM (20) and methods are useful for measuring electromigration in a CUT (70) as it occurs, for assembling the images into time lapsed representations such as a shape of the CUT (70), for measuring electromigration as a function of a cross sectional area of a wire under a dielectric material (DM) (78), for determining electrical parameters of the CUT (70), and for optimizing a thickness of a DM (78) over a CUT (70). The SMM (20) and methods are further useful for measuring morphological changes in a CUT (70) due to other stressing conditions, such as temperature, excitation current, physical stress(es), hostile environment, aging, semiconductor “burn-in”, or irradiation.
    • 扫描磁显微镜(SMM)(20)包括用于向被测导体(CUT)(70)施加激励电流的电流源(27),以及如果适用的话,向近端定位的参考导体( 72)。 在加速测试期间,SMM(20)通过参考导体(72)校正CUT(70)的热漂移。 传感器(21)可以由引导空气流或冷指针(80)的诸如泵(33)的散热器(31)来冷却。 传感器可以从接触切换到扫描CUT(70)的非接触模式。 SMM(20)和方法对于测量CUT(70)中的电迁移是有用的,用于将图像组装成诸如CUT(70)的形状的时间过长的表示,用于测量作为交叉的函数的电迁移 在电介质材料(DM)(78)下的导线的横截面面积,用于确定CUT(70)的电参数,以及优化CUT(70)上的DM(78)的厚度。 SMM(20)和方法进一步用于测量CUT(70)中由于其他应力条件(如温度,激发电流,物理应力,敌对环境,老化,半导体“老化”)的形态变化。 ,或照射。
    • 10. 发明授权
    • Scanning magnetic microscope having improved magnetic sensor
    • 扫描磁显微镜具有改进的磁传感器
    • US07145330B2
    • 2006-12-05
    • US10493831
    • 2003-08-14
    • Gang Xiao
    • Gang Xiao
    • G01R33/02
    • G01Q60/54G01Q10/04G01Q30/04G01R33/0385
    • A scanning magnetic microscope SMM (20) includes a sensor (10) for sensing a magnetic field generated by a specimen (78), the sensor including one of a MTJ, a GMR, or an EHE sensor; translation apparatus (22A–C, 52) for translating the sensor relative to a surface of sad specimen; and a data processor (50), having an input coupled to an output of said sensor, for constructing an image of said magnetic field. The sensor preferably includes one to three sensing units each defining a sensing axis for sensing a component of a magnetic field from a specimen, the sensing units disposed such that the sensing axes are orthogonal to one another. Pluralities of such sensors can be disposed in two or three dimensional arrays. The SMM can be used for examining the current flow in ICs, electromigration, magnetic data storage media, biomagnetic systems and magnetic ink used to print currency.
    • 扫描磁显微镜SMM(20)包括用于感测由试样(78)产生的磁场的传感器(10),所述传感器包括MTJ,GMR或EHE传感器之一; 翻译装置(22A-C,52),用于相对于悲伤样本的表面平移传感器; 以及数据处理器(50),其具有耦合到所述传感器的输出的输入,用于构造所述磁场的图像。 传感器优选地包括一至三个感测单元,每个感测单元限定用于感测来自样本的磁场分量的感测轴,所述感测单元设置成使得感测轴彼此正交。 多个这样的传感器可以设置在二维或三维阵列中。 SMM可用于检查IC中的电流,电迁移,磁数据存储介质,生物磁系统和用于打印货币的磁性墨水。