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    • 9. 发明授权
    • Temperature compensated surface acoustic wave device
    • 温度补偿声表面波装置
    • US4489250A
    • 1984-12-18
    • US508044
    • 1983-06-27
    • Yasuo EbataHitoshi SuzukiSadao MatsumuraKatsuyoshi Fukuta
    • Yasuo EbataHitoshi SuzukiSadao MatsumuraKatsuyoshi Fukuta
    • H03H9/25H03H3/08H03H9/02
    • H03H9/02543
    • A surface acoustic wave device having a lithium tatraborate single crystal substrate is proposed. An electro-mechanical coupling coefficient K.sup.2 of the substrate is about 1% so as to obtain a surface acoustic wave having sufficient practical energy. When cut angles of the substrate and a propagation direction of the surface acoustic wave are expressed by Eulerian angles (90+.lambda., 90.degree., 90.degree.), a thickness t of an electrode formed on the substrate falls within a region bounded by a dotted curve and an alternate long and short dash curve in FIG. 8. The dotted curve and the alternate long and short dash curve indicate the experimental relationship between the cut angle .lambda. and the thickness t when the TCD is set at 5 and -5 ppm/.degree.C., respectively. When the film thickness t is set within the above-mentioned range, the absolute value of the TCD is set at 5 ppm/.degree.C. or less. When the cut angle .lambda. is 25.degree., the TCD of the substrate becomes zero. Therefore, using the substrate having the above cut angle, the TCD becomes zero or almost zero in the electrode region and nonelectrode region of the surface of the substrate.
    • 提出了具有锂晶体单晶基板的声表面波装置。 基板的机电耦合系数K2约为1%,以获得具有足够的实际能量的表面声波。 当基板的切割角度和表面声波的传播方向由欧拉角(90°λ,90°,90°)表示时,形成在基板上的电极的厚度t落在由点状 曲线和另一长短短曲线。 虚线曲线和交替的长短短曲线分别表示当TCD设定在5和-5ppm /℃时切割角λ和厚度t之间的实验关系。 当膜厚度t设定在上述范围内时,TCD的绝对值设定为5ppm /℃以下。 当切割角度λ为25°时,基板的TCD变为零。 因此,使用具有上述切割角度的基板,在基板表面的电极区域和非电极区域中,TCD变为零或几乎为零。