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    • 5. 发明授权
    • Method of fabricating nanowire memory device and system of controlling nanowire formation used in the same
    • 制造纳米线存储器件的方法及其中使用的纳米线形成控制系统
    • US07985646B2
    • 2011-07-26
    • US11712990
    • 2007-03-02
    • Jin-gyoo YooCheol-soon KimJung-hoon Lee
    • Jin-gyoo YooCheol-soon KimJung-hoon Lee
    • G11C11/50
    • H01L27/10B82Y10/00
    • A method of fabricating a nanowire memory device, and a system of controlling nanowire formation used in the same method are provided. In the method of fabricating a nanowire memory device which includes a substrate; an electrode formed on the substrate and insulated from the substrate; and a nanowire having its one end connected with the electrode and formed at a given length, the method comprises: forming an electrode and a dummy electrode to be paired with the electrode on the substrate; forming the nanowire between the electrode and the dummy electrode while measuring a current flowing between the electrode and the dummy electrode, and cutting power applied between the electrode and the dummy electrode when the current measured is a given value; and removing the dummy electrode.
    • 提供了制造纳米线存储器件的方法,以及以相同方法使用的控制纳米线形成的系统。 在制造包括衬底的纳米线存储器件的方法中; 形成在基板上并与基板绝缘的电极; 和一个纳米线,其一端与电极连接并以给定的长度形成,该方法包括:在基片上形成与电极配对的电极和虚拟电极; 在测量电极和虚拟电极之间的电流的同时,在电极和虚拟电极之间形成纳米线,并且当所测量的电流为给定值时,切割施加在电极和虚拟电极之间的功率; 并去除虚拟电极。
    • 9. 发明授权
    • Non-volatile memory device and a method of fabricating the same
    • 非易失性存储器件及其制造方法
    • US07622765B2
    • 2009-11-24
    • US11709057
    • 2007-02-22
    • Won-joo KimYoon-dong ParkJung-hoon Lee
    • Won-joo KimYoon-dong ParkJung-hoon Lee
    • H01L29/788
    • H01L29/7881H01L27/115H01L27/11519H01L29/42332H01L29/792
    • A non-volatile memory device and a method of fabricating the same are provided. A non-volatile memory device may include a semiconductor substrate including a body and at least one pair of fins vertically protruding from the body and spaced apart from each other, and at least one control gate electrode on at least portions of outer side surfaces of the at least one pair of fins and extending onto top portions of the at least one pair of fins on an angle with the at least one pair of fins. The non-volatile memory device may further include at least one pair of gate insulating layers between the at least one control gate electrode and the at least one pair of fins, and at least one pair of storage node layers between the at least one pair of gate insulating layers and at least a portion of the at least one control gate electrode. The at least one control gate electrode may extend onto top portions of the at least one pair of fins in a zigzag fashion.
    • 提供了一种非易失性存储器件及其制造方法。 非易失性存储器件可以包括半导体衬底,其包括主体和从主体垂直突出并且彼此间隔开的至少一对鳍,以及至少一个控制栅电极,其位于至少一个的外侧表面的至少部分上 至少一对翅片,并且与所述至少一对翅片成角度地延伸到所述至少一对翅片的顶部上。 非易失性存储器件还可以包括至少一对控制栅电极与至少一对散热片之间的至少一对栅绝缘层,以及至少一对控制栅电极之间的至少一对存储节点层 栅绝缘层和至少一个控制栅电极的至少一部分。 至少一个控制栅极可以以锯齿形的方式延伸到至少一对翅片的顶部。