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1. 发明授权

US06368975B1 Method and apparatus for monitoring a process by employing principal component analysis 有权
标题翻译：采用主成分分析法监测过程的方法和装置
公开(公告)号：US06368975B1
公开(公告)日：2002-04-09
申请号：US09348972
申请日：1999-07-07
申请人： Lalitha Balasubramhanya , Moshe Sarfaty , Jed Davidow , Dimitris Lymberopoulos
发明人： Lalitha Balasubramhanya , Moshe Sarfaty , Jed Davidow , Dimitris Lymberopoulos
IPC分类号： H01L21302
CPC分类号： G05B23/024 , G01N21/274 , G01N21/3563 , G01N21/359 , G01N2201/1293
摘要： A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process). Principal component analysis then is performed on the measured correlated attributes so as to generate at least one production principal component; and the at least one production principal component is compared to a principal component associated with a calibration process (a calibration principal component). The calibration principal component is obtained by measuring correlated attributes of a calibration process, and by performing principal component analysis on the measured correlated attributes so as to generate at least one principal component. A principal component having a feature indicative of at least one of a desired process state, process event and chamber state then is identified and is designated as the calibration principal component. Preferably the at least one production principal component is compared to the calibration principal component by computing the inner product of the calibration and production principal components.
摘要翻译：提供了一种通过采用主成分分析来监测过程的方法和装置。测量要监控的过程（生产过程）的相关属性。然后对测量的相关属性执行主成分分析，以便生成至少一个生产主成分; 并且将至少一个生产主成分与与校准过程（校准主成分）相关联的主成分进行比较。通过测量校准过程的相关属性以及通过对所测量的相关属性执行主成分分析以获得至少一个主成分来获得校准主成分。识别具有指示期望的处理状态，处理事件和室状态中的至少一个的特征的主要成分，并将其指定为校准主成分。优选地，通过计算校准和生产主要部件的内积来将至少一个生产主成分与校准主成分进行比较。

2. 发明授权

US06896763B2 Method and apparatus for monitoring a process by employing principal component analysis 有权
标题翻译：采用主成分分析法监测过程的方法和装置
公开(公告)号：US06896763B2
公开(公告)日：2005-05-24
申请号：US10341696
申请日：2003-01-14
申请人： Lalitha Balasubramhanya , Moshe Sarfaty , Jed Davidow , Dimitris Lymberopoulos
发明人： Lalitha Balasubramhanya , Moshe Sarfaty , Jed Davidow , Dimitris Lymberopoulos
IPC分类号： H01L21/302 , G01N21/27 , G01N21/35 , G05B23/02 , H01L21/02 , H01L21/3065 , H01L21/66 , H01L21/306 , C23F1/00
CPC分类号： G05B23/024 , G01N21/274 , G01N21/3563 , G01N21/359 , G01N2201/1293
摘要： A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process). Principal component analysis then is performed on the measured correlated attributes so as to generate at least one production principal component; and the at least one production principal component is compared to a principal component associated with a calibration process (a calibration principal component). The calibration principal component is obtained by measuring correlated attributes of a calibration process, and by performing principal component analysis on the measured correlated attributes so as to generate at least one principal component. A principal component having a feature indicative of at least one of a desired process state, process event and chamber state then is identified and is designated as the calibration principal component.
摘要翻译：提供了一种通过采用主成分分析来监测过程的方法和装置。测量要监控的过程（生产过程）的相关属性。然后对测量的相关属性执行主成分分析，以便生成至少一个生产主成分; 并且将至少一个生产主成分与与校准过程（校准主成分）相关联的主成分进行比较。通过测量校准过程的相关属性以及通过对所测量的相关属性执行主成分分析以获得至少一个主成分来获得校准主成分。识别具有指示期望的处理状态，处理事件和室状态中的至少一个的特征的主要成分，并将其指定为校准主成分。

3. 发明授权

US06521080B2 Method and apparatus for monitoring a process by employing principal component analysis 失效
公开(公告)号：US06521080B2
公开(公告)日：2003-02-18
申请号：US10002830
申请日：2001-11-15
申请人： Lalitha Balasubramhanya , Moshe Sarfaty , Jed Davidow , Dimitris Lymberopoulos
发明人： Lalitha Balasubramhanya , Moshe Sarfaty , Jed Davidow , Dimitris Lymberopoulos
IPC分类号： C23F100
CPC分类号： G05B23/024 , G01N21/274 , G01N21/3563 , G01N21/359 , G01N2201/1293
摘要： A method and apparatus for monitoring a process by employing principal component analysis are provided. Correlated attributes are measured for the process to be monitored (the production process). Principal component analysis then is performed on the measured correlated attributes so as to generate at least one production principal component; and the at least one production principal component is compared to a principal component associated with a calibration process (a calibration principal component). The calibration principal component is obtained by measuring correlated attributes of a calibration process, and by performing principal component analysis on the measured correlated attributes so as to generate at least one principal component. A principal component having a feature indicative of at least one of a desired process state, process event and chamber state then is identified and is designated as the calibration principal component.

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