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    • 1. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US08833163B2
    • 2014-09-16
    • US13372053
    • 2012-02-13
    • Junichi Honda
    • Junichi Honda
    • G01C19/56G01C19/5747
    • G01C19/5747
    • An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.
    • 角速度传感器包括:框架,包括在与第一方向正交的第二方向上沿第一方向延伸并彼此相对的一对第一梁;一对第二梁,沿第二方向延伸并彼此相对; 第一个方向和这些对之间的连接; 驱动单元,其以第一和第二方向所属的第一平面中的框架振动,其中当一对这些对相互靠近时,另一个移动彼此移动的振动模式,反之亦然 ; 第一检测器,基于第一平面中的框架的变形量来检测围绕与第一平面正交的第三方向的轴线的角速度; 以及包括基部和接合部的支撑机构。
    • 3. 发明授权
    • Vibration gyro sensor element with cantilever vibrator extending from substrate and positioned within opening in substrate
    • 具有悬臂振动器的振动陀螺传感器元件,从基板延伸并定位在基板的开口内
    • US07401516B2
    • 2008-07-22
    • US11734459
    • 2007-04-12
    • Teruo InagumaJunichi HondaTakashi TamuraKazuo Takahashi
    • Teruo InagumaJunichi HondaTakashi TamuraKazuo Takahashi
    • G01P3/02G01P9/00H01L41/08
    • G01C19/5656
    • A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.
    • 施加用于允许振动器振动的电压的驱动电极,并且形成作为上电极的沿振动器的纵向方向彼此平行延伸的第一和第二检测电极,使得驱动电极插入在第一 和第二检测电极,并且不与检测电极接触。 当在下电极和驱动电极之间施加电压以允许振动器以垂直共振频率振动时,在第一和第二检测电极中检测到的检测信号之间存在差异的情况下,将激光照射到 所述振动器的期望部分基于在所述第一和第二检测电极中检测到的检测信号进行研磨操作,从而调节所述振动器的形状。