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    • 6. 发明授权
    • Method for fabricating a capacitor
    • 制造电容器的方法
    • US06762090B2
    • 2004-07-13
    • US10067951
    • 2002-02-05
    • Byoung Kwon AhnSung Hoon ParkJoon Ho Kim
    • Byoung Kwon AhnSung Hoon ParkJoon Ho Kim
    • H01L218242
    • H01L28/40H01L21/76895H01L28/91
    • A method for fabricating capacitor capable of simplifying formation processes of ruthenium (Ru) layer for storage node electrode formation of capacitor comprises the steps of: forming a first insulating layer having a first opening exposing a predetermined region on a substrate; forming a conductive plug filled within the first opening; forming a second insulating layer having a second opening exposing the conductive plug on the first insulating layer; forming a conductive layer covering the second opening by sequentially performing PECVD and LPCVD processes on the second insulating layer; exposing the second insulating layer by performing etch back on the conductive layer; forming a storage node electrode of the capacitor by removing the second insulating layer; and forming a dielectric layer to cover the storage node electrode; and forming a plate electrode. In an alternative embodiment, a thermal treatment under an N2 gas supply is performed after the step of forming the conductive layer.
    • 一种用于制造电容器的方法,其能够简化用于存储节点电极形成电容器的钌(Ru)层的形成过程,包括以下步骤:形成第一绝缘层,其具有暴露基板上的预定区域的第一开口; 形成填充在所述第一开口内的导电塞; 形成具有第二开口的第二绝缘层,所述第二开口将所述导电插塞暴露在所述第一绝缘层上; 通过在所述第二绝缘层上依次执行PECVD和LPCVD工艺来形成覆盖所述第二开口的导电层; 通过在导电层上进行回蚀来暴露第二绝缘层; 通过去除所述第二绝缘层形成所述电容器的存储节点电极; 以及形成覆盖所述存储节点电极的电介质层; 并形成平板电极。 在替代实施例中,在形成导电层的步骤之后进行在N 2气体供应下的热处理。
    • 10. 发明申请
    • Automatic transmission
    • 自动变速器
    • US20080039285A1
    • 2008-02-14
    • US11595401
    • 2006-11-08
    • Sung Hoon Park
    • Sung Hoon Park
    • F16H61/00
    • F16H63/3026F16H3/66F16H57/02F16H2057/02047F16H2200/0052F16H2200/201F16H2200/2046Y10T477/689
    • An automatic transmission includes: a transmission case; a support installed vertically in the transmission case; a hydraulic pump housing installed in the transmission case; a hydraulic pressure chamber attached to a first side of the support; a transfer drive gear for transferring torque to an output shaft, the transfer drive gear being attached to a second side of the support; a brake retainer coupled to the hydraulic pressure chamber and attached to the center support; a first brake receiving a first operating hydraulic pressure from the hydraulic pressure chamber and splined to the transmission case through the brake retainer; and a second brake receiving a second operating hydraulic pressure from the hydraulic pump housing, connected to the brake retainer, and splined to the transmission case.
    • 一种自动变速器包括:变速箱; 在传动箱垂直安装的支架; 安装在变速箱内的​​液压泵壳; 附接到所述支撑件的第一侧的液压室; 用于将扭矩传递到输出轴的传递驱动齿轮,所述传递驱动齿轮附接到所述支撑件的第二侧; 耦合到所述液压室并附接到所述中心支撑件的制动器保持器; 第一制动器从液压室接收第一操作液压并且通过制动器保持器花键连接到变速箱; 以及第二制动器,其从所述液压泵壳体接收第二操作液压,连接到所述制动器保持器,并且花键连接到所述变速箱。