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    • 3. 发明授权
    • Electric drive retarding system and method
    • 电驱动减速系统及方法
    • US08324846B2
    • 2012-12-04
    • US12210891
    • 2008-09-15
    • David G. MarchandMatthew E. WilliamsGerald BrownJohn Gunzburger
    • David G. MarchandMatthew E. WilliamsGerald BrownJohn Gunzburger
    • H02P3/12
    • B60L7/16B60L11/123B60L2200/36Y02T10/6217Y02T10/7258Y02T90/16
    • A retarding system for an electric drive machine (100) includes a direct current (DC) link (312), at which a DC voltage is developed, disposed between a rectifier (206) and an inverter (208). A first contactor switch (216) electrically communicates with a first rail of the DC link (312), and a second contactor switch (216) electrically communicates with a second rail of the DC link (312). A first resistor grid (214) is connected in series between the first contactor switch (216) and the second contactor switch (216). The first resistor grid (214) dissipates electrical energy in the form of heat by conducting a current between the first rail and the second rail of the DC link (312) when the first contactor switch (216) and the second contactor switch (216) are closed.
    • 用于电驱动机器(100)的延迟系统包括设置在整流器(206)和逆变器(208)之间的直流电压(DC)链路(312),直流电压被开发。 第一接触器开关(216)与直流母线(312)的第一导轨电连通,第二接触器开关(216)与直流母线(312)的第二导轨电连通。 第一电阻器栅极(214)串联连接在第一接触器开关(216)和第二接触器开关(216)之间。 当第一接触器开关(216)和第二接触器开关(216)在第一接触器开关(216)和第二接触器开关(216)之间传导电流时,第一电阻器栅极(214)通过在第一导轨和第二导轨之间传导电流来散热电能, 关闭。
    • 6. 发明授权
    • Reticle cleaning without damaging pellicle
    • 掩模版清洁,不会损坏防护薄膜
    • US06458216B1
    • 2002-10-01
    • US09543036
    • 2000-04-05
    • Matthew E. Williams
    • Matthew E. Williams
    • B08B704
    • G03F1/82G03F1/64Y10S134/902
    • A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.
    • 具有防护薄膜组件和防护薄膜组件的掩模版被清洁而不去除或损坏防护薄膜。 一个盖子包裹防护薄膜和防护薄膜框架,在清洁过程中将防护薄膜组件与外部环境密封。 盖子围绕防护薄膜框架的周边并覆盖防护薄膜。 与掩模版接触的盖的边缘形成密封。 在清洁过程中,将光罩紧固到旋转卡盘上的光罩支架上。 锚板将盖板压在掩模版上,保持防护薄膜与外部环境密封。 覆盖物和掩模版被夹在锚板和旋转卡盘之间。