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    • 2. 发明授权
    • Method and apparatus to generate a ground level of a semiconductor IC tester having a plurality of substrates
    • 用于产生具有多个基板的半导体IC测试器的地平面的方法和装置
    • US06642734B1
    • 2003-11-04
    • US09707020
    • 2000-11-06
    • Shinichi TsuyukiToshiaki Ogura
    • Shinichi TsuyukiToshiaki Ogura
    • G01R3128
    • G01R31/31924G01R31/31917
    • When performing supply and measurement of various signals on n=8 semiconductor IC devices under test DUT1-DUT8 using m=3 substrates 10-30, reference voltages of the devices under test DUT1-DUT3 are input to the substrate 10, reference voltages of the devices under test DUT4-DUT6 are input to the substrate 20, and reference voltages of the devices under test DUT7 and 8 are input to the substrate 30. The reference voltages input to each substrate 10-30 are averaged. The mean voltages made in each substrate are further connected to each other, and a reference voltage is made using three substrates 10-30. The reference voltage is used as a reference voltage for voltage generating circuits 11-31. The reference voltage having no variation among each substrate is set even if the number of semiconductor IC devices under test is increased and the whole equipment becomes large.
    • 在使用m = 3衬底10-30的n = 8个被测试DUT1-DUT8的半导体IC器件上进行各种信号的供给和测量时,被测器件DUT1-DUT3的参考电压被输入到衬底10,参考电压 被测器件DUT4-DUT6被输入到衬底20,并且被测器件DUT7和8的参考电压被输入到衬底30.输入到每个衬底10-30的参考电压被平均。 在每个衬底中制造的平均电压进一步彼此连接,并且使用三个衬底10-30制成参考电压。 参考电压用作电压产生电路11-31的参考电压。 即使被测半导体IC器件的数量增加,整个设备变大,也设定各基板之间没有变化的基准电压。