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1. 发明授权

US5924833A Automated wafer transfer system 失效
标题翻译：自动晶圆传输系统
公开(公告)号：US5924833A
公开(公告)日：1999-07-20
申请号：US878788
申请日：1997-06-19
申请人： Michael R. Conboy , Gerald L. Goff , Elfido Coss, Jr.
发明人： Michael R. Conboy , Gerald L. Goff , Elfido Coss, Jr.
IPC分类号： B65G49/07 , H01L21/00 , H01L21/677
CPC分类号： H01L21/67201 , H01L21/67276 , H01L21/67727 , Y10S414/139 , Y10S414/14
摘要： An automated system is presented for containerless transfer of semiconductor wafers through a wall separating a first fabrication area and a second fabrication area. The system includes multiple containers for transporting the wafers, one or more air lock chambers, mass transfer systems, robotic arms, stock areas, and a control system. The containers (e.g., wafer boats) are dispersed between the first and second fabrication areas. A portion of the containers contain at least one semiconductor wafer, and the remainder of the containers are empty. The air lock chambers are positioned in sealed openings in the wall. The air lock chambers provide isolation between the first and second fabrication areas while permitting the transfer of semiconductor wafers between the fabrication areas. A mass transfer system is positioned within each air lock chamber and allows for containerless transfer of wafers through the air lock chamber. The stock areas provide storage areas for containers adjacent to each air lock chamber. The robotic arms are used to move the containers between the stock areas and each air lock chamber. The control system governs the dispersal of containers and the operations of the air lock chambers, the mass transfer systems, the robotic arms, and the stock areas.
摘要翻译：提出了一种自动化系统，用于通过分隔第一制造区域和第二制造区域的壁进行无容器转移半导体晶片。该系统包括用于运输晶片的多个容器，一个或多个气锁室，传质系统，机器人手臂，库存区域和控制系统。容器（例如，晶片舟皿）分散在第一和第二制造区域之间。容器的一部分包含至少一个半导体晶片，其余的容器是空的。气锁室位于墙上的密封开口中。气锁室在第一和第二制造区域之间提供隔离，同时允许在制造区域之间传输半导体晶片。质量传递系统位于每个空气锁定室内，并且允许通过气锁室的无盘式传送晶片。库区为每个气锁室附近的集装箱提供储存区域。机器人手臂用于在储存区域和每个气锁室之间移动容器。控制系统控制容器的分散以及气锁室，传质系统，机器人手臂和库区的操作。

2. 发明授权

US07200779B1 Fault notification based on a severity level 失效
标题翻译：基于严重性级别的故障通知
公开(公告)号：US07200779B1
公开(公告)日：2007-04-03
申请号：US10133097
申请日：2002-04-26
申请人： Elfido Coss, Jr. , Susan Hickey , Michael R. Conboy
发明人： Elfido Coss, Jr. , Susan Hickey , Michael R. Conboy
IPC分类号： G06F11/00
CPC分类号： G06F11/0769 , G06F11/0709 , G06F11/076 , G06F11/0781
摘要： A method and apparatus is provided for fault notification based on a severity level. The method comprises detecting a fault associated with a processing tool that is adapted to process one or more workpieces, determining a fault severity level of the detected fault and selecting at least one user to notify of the fault based on the severity level of the fault.
摘要翻译：基于严重性级别提供了用于故障通知的方法和装置。该方法包括检测与处理一个或多个工件的处理工具相关联的故障，确定检测到的故障的故障严重性级别，并且基于故障的严重性级别选择至少一个用户通知故障。

3. 发明授权

US07051250B1 Routing workpieces based upon detecting a fault 有权
标题翻译：基于检测到故障来路由工件
公开(公告)号：US07051250B1
公开(公告)日：2006-05-23
申请号：US10164091
申请日：2002-06-06
申请人： Sam H. Allen, Jr. , Michael R. Conboy , Michael L. Miller , Elfido Coss, Jr.
发明人： Sam H. Allen, Jr. , Michael R. Conboy , Michael L. Miller , Elfido Coss, Jr.
IPC分类号： G06F11/00
CPC分类号： G05B19/4184 , G05B2219/31355 , G05B2219/31365 , G05B2219/32243 , G05B2219/32254 , Y02P90/14 , Y02P90/20
摘要： A method and apparatus is provided for routing workpieces based upon detecting a fault. The method comprises routing a workpiece to a first processing tool identified by a dispatch system, detecting a fault condition associated with the first processing tool and notifying the dispatch system of the detected fault condition. The method further comprises routing a second workpiece to a second processing tool in response to the dispatch system being notified of the fault condition.
摘要翻译：提供了一种基于检测故障来路由工件的方法和装置。该方法包括将工件路由到由调度系统识别的第一处理工具，检测与第一处理工具相关联的故障状况并通知调度系统检测到的故障状况。该方法还包括响应于调度系统被通知故障状况而将第二工件路由到第二处理工具。

4. 发明授权

US06928333B1 Scheduling method for automated work-cell transfer system 失效
标题翻译：自动化工作单元传输系统的调度方法
公开(公告)号：US06928333B1
公开(公告)日：2005-08-09
申请号：US09387174
申请日：1999-08-31
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F19/00 , G06Q10/00
CPC分类号： G06Q10/06 , Y02P90/86
摘要： According to an example embodiment, the present invention is directed to a new and efficient method for bringing at least two items together from independent locations via separate paths in a computer controlled manufacturing environment. Using the computer, the probabilities for pickup and delivery of each of the two items are generated and used to determine an efficient manner in which to bring the items together via the separate paths.
摘要翻译：根据示例性实施例，本发明涉及一种用于在计算机控制的制造环境中通过独立路径将独立位置带入至少两个项目的新的和有效的方法。使用计算机，产生并且使用两个项目中的每一个的拾取和递送的概率来确定通过分开的路径将项目合在一起的有效方式。

5. 发明授权

US06871112B1 Method for requesting trace data reports from FDC semiconductor fabrication processes 失效
标题翻译：从FDC半导体制造工艺请求跟踪数据报告的方法
公开(公告)号：US06871112B1
公开(公告)日：2005-03-22
申请号：US09479852
申请日：2000-01-07
申请人： Elfido Coss, Jr. , Michael R. Conboy , Bryce A. Hendrix
发明人： Elfido Coss, Jr. , Michael R. Conboy , Bryce A. Hendrix
IPC分类号： H01L21/02 , H01L21/66 , G06F19/00
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The invention is, in its various aspects, a method and apparatus for dynamically generating trace data reports in a semiconductor fabrication process employing fault detection control. The method comprises specifying data including at least one of a parameter, a trigger, and a frequency, for a trace data report; automatically generating from a fault detection controller a request including the specified data to a report generator; formulating the trace data report responsive to the request; and returning the formulated trace data report from the report generator based on the request. The apparatus is a semiconductor fabrication processing system, comprising: a fabrication tool capable of providing at least one of specified data and a trace data report; a fault detection controller capable of automatically generating a request for the trace data report, the request including the specified data; a report generator capable of requesting at least one of the specified data and the trace data report from the fabrication tool and capable of, if the specified data is requested from the fabrication tool, providing the trace data report; and an operator interface for receiving data specified for the trace data report, the specified data including at least one of a parameter, a trigger, and a frequency for the trace data report, and to which the trace data report may be returned from at least one of the report generator and the fabrication tool.
摘要翻译：本发明在其各个方面是一种用于在采用故障检测控制的半导体制造过程中动态产生跟踪数据报告的方法和装置。该方法包括指定用于跟踪数据报告的包括参数，触发和频率中的至少一个的数据; 从故障检测控制器自动生成包括指定数据的请求到报告生成器; 根据请求制定跟踪数据报告; 并根据请求从报告生成器返回已制定的跟踪数据报告。该装置是半导体制造处理系统，包括：能够提供指定数据和跟踪数据报告中的至少一个的制造工具; 一个故障检测控制器，能够自动产生跟踪数据报告的请求，该请求包括指定的数据; 报告发生器，其能够从所述制造工具请求所述指定数据和跟踪数据报告中的至少一个，并且如果从所述制造工具请求指定的数据，则能够提供所述跟踪数据报告; 以及用于接收为跟踪数据报告指定的数据的操作者界面，所述指定数据包括用于跟踪数据报告的参数，触发和频率中的至少一个，并且跟踪数据报告至少可以从其返回报告生成器和制作工具之一。

6. 发明授权

US6035245A Automated material handling system method and arrangement 失效
公开(公告)号：US6035245A
公开(公告)日：2000-03-07
申请号：US46854
申请日：1998-03-24
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06Q10/08 , G06F17/00
CPC分类号： G06Q10/08 , Y10S414/14
摘要： A computer controlled manufacturing arrangement and method for selecting between multiple paths for transporting cassettes between processing locations. The manufacturing arrangement includes a plurality of stockers interconnected with tracks on which cassettes are carried on vehicles. A first and second stocker are interconnected by at least a first path and a second path formed by the tracks, and a cassette can be transported from the first to the second stocker via either of the two paths. A plurality of robotic arrangements are configured to transfer cassettes between the stockers and the vehicles. A data processing system is coupled to the robotic arrangements and configured and arranged to maintain an historical record of codes indicative of periods of time expended in transporting cassettes from the first stocker to the second stocker via the first path and second path, respectively. When a cassette is to be transported from the first stocker to the second stocker, the data processing system determines, as a function of the historical record of codes associated with the paths, which of the first or second paths is more likely to result in a lesser period of time in transporting the cassette, and selects one of the first or second paths according to which path is more likely to result in a lesser period of time in transporting the cassette. The robotic arrangement is then instructed to load the cassette on the vehicle of the selected path.

7. 发明授权

US06622111B1 Wafer rotation in semiconductor processing 有权
标题翻译：晶圆在半导体加工中旋转
公开(公告)号：US06622111B1
公开(公告)日：2003-09-16
申请号：US09521046
申请日：2000-03-08
申请人： Michael R. Conboy , Elfido Coss, Jr. , Sam H. Allen, Jr.
发明人： Michael R. Conboy , Elfido Coss, Jr. , Sam H. Allen, Jr.
IPC分类号： G01C1918
CPC分类号： H01L21/67276
摘要： The movement of individual wafers in a semiconductor facility is tracked via a set of coordinates that include rotational points of reference on the wafer that coincide with the wafer's location in the processing line. In an example embodiment, the method includes imparting angles of rotation on the wafers in different stages of the processing system. The different angles of rotation on each wafer are collected as data along with the wafer location in the processing system and the tool/equipment identification code. The combined angle of rotation and wafer location data is used to map the path the wafer has traveled from the onset of processing. An important advantage of the invention is the increased control and traceability that the invention brings to wafer processing.
摘要翻译：单个晶片在半导体设备中的移动通过一组坐标来跟踪，该坐标系包括与晶片在处理线中的位置一致的晶片上的旋转参考点。在示例性实施例中，该方法包括在处理系统的不同阶段在晶片上施加旋转角度。每个晶片上的不同旋转角度作为数据以及处理系统中的晶片位置和工具/设备识别码被收集。组合的旋转角度和晶片位置数据用于映射晶片从处理开始行进的路径。本发明的一个重要优点是本发明对晶片处理带来的增加的控制和可追溯性。

8. 发明授权

US06571371B1 Method and apparatus for using latency time as a run-to-run control parameter 有权
标题翻译：将等待时间用作运行控制参数的方法和装置
公开(公告)号：US06571371B1
公开(公告)日：2003-05-27
申请号：US09749293
申请日：2000-12-27
申请人： Elfido Coss, Jr. , Michael R. Conboy , Bryce Hendrix
发明人： Elfido Coss, Jr. , Michael R. Conboy , Bryce Hendrix
IPC分类号： G06F1750
CPC分类号： G03F7/70533 , H01L22/20 , Y10S438/946
摘要： The present invention provides for a method and an apparatus for using a latency time period as a control input parameter. A manufacturing run of semiconductor devices is processed. Metrology data from the processed semiconductor devices is acquired. A latency analysis process is performed using the acquired metrology data. A feedback/feed-forward modification process is performed in response to the latency analysis process.
摘要翻译：本发明提供一种使用等待时间段作为控制输入参数的方法和装置。处理半导体器件的制造运行。获取来自处理的半导体器件的计量数据。使用获取的测量数据执行延迟分析过程。响应于延迟分析过程执行反馈/前馈修改过程。

9. 发明授权

US06449522B1 Managing a semiconductor fabrication facility using wafer lot and cassette attributes 有权
标题翻译：使用晶圆批次和磁带属性管理半导体制造设备
公开(公告)号：US06449522B1
公开(公告)日：2002-09-10
申请号：US09193349
申请日：1998-11-17
申请人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
发明人： Michael R. Conboy , Patrick J. Ryan , Elfido Coss, Jr.
IPC分类号： G06F1900
CPC分类号： H01L21/67294 , H01L21/67276 , Y10S414/135 , Y10S414/137 , Y10S414/14
摘要： Systems and methods for managing automated material handling systems, such as semiconductor fabrication facilities, using material item (e.g., wafer lot) attributes and cassette attributes are provided. A semiconductor fabrication facility typically includes multiple wafer lots and multiple cassettes for storing the wafer lots. A system and method, in one embodiment of the invention, includes setting one or more lot attributes for each wafer lot, setting one or more cassette attributes for each cassette, and selecting a particular cassette for holding a particular wafer lot based on the one or more wafer lot attributes of the particular wafer lot and the one or more cassette attributes of the particular cassette. The wafer lot and cassette attributes may, for example, include an attribute identifying a position in a fabrication sequence and one or more attributes indicative of one or more contaminants. By selecting cassettes in this manner, wafer lots and cassettes may, for example, be classified or logically zoned.
摘要翻译：提供了用于管理自动化材料处理系统的系统和方法，例如半导体制造设施，使用材料项目（例如，晶片块）属性和盒子属性。半导体制造设备通常包括多个晶片批次和用于存储晶片批次的多个盒。在本发明的一个实施例中的系统和方法包括设置每个晶片批次的一个或多个批次属性，为每个盒设置一个或多个盒属性，并且基于该一个或多个盒子选择用于保持特定晶片批次的特定盒特定晶片批次的更多晶片批次属性和特定盒的一个或多个盒属性。晶片块和盒属性可以例如包括识别制造序列中的位置的属性和指示一种或多种污染物的一个或多个属性。通过以这种方式选择盒式磁带，可以对晶片批次和磁带盒进行分类或逻辑划分。

10. 发明授权

US06431814B1 Integrated wafer stocker and sorter with integrity verification system 失效
标题翻译：集成晶圆储片器和分拣机，具有完整性验证系统
公开(公告)号：US06431814B1
公开(公告)日：2002-08-13
申请号：US09578101
申请日：2000-05-22
申请人： Eric Christensen , Russel Shirley , Michael R. Conboy , Elfido Coss, Jr.
发明人： Eric Christensen , Russel Shirley , Michael R. Conboy , Elfido Coss, Jr.
IPC分类号： B65B2102
CPC分类号： H01L21/67294 , G01R31/01 , H01L21/67271
摘要： A system for verifying the integrity of components moving within a material handling system ensures that only components of acceptable integrity and condition are allowed to move onto the processing locations of a semiconductor plant. In an example embodiment, components that are warped or cracked are initially detected and scanned by a beam break system and/or an optical system. An integrity verification assessment is made immediately on the component to determine whether the scanned component meets with a predefined baseline parameter or characteristic. The components that do not pass integrity verification are then removed from the material handling system while the components that pass move on to the first processing location.
摘要翻译：用于验证在材料处理系统内移动的部件的完整性的系统确保仅允许可接受的完整性和条件的部件移动到半导体工厂的处理位置。在一个示例实施例中，翘曲或破裂的部件最初由束断系统和/或光学系统检测和扫描。在组件上立即进行完整性验证评估，以确定扫描的组件是否满足预定义的基准参数或特性。然后，不通过完整性验证的组件从材料处理系统中移除，而传递的组件移动到第一个处理位置。

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