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    • 6. 发明申请
    • METHOD AND DEVICE FOR POLARIZING A DBD ELECTRODE
    • 用于极化DBD电极的方法和装置
    • US20120258260A1
    • 2012-10-11
    • US13511163
    • 2010-11-23
    • Eric MichelEric TixhonJoseph Leclercq
    • Eric MichelEric TixhonJoseph Leclercq
    • C23C16/503
    • H01J37/32348C23C16/50C23C16/507C23C16/545H05H1/2406H05H2001/2412H05H2242/1005
    • The invention relates to a device for treating the surface of a substrate by means of dielectric barrier discharge for generating a filamentary plasma, including a reaction chamber comprising a mixture having a composition such that, when in contact with the plasma, the mixture decomposes and generates species capable of deposition in the form of a layer mostly or totally on the substrate, wherein at least two electrodes area provided in said chamber, with one electrode being subjected to a high AC voltage, and are arranged on either side of the substrate, at least one dielectric barrier (DBD) arranged between said at least two electrodes, and a THT/HF transformer comprising a secondary circuit, in which a direct current (DC) power source is provided in series in the secondary circuit such that the chemical species generated in the plasma in the form of electrically positive or negative ions are selectively attracted by the target substrate inserted in the reaction chamber and arranged between said at least two electrodes, and repelled by electrodes having a corresponding charge.
    • 本发明涉及一种用于通过用于产生丝状等离子体的电介质阻挡放电来处理衬底表面的装置,包括反应室,该反应室包括具有如下组成的混合物:当与等离子体接触时,混合物分解并产生 能够以基本上或完全在基底上的层的形式沉积的物质,其中设置在所述腔室中的至少两个电极区域,其中一个电极经受高A​​C电压,并且布置在衬底的任一侧上, 布置在所述至少两个电极之间的至少一个介电阻挡层(DBD)和包括次级电路的THT / HF变压器,其中在次级电路中串联地提供直流(DC)电源,使得产生的化学物质 电离正离子等离子体被插入反应室内的目标基板选择性地吸引并排列 在所述至少两个电极之间,并被具有相应电荷的电极排斥。
    • 7. 发明授权
    • Method and device for polarizing a DBD electrode
    • 用于极化DBD电极的方法和装置
    • US09401265B2
    • 2016-07-26
    • US13511163
    • 2010-11-23
    • Eric MichelEric TixhonJoseph Leclercq
    • Eric MichelEric TixhonJoseph Leclercq
    • C23C16/00H01J37/32C23C16/54C23C16/507H05H1/24C23C16/50
    • H01J37/32348C23C16/50C23C16/507C23C16/545H05H1/2406H05H2001/2412H05H2242/1005
    • The invention relates to a device for treating the surface of a substrate by means of dielectric barrier discharge for generating a filamentary plasma, including a reaction chamber comprising a mixture having a composition such that, when in contact with the plasma, the mixture decomposes and generates species capable of deposition in the form of a layer mostly or totally on the substrate, wherein at least two electrodes area provided in said chamber, with one electrode being subjected to a high AC voltage, and are arranged on either side of the substrate, at least one dielectric barrier (DBD) arranged between said at least two electrodes, and a THT/HF transformer comprising a secondary circuit, in which a direct current (DC) power source is provided in series in the secondary circuit such that the chemical species generated in the plasma in the form of electrically positive or negative ions are selectively attracted by the target substrate inserted in the reaction chamber and arranged between said at least two electrodes, and repelled by electrodes having a corresponding charge.
    • 本发明涉及一种用于通过用于产生丝状等离子体的电介质阻挡放电来处理衬底表面的装置,包括反应室,该反应室包括具有如下组成的混合物:当与等离子体接触时,混合物分解并产生 能够以基本上或完全在基底上的层的形式沉积的物质,其中设置在所述腔室中的至少两个电极区域,其中一个电极经受高A​​C电压,并且布置在衬底的任一侧上, 布置在所述至少两个电极之间的至少一个介电阻挡层(DBD)和包括次级电路的THT / HF变压器,其中在次级电路中串联地提供直流(DC)电源,使得产生的化学物质 电离正离子等离子体被插入反应室内的目标基板选择性地吸引并排列 在所述至少两个电极之间,并被具有相应电荷的电极排斥。