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    • 10. 发明授权
    • Field effect transistor and method of manufacturing the same
    • 场效应晶体管及其制造方法
    • US08569797B2
    • 2013-10-29
    • US13185818
    • 2011-07-19
    • Hidekazu UmedaMasahiro HikitaTetsuzo Ueda
    • Hidekazu UmedaMasahiro HikitaTetsuzo Ueda
    • H01L29/80
    • H01L29/7783H01L29/1066H01L29/2003H01L29/66462H01L29/7787
    • A field-effect transistor includes a first semiconductor layer formed on a substrate, and a second semiconductor layer. The first semiconductor layer has a containing region provided as an isolation region which contains non-conductive impurities, and a non-containing region which contains no non-conductive impurities. A first region is defined by a vicinity of a portion of the interface between the containing region and the non-containing region, the portion of the interface being below a gate electrode, the vicinity including the portion of the interface and being included in the containing region. The second semiconductor layer includes a second region which is located directly above the first region. The concentration of the non-conductive impurities of the second region is lower than that of the first region.
    • 场效应晶体管包括形成在衬底上的第一半导体层和第二半导体层。 第一半导体层具有设置为包含非导电杂质的隔离区域的含有区域和不含非导电杂质的非含有区域。 第一区域由容纳区域和非含有区域之间的界面的一部分的附近限定,界面的部分在栅电极下方,包括界面部分的附近包含在包含 地区。 第二半导体层包括位于第一区域正上方的第二区域。 第二区域的非导电性杂质的浓度低于第一区域的浓度。