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    • 4. 发明授权
    • Compact sensing apparatus
    • 紧凑感测装置
    • US06927465B2
    • 2005-08-09
    • US10136462
    • 2002-05-01
    • Marshall E. Smith, Jr.Richard W. StettlerPeter U. Wolff
    • Marshall E. Smith, Jr.Richard W. StettlerPeter U. Wolff
    • G01D21/02G01R33/02G01R33/06H01L21/00H01L27/14H01L29/82
    • G01D21/02
    • A sensing apparatus having a sensor formed in a monolithic semiconductor substrate and oriented orthogonally to a signal conditioner is provided. The sensor generates a sensing signal in response to a predetermined physical stimulus. A signal conditioner electrically connected and responsive to the sensor conditions the sensing signal. The sensor and signal conditioner are formed on wafer surfaces of a single semiconductor substrate cut from a semiconductor wafer. The substrate is separated, one portion having the sensor formed on therein and the other having formed therein the signal conditioner. The portions are oriented and rejoined to form a monolithic semiconductor substrate. The resulting monolithic substrate has, then, a sensor and signal conditioner formed therein and angled relative to each other at a predetermined angle.
    • 提供一种具有形成在单片半导体衬底中并且与信号调节器正交定向的传感器的感测装置。 传感器响应于预定的物理刺激产生感测信号。 电连接并响应于传感器的信号调节器响应感测信号。 传感器和信号调节器形成在从半导体晶片切割的单个半导体衬底的晶片表面上。 分离基板,一部分传感器形成在其中,另一部分在其中形成有信号调节器。 这些部分被取向并重新连接以形成单片半导体衬底。 所得到的整体式衬底具有形成在其中的传感器和信号调节器,并以预定的角度相对于彼此成角度。
    • 6. 发明授权
    • Methods for mounting a sensor and signal conditioner to form sensing apparatus having enhanced sensing capabilities and reduced size
    • 用于安装传感器和信号调节器以形成具有增强的感测能力和减小的尺寸的感测装置的方法
    • US06346811B1
    • 2002-02-12
    • US09454319
    • 1999-12-03
    • Marshall E. Smith, Jr.Peter U. WolffRichard W. Stettler
    • Marshall E. Smith, Jr.Peter U. WolffRichard W. Stettler
    • G01R3302
    • G01D11/245G01R29/12
    • A compact sensing apparatus having reduced cross section and methods are provided for sensing the magnitude and direction of an electrical or magnetic field. The compact sensing apparatus and method preferably provide one of two transducer orientations in relation to the direction of the field arranged in the sensor apparatus to provide the smallest possible cross section. The compact sensing apparatus preferably includes a plurality of mounting pins. Each of the plurality of mounting pins preferably is formed of a magnetic material and includes a first pin portion and a second pin portion connected to the first pin portion at a predetermined angle. The predetermined angle is preferably less than 180 degrees and more preferably in the range of about 70-110 degrees. A transducer formed from a semiconductor wafer is preferably mounted to the first pin portion for generating a transducer signal, and a signal conditioner also preferably formed from the same semiconductor wafer is mounted to the second pin portion for conditioning the transducer signal.
    • 提供了具有减小的横截面的小型感测装置和用于感测电场或磁场的大小和方向的方法。 小型感测装置和方法优选地相对于布置在传感器装置中的场的方向提供两个换能器取向中的一个,以提供尽可能小的横截面。 紧凑感测装置优选地包括多个安装销。 多个安装销中的每一个优选地由磁性材料形成,并且包括以预定角度连接到第一销部分的第一销部分和第二销部分。 预定角度优选地小于180度,更优选地在大约70-110度的范围内。 由半导体晶片形成的换能器优选安装在第一引脚部分上,用于产生换能器信号,并且也优选地由相同的半导体晶片形成的信号调节器安装到第二引脚部分以调节换能器信号。