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    • 1. 发明授权
    • Positional deviation detecting method
    • 位置偏差检测方法
    • US5225892A
    • 1993-07-06
    • US939429
    • 1992-09-04
    • Masakazu MatsuguKenji SaitoJun Hattori
    • Masakazu MatsuguKenji SaitoJun Hattori
    • G03F9/00
    • G03F9/7076
    • Disclosed is a method of detecting relative positional deviation of a first object with a first grating pattern having an optical power and a second object with a second grating mark having an optical power. Light diffracted by both the first and second grating marks forms a light pattern on a predetermined plane; wherein different diffraction beams of the light diffracted by both the first and second grating marks are displaceable along the predetermined plane in accordance with the relative positional deviation of the first and second objects, in the same direction and by substantially the same quantity; and the relative positional deviation of the first and second objects is detected on the basis of the position of the light pattern on the predetermined plane.
    • 公开了一种利用具有光功率的第一光栅图案检测第一物体的相对位置偏差的方法和具有光焦度的第二光栅标记的第二物体的方法。 由第一和第二光栅标记二者衍射的光在预定平面上形成光图案; 其中由所述第一和第二光栅标记二者衍射的光的不同衍射光束沿着所述第一和第二物体的相对位置偏移沿着相同的方向和大致相同的数量沿所述预定平面位移; 并且基于在所述预定平面上的光图案的位置来检测第一和第二物体的相对位置偏差。
    • 2. 发明授权
    • Positional deviation detecting method
    • 位置偏差检测方法
    • US5481363A
    • 1996-01-02
    • US242066
    • 1994-05-13
    • Masakazu MatsuguKenji SaitohJun HattoriSakae Houryu
    • Masakazu MatsuguKenji SaitohJun HattoriSakae Houryu
    • G03F9/00G01B11/00
    • G03F9/7076
    • A method of detecting a relative positional deviation of a first object having a first grating mark with an optical power and a second object having a second grating mark with an optical power, is disclosed, wherein a projected radiation beam is diffracted by the first and second grating marks in sequence and, on the basis of a position of convergence on a light receiving surface of plural diffraction beams produced by the diffraction through the first and second grating marks and including a signal beam having been diffracted at a predetermined order by each of the first and second grating marks, the relative positional deviation is determined, a detection zone is defined on the light receiving surface, the signal beam is converged upon the detection zone, and a predetermined diffraction beam of the plural diffraction beams which, for a relative positional deviation of the first and second objects, shows displacement different from that of the signal beam is substantially prevented from being converged upon the detection zone.
    • 公开了一种检测具有光功率的第一光栅标记的第一物体和具有光功率的第二光栅标记的第二物体的相对位置偏差的方法,其中投射的辐射束被第一和第二衍射 基于通过第一和第二光栅标记的衍射产生的多个衍射光束的光接收表面上的会聚位置,并且包括以预定顺序衍射的信号光束 第一和第二光栅标记,确定相对位置偏差,在光接收表面上限定检测区域,信号光束会聚在检测区域上,并且将多个衍射光束的预定衍射光束相对于相对位置 显示第一和第二物体的偏差显示出与信号光束不同的位移 om会聚在检测区域。
    • 5. 发明授权
    • Measurement system and measurement processing method
    • 测量系统和测量处理方法
    • US08456621B2
    • 2013-06-04
    • US13595013
    • 2012-08-27
    • Kazuyuki OtaMasakazu MatsuguKenji Saitoh
    • Kazuyuki OtaMasakazu MatsuguKenji Saitoh
    • G01N21/00
    • G01B11/25
    • This invention is directed to extract the scattering characteristic of a measurement target together when measuring the surface shape in a measurement system, which measures the surface shape of a measurement target, by the pattern projection method. To accomplish this, the measurement system includes an illumination unit which irradiates a measurement target with dot pattern light, a reflected light measurement unit which receives the reflected light at a reflection angle almost equal to a incident angle, and a reflected light extraction unit which extracts the inclination of the surface of the measurement target, based on the shift amount between the light receiving position of the received reflected light and a predetermined reference position, and extracts the luminance value of the reflected light and the dot diameter of the dot pattern light as information about the scattering characteristic.
    • 本发明旨在通过图案投影法在测量测量对象的表面形状的测量系统中测量表面形状时,将测量对象的散射特性一起提取。 为了实现这一点,测量系统包括用点阵图形光照射测量对象的照明单元,以几乎等于入射角的反射角接收反射光的反射光测量单元和提取出的反射光提取单元 基于接收到的反射光的光接收位置与预定的基准位置之间的偏移量,测量对象的表面的倾斜度,并将点阵图案光的反射光的亮度值和点直径提取为 关于散射特性的信息。
    • 7. 发明申请
    • INFORMATION PROCESSING APPARATUS AND METHOD FOR CONTROLLING THE SAME
    • 信息处理装置及其控制方法
    • US20120327224A1
    • 2012-12-27
    • US13582116
    • 2011-03-07
    • Osamu NomuraMasakazu Matsugu
    • Osamu NomuraMasakazu Matsugu
    • H04N7/18
    • B25J9/1671
    • An information processing apparatus includes an imaging unit and is capable of setting arrangement of a structural member of a robot system which works based on an image captured by the imaging unit. The information processing apparatus includes an arrangement unit configured to arrange a virtual object corresponding to the structural member in a virtual space corresponding to a working space of the robot system, a first acquisition unit configured to acquire a virtual space image in the virtual space which corresponds to the captured image and in which the virtual object is arranged, and a second acquisition unit configured to acquire an evaluation value indicating adaptation of arrangement of the virtual object to the work of the robot system based on the virtual space image.
    • 信息处理设备包括成像单元,并且能够基于由成像单元捕获的图像来设置机器人系统的结构构件的布置。 该信息处理装置包括:配置单元,被配置为将与结构构件相对应的虚拟对象布置在与机器人系统的工作空间对应的虚拟空间中;第一获取单元,被配置为获取虚拟空间中的虚拟空间图像 以及第二获取单元,被配置为基于虚拟空间图像获取指示虚拟对象的布置适应于机器人系统的工作的评估值。
    • 8. 发明授权
    • Measurement system and measurement processing method
    • 测量系统和测量处理方法
    • US08274646B2
    • 2012-09-25
    • US12816069
    • 2010-06-15
    • Kazuyuki OtaMasakazu MatsuguKenji Saitoh
    • Kazuyuki OtaMasakazu MatsuguKenji Saitoh
    • G01N21/00
    • G01B11/25
    • This invention is directed to extract the scattering characteristic of a measurement target together when measuring the surface shape in a measurement system, which measures the surface shape of a measurement target, by the pattern projection method. To accomplish this, the measurement system includes an illumination unit which irradiates a measurement target with dot pattern light, a reflected light measurement unit which receives the reflected light at a reflection angle almost equal to a incident angle, and a reflected light extraction unit which extracts the inclination of the surface of the measurement target, based on the shift amount between the light receiving position of the received reflected light and a predetermined reference position, and extracts the luminance value of the reflected light and the dot diameter of the dot pattern light as information about the scattering characteristic.
    • 本发明旨在通过图案投影法在测量测量对象的表面形状的测量系统中测量表面形状时,将测量对象的散射特性一起提取。 为了实现这一点,测量系统包括用点阵图形光照射测量对象的照明单元,以几乎等于入射角的反射角接收反射光的反射光测量单元和提取出的反射光提取单元 基于接收到的反射光的光接收位置与预定的基准位置之间的偏移量,测量对象的表面的倾斜度,并将点阵图案光的反射光的亮度值和点直径提取为 关于散射特性的信息。